A process for depositing a substantially pure, conformal metal layer on one or more substrates through the decomposition of a metal-containing precursor. During this deposition process, the substrate(s) is maintained at a temperature greater than the decomposition temperature of the precursor while the...http://www.google.com.au/patents/US7387815?utm_source=gb-gplus-sharePatent US7387815 - Metallization of substrate(s) by a liquid/vapor deposition process
