There is provided the step of forming a polysilicon film by scanning a laser irradiation region while irradiating a continuous wave laser onto an amorphous silicon film formed into an island or ribbon-like shape on a substrate. If a width of a rectangle in which the amorphous silicon film is inscribed...http://www.google.com.au/patents/US6692999?utm_source=gb-gplus-sharePatent US6692999 - Polysilicon film forming method
