A system and method for removing a layer from a substrate surface is provided. The method includes providing at least one encapsulating transport, where the encapsulating transport contains at least some reactive gas. At least one encapsulating transport is applied to the layer, and the layer is a chemically...http://www.google.com.au/patents/US20040261823?utm_source=gb-gplus-sharePatent US20040261823 - Method and apparatus for removing a target layer from a substrate using reactive gases
