Apparatus for cleaning a surface of a substrate includes a cooling device, which is adapted to cool a region of the substrate in a vicinity of a particle on the surface, so as to cause a fluid in contact with the surface to form a frozen film in the vicinity of the particle. A radiation source is adapted...http://www.google.com.au/patents/US6864458?utm_source=gb-gplus-sharePatent US6864458 - Iced film substrate cleaning
