The present invention is directed to systems and methods for irradiating regions of a thin film sample(s) with laser beam pulses having different energy beam characteristics that are generated and delivered via different optical paths. Exemplary methods include the steps of generating a plurality of...http://www.google.com.au/patents/US7318866?utm_source=gb-gplus-sharePatent US7318866 - Systems and methods for inducing crystallization of thin films using multiple optical paths
