A first conductive film, a first insulating film, a semiconductor film, an impurity semiconductor film, and a second conductive film are stacked in this order (a thin-film stacked body); first etching is performed to expose the first conductive film and form at least a pattern of the thin-film stacked...http://www.google.com.au/patents/US7985605?utm_source=gb-gplus-sharePatent US7985605 - Light-emitting device and manufacturing method thereof
