For especially simple and reliable handling of thin and/or bent semiconductor wafers it is proposed in a corresponding holding means (100) that there is a gas flowing through at least one first means (5) for producing the forces which pull a semiconductor wafer toward the means (100) based on the Bernoulli...http://www.google.com.au/patents/US20020140148?utm_source=gb-gplus-sharePatent US20020140148 - Holding means
