System and method for detecting suspicious process faults. A preferred embodiment comprises determining a strength relationship between wafer acceptance test (WAT) parameters and process steps. The strength relationships indicate the affect of a failed process step on the value of a WAT parameter. Thus,...http://www.google.com.au/patents/US7035770?utm_source=gb-gplus-sharePatent US7035770 - Fuzzy reasoning model for semiconductor process fault detection using wafer acceptance test data
