A gasket for sealing interfaces between a micro-machined device and a macroscopic connection to the device. The gasket can include an o-ring, a frame, a tool post and a notch. Alignment of the tool post with a dimple formed in or through a surface of a component adjacent to the gasket facilitates alignment...http://www.google.com.au/patents/US6592128?utm_source=gb-gplus-sharePatent US6592128 - Integrated pneumatic o-ring gasket for mems devices
