Tapered silicon structures, of interest for use, e.g., in atomic force microscopes, in field-emission devices, and in solid-state devices are made using silicon processing technology. Resulting tapered structures have, at their tip, a radius of curvature of 10 nanometers or less....http://www.google.com.au/patents/US5204581?utm_source=gb-gplus-sharePatent US5204581 - Device including a tapered microminiature silicon structure
