A method, system, and related computer program products and computer-readable numerical arrays for computer simulation of a photolithographic process is described. In one preferred embodiment, simulation of a photolithographic process is provided in which a computation time for computing each subsequent...http://www.google.com.au/patents/US7921383?utm_source=gb-gplus-sharePatent US7921383 - Photolithographic process simulation including efficient result computation for multiple process variation values
