Energy of a laser beam with which a non-single crystalline semiconductor film is irradiated to be annealed is uniformly distributed. The laser beam is obtained from a solid-state laser such as a YAG laser which can easily cause interference in an optical system based on the conventional method of simply...http://www.google.com.au/patents/US6650480?utm_source=gb-gplus-sharePatent US6650480 - Method of processing beam, laser irradiation apparatus, and method of manufacturing semiconductor device
