A capacitor electrode is produced with an underlying barrier structure. A barrier incorporation layer is used and a CMP (chemical mechanical polishing) process is employed in order to produce the barrier structure. The capacitor electrode with an underlying barrier structure is produced by depositing...http://www.google.com.au/patents/US6686265?utm_source=gb-gplus-sharePatent US6686265 - Method of producing a capacitor electrode with a barrier structure
