A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first platen and the second platen positioned above the device under test. A percentage of the top surface of the...http://www.google.com.au/patents/US7368925?utm_source=gb-gplus-sharePatent US7368925 - Probe station with two platens
