A process of growing a dielectric layer includes a step of heating a gas mixture of at least one gas having a first chemical element of oxygen and a second chemical element other than oxygen to a first predetermined temperature to produce reactive precursors of the gas mixture. The reactive precursors...http://www.google.com.au/patents/US5861190?utm_source=gb-gplus-sharePatent US5861190 - Arrangement for growing a thin dielectric layer on a semiconductor wafer at low temperatures
