A microchannel plate array assembly (10), comprising an array of microchannels in a microchannel plate (24), is provided in place of a conventional effusion cell to attain high and uniform fluxes localized in the substrate area for the growth of films thereon by gas source molecular beam epitaxy. Using...http://www.google.com.au/patents/US5188671?utm_source=gb-gplus-sharePatent US5188671 - Multichannel plate assembly for gas source molecular beam epitaxy
