A microactuator preferably in the form of a microminiature valve for controlling the flow of a fluid carried by a flow channel includes a first substrate having a thermally-actuated member selectively operated by a thermal actuator such that the first substrate thereby develops thermal energy, and a...http://www.google.com.au/patents/US5529279?utm_source=gb-gplus-sharePatent US5529279 - Thermal isolation structures for microactuators
