A treating tank includes injection pipes for injecting a treating liquid. Each injection pipe has a closed distal end, and a plurality of jet bores arranged along a side wall thereof for jetting, into the treating tank, the treating liquid introduced through a proximal end. Each injection pipe includes...http://www.google.com.au/patents/US6199568?utm_source=gb-gplus-sharePatent US6199568 - Treating tank, and substrate treating apparatus having the treating tank
