A method of manufacture of a thermal bend actuator, the method comprising the steps of: (a) depositing and etching, using a first mask, a first material on a substrate to form a first conductive layer; (b) depositing and etching, using a second mask, a second material on the substrate to form a first...http://www.google.com.au/patents/US6426014?utm_source=gb-gplus-sharePatent US6426014 - Method of manufacturing a thermal bend actuator
