Described herein is an optical probe (120) for use in characterizing surface defects in wafers, such as semiconductor wafers. The optical probe (120) detects laser light reflected from the surface (124) of the wafer (106) within various ranges of angles. Characteristics of defects in the surface (124)...http://www.google.com.au/patents/US7420669?utm_source=gb-gplus-sharePatent US7420669 - Optic probe for semiconductor characterization
