A high angular deflection micro-mirror system including a substrate, a spacer structure extending from the substrate, a deformable membrane supported by the spacer structure, one or more supports located off center on the deformable membrane, and one or more mirrors on the support cantilevered therefrom...http://www.google.com.au/patents/US7116463?utm_source=gb-gplus-sharePatent US7116463 - High angular deflection micro-mirror system
