A method for fabricating patterned ceramic layers on areas of a relief structure, wherein the layers may be arranged essentially perpendicular to a top side of a substrate. In exemplary embodiments, a patterned ceramic layer forms an oxide collar for a trench capacitor. The oxide collar is produced by...http://www.google.com.au/patents/US20050037565?utm_source=gb-gplus-sharePatent US20050037565 - Method of fabricating an oxide collar for a trench capacitor
