A processing chamber for depositing and/or removing material onto/from a semiconductor wafer when the wafer is subjected to an electrolyte and in an electric field, and in which the electrolyte is introduced and/or evacuated from a closely confined containment region. A hollow sleeve is utilized to form...http://www.google.com.au/patents/US6179982?utm_source=gb-gplus-sharePatent US6179982 - Introducing and reclaiming liquid in a wafer processing chamber
