A method and apparatus for making an integrated circuit takes advantage of both polarized and phase shifted light in order to achieve a fine feature. The feature on the integrated circuit is obtained by exposing a first region to light that has a first polarization state, exposing a second portion of...http://www.google.com.au/patents/US6645678?utm_source=gb-gplus-sharePatent US6645678 - Method and apparatus for making an integrated circuit using polarization properties of light
