An ink-jet printhead fabrication process and product that uses selectivity rate controlled etch techniques to produce trenches on the frontside of a silicon substrate to define ink feed channels and resistor support regions. Location and size of features is made independent of etch rate by providing...http://www.google.com.au/patents/US6475402?utm_source=gb-gplus-sharePatent US6475402 - Ink feed channels and heater supports for thermal ink-jet printhead
