A process and system for processing a thin film sample, as well as the thin film structure are provided. In particular, a beam generator can be controlled to emit successive irradiation beam pulses at a predetermined repetition rate. Each irradiation beam pulse may be masked to define a first plurality...http://www.google.com.au/patents/US20060060130?utm_source=gb-gplus-sharePatent US20060060130 - Process and system for laser crystallization processing of film regions on a substrate to provide substantial uniformity within arears in such regions and edge areas thereof, and a structure of film regions