A polycrystalline thin film of good quality is obtained by improving a crystallization process of a semiconductor thin film using laser light. After conducting a film forming step of forming a non-single crystal semiconductor thin film on a surface of a substrate, an annealing step is conducted by irradiating...http://www.google.com.au/patents/US20010000243?utm_source=gb-gplus-sharePatent US20010000243 - Process for producing thin film semiconductor device and laser irradiation apparatus
