An automated defect inspection system has been invented and is used on patterned wafers, whole wafers, broken wafers, partial wafers, sawn wafers such as on film frames, JEDEC trays, Auer boats, die in gel or waffle packs, MCMs, etc. and is specifically intended and designed for second optical wafer...http://www.google.com.au/patents/US6826298?utm_source=gb-gplus-sharePatent US6826298 - Automated wafer defect inspection system and a process of performing such inspection
