An electrochemical plating system, which includes one or more plating cell reservoirs for storing plating solution and a chemical analyzer in fluidic communication with the one or more plating cell reservoirs. The chemical analyzer is configured to measure chemical concentrations of the plating solution....http://www.google.com.au/patents/US7851222?utm_source=gb-gplus-sharePatent US7851222 - System and methods for measuring chemical concentrations of a plating solution
