A shared current loop, multiple field apparatus and process for magnetron gas discharge processing is disclosed. The apparatus includes an evacuable chamber for containing a reactant gas. A multi-part cathode associated with a current loop generates multiple, independent electrical fields. The cathode...http://www.google.com.au/patents/US4738761?utm_source=gb-gplus-sharePatent US4738761 - Shared current loop, multiple field apparatus and process for plasma processing
