The invention comprises processes for determining and applying a deblurring filter that reduces inspection system distortion, of mask inspection images, by compensating for the non-uniform frequency response of the inspection system. In particular, an adaptive filter is determined empirically for an...http://www.google.com.au/patents/US20060034505?utm_source=gb-gplus-sharePatent US20060034505 - Method and apparatus for deblurring mask images
