A semiconductor micro-electromechanical system (MEMS) switch provided with noble metal contacts that act as an oxygen barrier to copper electrodes is described. The MEMS switch is fully integrated into a CMOS semiconductor fabrication line. The integration techniques, materials and processes are fully...http://www.google.com.au/patents/US20050007217?utm_source=gb-gplus-sharePatent US20050007217 - NOBLE METAL CONTACTS FOR MICRO-ELECTROMECHANICAL SWITCHES
