This invention is a process for fabricating a DRAM capacitor having an annularly-grooved, cup-shaped storage-node plate and a cell plate which covers both inner and outer surfaces of the storage-node plate. A plurality of oxide layers having alternately-varying composition are deposited...http://www.google.com.au/patents/US5763286?utm_source=gb-gplus-sharePatent US5763286 - Process for manufacturing a DRAM capacitor having an annularly-grooved, cup-shaped storage-node plate which stores charge on inner and outer surfaces 
