The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of...http://www.google.com.au/patents/US20070115535?utm_source=gb-gplus-sharePatent US20070115535 - Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime
