Apparatus and method for the deposition of a thin metal film on a surface of a workpiece as the workpiece is positioned adjacent to a deposition source and as the workpiece and deposition source rotate relative to each other about a first axis. The workpiece can also be moved relative to the deposition...http://www.google.com.au/patents/US4818561?utm_source=gb-gplus-sharePatent US4818561 - Thin film deposition apparatus and method
