A programmable multizone fluids injector for use in single-wafer semiconductor processing equipment including an injector having a plurality of orifices therein which are divided into a number of separate zones or areas. These zones or areas are connected by means of appropriate passageways and conduits...http://www.google.com.au/patents/US5453124?utm_source=gb-gplus-sharePatent US5453124 - Programmable multizone gas injector for single-wafer semiconductor processing equipment
