WO2015148108A3 - Ems device having a non-electrically active absorber - Google Patents

Ems device having a non-electrically active absorber Download PDF

Info

Publication number
WO2015148108A3
WO2015148108A3 PCT/US2015/019678 US2015019678W WO2015148108A3 WO 2015148108 A3 WO2015148108 A3 WO 2015148108A3 US 2015019678 W US2015019678 W US 2015019678W WO 2015148108 A3 WO2015148108 A3 WO 2015148108A3
Authority
WO
WIPO (PCT)
Prior art keywords
absorber
electrically active
over
movable electrode
ems device
Prior art date
Application number
PCT/US2015/019678
Other languages
French (fr)
Other versions
WO2015148108A2 (en
Inventor
John Hyunchul HONG
Jian Jim Ma
Bing Wen
Tallis Young CHANG
Edward Keat Leem Chan
Brandon John HONG
Kristopher Andrew Lavery
Yaoling Pan
Cheonhong KIM
Original Assignee
Qualcomm Mems Technologies, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Mems Technologies, Inc. filed Critical Qualcomm Mems Technologies, Inc.
Publication of WO2015148108A2 publication Critical patent/WO2015148108A2/en
Publication of WO2015148108A3 publication Critical patent/WO2015148108A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T1/00—General purpose image data processing
    • G06T1/20—Processor architectures; Processor configuration, e.g. pipelining
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/2003—Display of colours
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/346—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on modulation of the reflection angle, e.g. micromirrors
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/3466—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on interferometric effect
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G5/00—Control arrangements or circuits for visual indicators common to cathode-ray tube indicators and other visual indicators
    • G09G5/003—Details of a display terminal, the details relating to the control arrangement of the display terminal and to the interfaces thereto

Abstract

This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having a non-electrically active absorber. In one aspect, the EMS device includes a stationary electrode over a substrate, a dielectric layer over the stationary electrode, an absorber over the dielectric layer, and a movable electrode over the absorber. The movable electrode is configured to move to a plurality of positions between the absorber and the movable electrode to define a plurality of gap heights. Furthermore, the absorber includes a non-electrically active material. In some implementations, the absorber can include an optical layer having a plurality of particles in an electrically insulating material.
PCT/US2015/019678 2014-03-28 2015-03-10 Ems device having a non-electrically active absorber WO2015148108A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201461971744P 2014-03-28 2014-03-28
US61/971,744 2014-03-28
US14/564,846 US20150277098A1 (en) 2014-03-28 2014-12-09 Ems device having a non-electrically active absorber
US14/564,846 2014-12-09

Publications (2)

Publication Number Publication Date
WO2015148108A2 WO2015148108A2 (en) 2015-10-01
WO2015148108A3 true WO2015148108A3 (en) 2015-11-05

Family

ID=54190080

Family Applications (3)

Application Number Title Priority Date Filing Date
PCT/US2015/019676 WO2015148107A1 (en) 2014-03-28 2015-03-10 Flexible ems device using organic materials
PCT/US2015/019678 WO2015148108A2 (en) 2014-03-28 2015-03-10 Ems device having a non-electrically active absorber
PCT/US2015/019725 WO2015148110A1 (en) 2014-03-28 2015-03-10 Ems device having flexible support posts

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/US2015/019676 WO2015148107A1 (en) 2014-03-28 2015-03-10 Flexible ems device using organic materials

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/US2015/019725 WO2015148110A1 (en) 2014-03-28 2015-03-10 Ems device having flexible support posts

Country Status (3)

Country Link
US (3) US9477076B2 (en)
TW (3) TWI599794B (en)
WO (3) WO2015148107A1 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9512536B2 (en) 2013-09-27 2016-12-06 Apple Inc. Methods for forming white anodized films by metal complex infusion
US9477076B2 (en) 2014-03-28 2016-10-25 Qualcomm Mems Technologies, Inc. EMS device having flexible support posts
US10781529B2 (en) 2015-10-30 2020-09-22 Apple Inc. Anodized films with pigment coloring
US10629468B2 (en) 2016-02-11 2020-04-21 Skyworks Solutions, Inc. Device packaging using a recyclable carrier substrate
US20170243739A1 (en) * 2016-02-24 2017-08-24 Skyworks Solutions, Inc. 3d micromold and pattern transfer
US10331004B2 (en) * 2016-03-22 2019-06-25 Marketing Displays, Inc. Graphic mirror
US10453763B2 (en) 2016-08-10 2019-10-22 Skyworks Solutions, Inc. Packaging structures with improved adhesion and strength
CN108242426B (en) * 2016-12-23 2020-04-07 上海新微技术研发中心有限公司 Semiconductor device and manufacturing method thereof
FI20175691A1 (en) 2017-07-14 2019-01-15 Senseg Oy Electrostatic actuator structure
CN207818085U (en) * 2017-12-29 2018-09-04 昆山国显光电有限公司 Modular structure and flexible display apparatus including modular structure
CN108267879B (en) * 2018-02-11 2021-02-02 京东方科技集团股份有限公司 Liquid crystal display module and display device
US11630299B1 (en) * 2019-04-30 2023-04-18 Arizona Board Of Regents On Behalf Of The University Of Arizona Amplified deformable mirror
DE102019206761A1 (en) * 2019-05-10 2020-11-12 Robert Bosch Gmbh Mirror device for an interferometer device, interferometer device and method for producing a mirror device
CN112255465A (en) * 2020-10-14 2021-01-22 河南师范大学 Multi-frequency near-zero transmission sensor based on ear-shaped resonator and detection method
CN112885887B (en) * 2021-02-24 2022-10-21 厦门天马微电子有限公司 Display panel, display device and manufacturing method
WO2023137539A1 (en) * 2022-01-21 2023-07-27 Decorby Raymond Monolithic optical pressure sensors and transducers
CN114779464A (en) * 2022-05-24 2022-07-22 北京有竹居网络技术有限公司 Optical signal modulator, control method and projection equipment

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070090483A1 (en) * 2005-10-25 2007-04-26 The Charles Stark Draper Laboratory, Inc. Systems, methods and devices relating to actuatably moveable machines
US7916378B2 (en) * 2007-03-08 2011-03-29 Qualcomm Mems Technologies, Inc. Method and apparatus for providing a light absorbing mask in an interferometric modulator display
US20120249558A1 (en) * 2011-04-04 2012-10-04 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US20130135338A1 (en) * 2011-11-30 2013-05-30 Qualcomm Mems Technologies, Inc. Method and system for subpixel-level image multitoning
WO2014150269A1 (en) * 2013-03-14 2014-09-25 Qualcomm Mems Technologies, Inc. Electromechanical systems device with segmented electrodes

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7071520B2 (en) 2000-08-23 2006-07-04 Reflectivity, Inc MEMS with flexible portions made of novel materials
US7023606B2 (en) 2001-08-03 2006-04-04 Reflectivity, Inc Micromirror array for projection TV
US8217381B2 (en) * 2004-06-04 2012-07-10 The Board Of Trustees Of The University Of Illinois Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics
US7116463B2 (en) * 2004-07-15 2006-10-03 Optron Systems, Inc. High angular deflection micro-mirror system
US8004504B2 (en) * 2004-09-27 2011-08-23 Qualcomm Mems Technologies, Inc. Reduced capacitance display element
US7898521B2 (en) 2004-09-27 2011-03-01 Qualcomm Mems Technologies, Inc. Device and method for wavelength filtering
US7657242B2 (en) 2004-09-27 2010-02-02 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US20060132030A1 (en) * 2004-12-22 2006-06-22 Zhanjun Gao Display element stress free at the critical layer
DE102005024921A1 (en) 2005-05-23 2006-11-30 Samsung Sdi Germany Gmbh Elastomer based projection display unit , has color filter section, and buffer section enabling lateral extension of one of contact sections and elastomer section, where electric field is created between contact sections
AU2006202315B2 (en) 2005-06-17 2011-01-27 Viavi Solutions Inc. Covert security coating
CN101228093B (en) * 2005-07-22 2012-11-28 高通Mems科技公司 MEMS devices having support structures and methods of fabricating the same
CN101228091A (en) 2005-07-22 2008-07-23 高通股份有限公司 Support structure for MEMS device and methods thereof
US20070242358A1 (en) 2006-04-18 2007-10-18 Xerox Corporation Fabry-perot tunable filter
US20090034055A1 (en) * 2007-07-31 2009-02-05 Gibson Gary A Plasmon-based color tunable devices
DE102009021936A1 (en) 2009-05-19 2010-11-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optical filter and a method for producing an optical filter
US8559096B2 (en) * 2009-06-18 2013-10-15 Hewlett-Packard Development Company, L.P. Reflective display pixel
US7999995B2 (en) * 2009-09-28 2011-08-16 Sharp Laboratories Of America, Inc. Full color range interferometric modulation
CN102834761A (en) 2010-04-09 2012-12-19 高通Mems科技公司 Mechanical layer and methods of forming the same
US20120327092A1 (en) * 2011-06-21 2012-12-27 Qualcomm Mems Technologies, Inc. Planarized spacer for cover plate over electromechanical systems device array
US9477076B2 (en) 2014-03-28 2016-10-25 Qualcomm Mems Technologies, Inc. EMS device having flexible support posts

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070090483A1 (en) * 2005-10-25 2007-04-26 The Charles Stark Draper Laboratory, Inc. Systems, methods and devices relating to actuatably moveable machines
US7916378B2 (en) * 2007-03-08 2011-03-29 Qualcomm Mems Technologies, Inc. Method and apparatus for providing a light absorbing mask in an interferometric modulator display
US20120249558A1 (en) * 2011-04-04 2012-10-04 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US20130135338A1 (en) * 2011-11-30 2013-05-30 Qualcomm Mems Technologies, Inc. Method and system for subpixel-level image multitoning
WO2014150269A1 (en) * 2013-03-14 2014-09-25 Qualcomm Mems Technologies, Inc. Electromechanical systems device with segmented electrodes

Also Published As

Publication number Publication date
WO2015148110A1 (en) 2015-10-01
US20150277099A1 (en) 2015-10-01
TW201546487A (en) 2015-12-16
TWI599794B (en) 2017-09-21
US20150277098A1 (en) 2015-10-01
WO2015148107A1 (en) 2015-10-01
TW201600885A (en) 2016-01-01
TW201602634A (en) 2016-01-16
US20150277097A1 (en) 2015-10-01
WO2015148108A2 (en) 2015-10-01
US9477076B2 (en) 2016-10-25

Similar Documents

Publication Publication Date Title
WO2015148108A3 (en) Ems device having a non-electrically active absorber
WO2016053623A3 (en) Three dimensional memory device having comb-shaped source electrode and methods of making thereof
EP3441986B8 (en) Insulated electrical conductor
EP3504719A4 (en) Thermally conductive electrical insulation material
EP3064556A4 (en) Electrically conductive composition for thin film printing, and method for forming thin film conductive pattern
EP3509144A4 (en) Electrode material for electricity storage devices, electrode for electricity storage devices, and electricity storage device
EP3279251A4 (en) Electrically conductive composition, under layer-attached current collector for electric storage devices, electrode for electric storage devices, and electric storage device
EP3586358A4 (en) Electrical device including a substrate and a transparent conductive layer and a process of forming the same
EP3472839A4 (en) Apparatus and methods for electrical switching
EP3376571A4 (en) Negative electrode active material for electrical device, and electrical device using same
EP3420023A4 (en) Electrically conductive composition and applications for said composition
EP3305043A4 (en) Method and an arrangement for producing electrically conductive patterns on substrates
WO2015139033A8 (en) Voltage regulation of device functional properties
EP3460816A4 (en) Carbonaceous material, and electrode material for electric double layer capacitor, electrode for electric double layer capacitor and electric double layer capacitor that contain carbonaceous material
PL3293748T3 (en) Improved contactor device for high current switching applications
EP3642852A4 (en) Vacuum compatible electrical insulator
WO2018060118A3 (en) Electrode for a lithium-ion battery and device and method for producing said electrode
EP3236520A4 (en) Negative-electrode active material for electrical device, and electrical device using same
EP3413329A4 (en) Wiring-improved structure for rotary double-breakpoint switch contact system
EP3657579A4 (en) Method for predoping negative electrode active material, electrode for electrical device, and method for manufacturing electrical device
EP3682456A4 (en) An electrical switch
EP3631934A4 (en) Methods for operating electrical power systems
EP3100281A4 (en) Electrically insulating material and conductor wrap for electrical equipment, such as transformers
EP4058843A4 (en) Electrode structure for creating electrical potential gradient
MY192442A (en) Method for forming structures upon a substrate

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 15713350

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 15713350

Country of ref document: EP

Kind code of ref document: A2