Methods of verifying planarity of a microelectronic component support of a microelectronic component test system with respect to a head of the test system are disclosed herein. In one embodiment, a method includes juxtaposing a probe card with a contact surface that is carried by the microelectronic,...http://www.google.com.au/patents/US7211997?utm_source=gb-gplus-sharePatent US7211997 - Planarity diagnostic system, E.G., for microelectronic component test systems
