A vibrating microdevice, such as a vibrating micromirror, includes a vibrating structure which is connected to a supporting body via at least one spring structure in an at least a largely floating manner, the spring structure including at least one torsion-spring element defining a torsion axis and permitting...http://www.google.com.au/patents/US6672732?utm_source=gb-gplus-sharePatent US6672732 - Micromechanical oscillating device
