A differential interferometric confocal microscope for measuring an object, the microscope including: a source-side pinhole array; a detector-side pinhole array; and an interferometer that images the array of pinholes of the source-side pinhole array onto a first array of spots located in front of an...http://www.google.com.au/patents/US7023560?utm_source=gb-gplus-sharePatent US7023560 - Method and apparatus for dark field interferometric confocal microscopy
