It is an object to prevent functions expected originally from being unexhibited when impurities to be introduced into a solid sample are mixed with each other, and to implement plasma doping with high precision. In order to distinguish impurities which may be mixed from impurities which should not be...http://www.google.com.au/patents/US7626184?utm_source=gb-gplus-sharePatent US7626184 - Impurity introducing apparatus and impurity introducing method
