A high-sensitivity and low-noise micromachined capacitive lateral accelerometer device having an input axis and a monolithic, three-axis accelerometer utilizing the device are provided. The device includes at least one electrode having a side surface normal to the input axis. A relatively large proofmass...http://www.google.com.au/patents/US6938484?utm_source=gb-gplus-sharePatent US6938484 - Micromachined capacitive lateral accelerometer device and monolithic, three-axis accelerometer having same
