An solid state scanning system having a single crystal silicon deflection mirror and scanning mirror is integrated with a light source. Separation of the micro-electro-mechanical systems and light emitters on separate substrates allows the use of flip-chip and solder bump bonding techniques for mounting...http://www.google.com.au/patents/US6014240?utm_source=gb-gplus-sharePatent US6014240 - Method and apparatus for an integrated laser beam scanner using a carrier substrate
