WO2015060941A1

WO2015060941A1 - Polarizer with wire pair over rib

Info

Publication number: WO2015060941A1
Application number: PCT/US2014/053161
Authority: WO
Inventors: Bin Wang; Ted WANGENSTEEN; Rumyana PETROVA; Mike Black; Steven Marks; Dean Probst
Original assignee: Moxtek, Inc.
Priority date: 2013-10-24
Filing date: 2014-08-28
Publication date: 2015-04-30
Also published as: WO2015060939A1; WO2015060943A1

Abstract

Wire grid polarizers (10, 20, 30, 40, 50, 60, 70, 80, 90, 100, 110), and methods of making wire grid polarizers, including an array of parallel, elongated nano-structures (15) disposed over a surface of a substrate (11). Each of the nano-structures can include a first rib (14) disposed over a surface of a substrate and a pair of parallel, elongated wires (12), each laterally oriented with respect to one another, and disposed over the first rib. The wire grid polarizers can be durable with high transmission of one polarization of light, high contrast, and / or small pitch. The wire grid polarizers can also have high absorption or high reflection of an opposite polarization of light.

Description

Polarizer with Wire Pair over Rib

FIELD OF THE INVENTION

The present application is related generally to wire grid polarizers.

BACKGROUND

Wire grid polarizers may be used for polarizing light, by allowing one polarization of light to pass through the polarizer, and reflecting or absorbing an opposite polarization of light. For simplicity, the polarization that primarily passes through the polarizer will be hereafter referred to as p-polarized light and the polarization that is primarily reflected or absorbed will be hereafter referred to as s-polarized light. Goals of wire grid polarizer design include increasing transmission of p-polarized light, decreasing transmission of s- polarized light, and increasing reflection or absorption of s-polarized light. Different applications have different requirements.

The goals of increasing transmission of p-polarized light and decreasing transmission of s-polarized light are common to most or all applications. There can be a trade-off between these two. In other words, certain designs that may increase transmission of p-polarized light may also undesirably increase transmission of s-polarized light. Other designs that decrease transmission of s-polarized light may also undesirably decrease transmission of p-polarized light.

For some applications, it is desirable to reflect as much s-polarized light as possible so that both polarized light beams can be effectively utilized. It can be important in such designs to increase reflection of s-polarized light without reducing transmission of p-polarized light. Sometimes there is a trade-off in a particular design between increasing transmission of p- polarized light and increasing reflection of s-polarized light.

For other applications, absorption of s-polarized light may be preferred, such as for example if reflection of light can disrupt the image or other intended use. In a transmissive panel image projection system, reflected light may go back into the LCD imager causing image degradation, or stray light can reach the screen, degrading contrast. An ideal selectively absorptive wire grid polarizer will transmit all p-polarized light and selectively absorb all s-polarized light. In reality, some s-polarized light is transmitted and some reflected and some p-polarized light is absorbed and some reflected. Sometimes there is a trade-off in a particular design between increasing transmission of p-polarized light and increasing absorption of s- polarized light.

The effectiveness of a wire grid polarizer can thus be quantified by (1) high transmission of p-polarized light; (2) high contrast; and (3) depending on the design, high absorption or reflection of s-polarized light. Contrast is equal to percent of p-polarized light transmitted (Tp) divided by percent of s- polarized light transmitted (Ts): Contrast = Tp/Ts.

It can be important in wire grid polarizers for infrared, visible, and ultraviolet light to have wires with small width and pitch, such as nanometer or micrometer width and pitch, for effective polarization. Typically, a pitch of less than half of the wavelength of light to be polarized is needed for effective polarization. Smaller pitches may improve the contrast. Thus, small pitch can be an important feature of wire grid polarizers. Manufacture of wire grid polarizers with sufficiently small pitch is challenging and is a goal of research in this field.

Small wires can be damaged by handling and by environmental conditions. Protection of the wires can be important in wire grid polarizers. Durability of wire grid polarizers is thus another important feature.

For example, see U.S. Patent Numbers US 5,991,075, US 6,288,840, US 6,665,119, US 7,630,133, US 7,692,860, US 7,800,823, US 7,961,393, and US 8,426,121; U.S. Patent Publication Numbers US 2008/0055723, US 2009/0041971, and US 2009/0053655; U.S. Patent Application Number 13/326,566, filed on 12/15/2011; "Application of 100 A linewidth structures fabricated by shadowing techniques" by D.C. Flanders in J. Vac. Sci. Technol., 19(4), Nov. /Dec. 1981; and "Submicron periodicity gratings as artificial anisotropic dielectrics" by Dale C. Flanders in Appl. Phys. Lett.42 (6), 15 March 1983, pp. 492-494. SUMMARY

It has been recognized that it would be advantageous to provide a durable wire grid polarizer with high transmission of p-polarized light, high contrast, and / or small pitch. High absorption or high reflection of s- polarized light, depending on the design, can also be important. The present invention is directed to various embodiments of, and methods of making, wire grid polarizers having a wire pair over a first rib. Each of the various embodiments or methods may satisfy one or more of these needs.

The wire grid polarizer can comprise an array of parallel, elongated na no-structures disposed over a surface of a substrate. Each of the nano- structures can include (1) a first rib disposed over the surface of the substrate; (2) a pair of parallel, elongated wires, each laterally oriented with respect to one another, and disposed over the first rib; and (3) a first gap between the pair of wires. There can be a plurality of second gaps, including a second gap disposed between adjacent first ribs. The substrate can be transmissive to incoming light.

A method of making a wire grid polarizer can comprise the following steps:

1. providing a substrate having an array of parallel, elongated support ribs disposed over a transmissive substrate with solid-material-free support-rib gaps between the support ribs;

2. conformal coating the substrate and the support ribs with a layer of

material while maintaining the support-rib gaps between the support ribs; 3. etching the layer of material to remove horizontal segments and leaving an array of parallel, elongated wires along sides of the support ribs, including a pair of wires for each support rib with a wire disposed along each side of the support rib; and

4. using the wires as a mask and etching the support ribs between two wires of the pair of wires and etching the substrate between adjacent pairs of wires forming an array of parallel elongated first ribs, with each pair of wires disposed over a single first rib. BRIEF DESCRIPTION OF THE DRAWINGS

FIGs. 1-11 are schematic cross-sectional side views of wire grid polarizers 10, 20, 30, 40, 50, 60, 70, 80, 90, 100, and 110 in accordance with embodiments of the present invention. These wire grid polarizers 10, 20, 30, 40, 50, 60, 70, 80, 90, 100, and 110 can comprise an array of parallel, elongated na no-structures 15 disposed over a surface lis of a substrate 11. Each of the na no-structures 15 can include (1) a first rib 14 disposed over the surface lis of the substrate 11; (2) a pair of parallel, elongated wires 12, each laterally oriented with respect to one another, and disposed over the first rib 14; and a first gap Gi between the pair of wires 12. There can be a plurality of second gaps G₂ including a second gap G₂ disposed between adjacent first ribs 14.

FIG. 1 shows a wire grid polarizer 10 which includes a support rib 13 disposed over the first rib 14 between the pair of wires 12 and extending partially into the first gap Gi.

FIG. 2 shows a wire grid polarizer 20 wherein the first gaps GI are solid-material-free gaps from a top 12_t of the wires 12 to a base 12 of the wires 12.

FIG. 3 shows a wire grid polarizer 30 which includes a pair of parallel, elongated second ribs 34 disposed over the first rib 14 at outer edges 14₀ of the first rib 14, wherein each wire 12 of the pair of wires 12 is disposed over a different second rib 34, and wherein the first gap Gi extends from between the pair of wires 12 down between the pair of second ribs 34.

FIGs. 4-6 show wire grid polarizers 40, 50, and 60 which are similar to wire grid polarizers 10, 20, and 30 respectively, but with the addition of a pair of parallel, elongated side bars 42, each laterally oriented with respect to one another, including a side bar 42 disposed along and adjoining each side 12_s of each wire 12.

FIG. 7 shows a wire grid polarizer 70, similar to one of the wire grid polarizers 10, 20, 30, 40, 50, or 60 in FIGs. 1-6, but with the addition of a fill material 41 disposed in the gaps G and above tops 12_t of the wires 12. FIGs. 8-11 show wire grid polarizers 80, 90, 100, and 110, similar to the wire grid polarizers in FIGs. 1-6, but also showing that the wires 12, the support ribs 13, the first ribs 14, the second ribs 34, the fill material 41, and the substrate 11 can be separate regions and each region can be made of a different material than one, some, or al l of the other regions.

FIG. 11 shows a wire grid polarizer 110, that is simi lar to wire grid polarizer 70 in FIG. 7, but further showing that the fill material 41 can be etched at least down to tops 12_t of the wires 12 thus separating fill material 41_a in one gap Gi from fill material 41 in an adjacent gap G₂.

FIGs. 1-17 are schematic cross-sectional side views illustrating a method of manufacture of wire grid polarizers according to embodiments of the present invention.

FIG. 12 shows a step of providing a substrate 11 having an array of parallel, elongated support ribs 13 disposed over the substrate 11 with solid- material-free support-rib gaps G_s between the support ribs 13.

FIG. 13 shows that the substrate 11 can be divided into different regions 101b, 101c, and lOld (each reg ion can be a different material from one or both of the other reg ions) and the support ribs 13 can be a different material 101a than one, some, or all of the other regions 101b, 101c, and lOld .

FIG. 14 shows a step of conformal coating the substrate 11 and the support ribs 13 with a layer of material 112 while maintaining the support-rib gaps G_s between the support ribs 13.

FIGs. 14- 15 show a step of etching the layer of material 112 to remove horizontal segments 112_h and leaving an array of pa rallel, elongated wires 12 along sides of the support ribs 13, including a pair of wires 12 for each support rib 13 with a wire 12 disposed a long each side of the support rib 13.

FIG. 16 shows a step of etching 131_a the support ribs 13 between two wires 12 of the pair of wires 12 and etching 131_b the substrate 11 between adjacent pairs of wires 12 forming the first ribs 14 as shown in FIGs. 1- 11.

FIG. 17 shows a step of conformal coating the wires 12, the first ribs 14, the second ribs 34 (if used) and exposed portions of the substrate 11 with a second layer of material 172 while maintaining the first gap Gi between the pair of wires 12 and the second gaps G₂ between adjacent first ribs 14.

FIGs. 4-6 and 17 show a step of etching the second layer of material 172 to remove horizontal segments 172_h and leaving an array of parallel, elongated side bars 42.

FIG. 7 shows a step of backfilling the gaps Gi and G₂ and above tops 12_t of the wires 12 with fill material 41.

FIG. 11 shows a step of etching the fill material 41 at least down to tops 12_t of the wires 12 such that fill material 41_a in a gap Gi is separate from fill material 41 in an adjacent gap G₂.

REFERENCE NUMBERS IN THE DRAWINGS

10 wire grid polarizer

11 substrate

Us substrate surface

12 wire

12_t wire top

13 support rib

13_t support rib top

14 first rib

14o first rib outer edge

14_t first rib top

15 nano-structure

20 wire grid polarizer

30 wire grid polarizer

34 second rib

70 wire grid polarizer

41 fill material

41a fill material in the first gap

41b fill material in the second gap 42 side bar

80 wire grid polarizer

90 wire grid polarizer

100 wire grid polarizer

110 wire grid polarizer

112 layer of material

112h horizontal segment of the layer of material

112_v vertical segment of the layer of material

172 second layer of material

172_h horizontal segment of the second layer of material

172_v vertical segment of the second layer of material

G gap - first gap and / or second gap

Gi first gap

G₂ second gap

Gs support-rib gap

Tl2 wire thickness

Tl3 support rib thickness

Tl4 first rib thickness

T₃₄ second rib thickness

Wi first gap width

W₂ second gap width

w₁₂ wire width

w₁₃ support rib width

w₁₁₂ layer of material width

w_Gs support rib gap width

DEFINITIONS

Many materials used in optical structures absorb some light, reflect some light, and transmit some light. The following definitions are intended to distinguish between materials or structures that are primarily absorptive, primarily reflective, or primarily transmissive. As used herein, the term "absorptive" means substantially absorptive of light in the wavelength of interest.

a. Whether a material is "absorptive" is relative to other materials used in the polarizer. Thus, an absorptive structure will absorb substantially more than a reflective or a transmissive structure. b. Whether a material is "absorptive" is dependent on the wavelength of interest. A material can be absorptive in one wavelength range but not in another.

c. In one aspect, an absorptive structure can absorb greater than 40% and reflect less than 60% of light in the wavelength of interest (assuming the absorptive structure is an optically thick film - i.e. greater than the skin depth thickness).

d. Absorptive ribs can be used for selectively absorbing one

polarization of light.

As used herein, the term "reflective" means substantially reflective of light in the wavelength of interest.

a. Whether a material is "reflective" is relative to other materials used in the polarizer. Thus, a reflective structure will reflect substantially more than an absorptive or a transmissive structure.

b. Whether a material is "reflective" is dependent on the wavelength of interest. A material can be reflective in one wavelength range but not in another. Some wavelength ranges can effectively utilize highly reflective materials. At other wavelength ranges, especially lower wavelengths where material degradation is more likely to occur, the choice of materials may be more limited and an optical designer may need to accept materials with a lower reflectance than desired.

c. In one aspect, a reflective structure can reflect greater than 80% and absorb less than 20% of light in the wavelength of interest (assuming the reflective structure is an optically thick film - i.e. greater than the skin depth thickness). d. Reflective wires can be used for separating one polarization of light from an opposite polarization of light.

e. Metals are often used as reflective materials.

As used herein, the term "transmissive" means substantially transmissive to light in the wavelength of interest.

a. Whether a material is "transmissive" is relative to other materials used in the polarizer. Thus, a transmissive structure will transmit substantially more than an absorptive or a reflective structure. b. Whether a material is "transmissive" is dependent on the

wavelength of interest. A material can be transmissive in one wavelength range but not in another.

c. In one aspect, a transmissive structure can transmit greater than 90% and absorb less than 10% of light in the wavelength of interest.

As used in these definitions, the term "material" refers to the overall material of a particular structure. Thus, a structure that is "absorptive" is made of a material that as a whole is substantially absorptive, even though the material may include some reflective or transmissive components. Thus for example, a rib made of a sufficient amount of absorptive material so that it substantially absorbs light is an absorptive rib even though the rib may include some reflective or transmissive material embedded therein.

As used herein, the term "light" can mean light or electromagnetic radiation in the x-ray, ultraviolet, visible, and / or infrared, or other regions of the electromagnetic spectrum.

As used herein, the term "substrate" includes a base material, such as for example a glass wafer. The term "substrate" includes a single material, and also includes multiple materials, such as for example a glass wafer with at least one thin film on a surface of the wafer used together as the base material. DETAILED DESCRIPTION

As illustrated in FIGs. 1-11, wire grid polarizers 10, 20, 30, 40, 50, 60, 70, 80, 90, 100, and 110 are shown comprising an array of parallel, elongated na no-structures 15 disposed over a surface ll_s of a substrate 11. Each of the na no-structures 15 can include (1) a first rib 14 disposed over the surface ll_s of the substrate 11; (2) a pair of parallel, elongated wires 12, each laterally oriented with respect to one another, and disposed over the first rib 14; and (3) a first gap Gi between the pair of wires 12. The wires 12 can be disposed at outer lateral edges 14₀ of the first ribs 14. There can be a plurality of second gaps G₂ including a second gap G₂ disposed between adjacent first ribs 14.

As illustrated in FIGs.4-6, wire grid polarizers 40, 50, and 60 are similar to wire grid polarizers 10, 20, and 30 respectively, but with the addition of a pair of parallel, elongated side bars 42, each laterally oriented with respect to one another, including a side bar 42 disposed along and adjoining each side 12_s of each wire 12. These added side bars 42 can be beneficial for improving contrast and transmission of p-polarized light. The side bars 42 can also be beneficial for improved corrosion resistance. Side bars 42 can also be added to the polarizers shown in FIGs.7-11.

The first rib 14, the pair of wires 12, and the side bars 42 can be made of the same or different materials. In one embodiment, at least one of the first rib 14, the pair of wires 12, and the side bars 42 can be absorptive and at least one of the first rib 14, the pair of wires 12, and the side bars 42 can be reflective. At least one of the first rib 14, the pair of wires 12, and the side bars 42 can be transmissive. These designs can be effective selectively absorptive wire grid polarizers.

As shown in FIGs. 1, 4, and 8, the wire grid polarizer 10 and 80 can further comprise a support rib 13 disposed over the first rib 14 between the pair of wires 12 and extending partially into the first gap Gi. The support rib 13 can provide structural support to the wires 12. Modeling has shown that the presence of the support rib can adversely affect contrast and

transmission of p-polarized light (Tp). Thus, there can be a trade-off in design between a need for additional support for the wires 12 and a decrease in performance. Smaller wires (e.g. < 50 nm wide) may need additional support, thus the support rib 13 may be needed for polarizers for lower wavelengths, such as the ultraviolet.

Use of a shorter or thinner support rib 13 can in some designs provide sufficient support with minimal degradation of performance. The wire grid polarizers of the present invention can include a support rib thickness Ti₃ that is between 5% and 35% of a wire thickness T₁₂ in one aspect, between 5% and 25% of a wire thickness T₁₂ in another aspect, or between 15% and 35% of a wire thickness T₁₂ in another aspect. These thicknesses can balance between support and performance.

The support rib 13, the first rib 14, and the substrate 11 can all be made of a single material. The support rib 13 and the first rib 14 can be formed by etching the substrate 11. The support rib 13, the first rib 14, and the substrate 11 can all be transmissive. The wires 12 can be reflective in order to polarize incoming light.

As indicated on polarizer 80 in FIG.8, by lines separating the support rib 13, the first rib 14, and the substrate 11, these different regions can comprise different materials. Two of these regions can have the same material as another region or all three can have different materials. At least one of the support rib 13, the first rib 14, and the wires 12 can be absorptive. At least one of the support rib 13, the first rib 14, and the wires 12 can be transmissive. At least one of the support rib 13, the first rib 14, and the wires 12 can be reflective.

A polarizer in which the support rib 13, the first rib 14, and the substrate 11 include different regions with different materials can be made by initially selecting a substrate 11 which includes multiple thin film layers, then etching a top layer to form the support ribs 13, as shown in FIG. 13. As shown in FIG. 13, material 101a is the support rib material 13 and material 101b and possibly also 101c can be the first rib material 14.

As shown on wire grid polarizers 20, 50, and 90 in FIGs.2, 5, and 9, the support ribs 13 can be totally etched away down to a top 14_t of the first ribs 14. The first gaps Gi can be solid-material-free gaps from a top 12_t of the wires 12 to a base 12 of the wires 12. As shown on wire grid polarizer 20 in FIG. 2, the first ribs 14 can comprise the same material as the substrate 11, and both can be transmissive to incomi ng light. Alternatively, as shown on wire grid polarizer 90 in FIG. 9, the first ribs 14 can comprise a d ifferent material than the substrate 11. In one embodiment, one of the first ribs 14 or the wires 12 can be absorptive and the other of the first ribs 14 or the wires 12 can be reflective.

As shown in FIGs. 3, 6, 7, 10, and 11 wire grid pola rizers 30, 60, 70, 100, and 110 can further comprise a pai r of para llel, elongated second ribs 34 disposed over the first rib 14 at outer edges 14₀ of the first rib 14. Each wire 12 of the pair of wires 12 can be disposed over a different second rib 34. The first ga p Gi can extend from between the pair of wires 12 down between the pair of second ribs 34. The second gap G₂ can extend from a top of the wires 12_t, between adjacent pairs of wires 12, between adjacent pairs of second ribs 34, between adjacent first ribs 14, down to a base 14 of the fi rst ribs 14 / surface l is of the substrate 11.

Second rib thickness T₃₄ can affect wire grid polarizer performance. This effect on performance is wavelength dependent and can also dependent on first rib thickness T_14l especially in regard to contrast, but less so in regard to transmission of p-polarization (Tp) . Thus, a wire grid polarizer designer may need to consider the intended wavelength range of use and the first rib thickness T₁₄ in an analysis of optimal second rib thickness T₃₄ for a given design. Second rib thickness T₃₄ may also relate to wire grid polarizer durability. Thus, both performance and durability requirements may need to be considered in determining optimal second rib thickness T₃₄.

As shown on wire g rid polarizer 30, the first ribs 14, the second ribs 34, and the substrate 11 can all be formed of a single material and can all be transmissive of incoming light. The wires 12 can be reflective. The first ribs 14 and the second ribs 34 can be formed by etching into the substrate 11 and can be integrally formed from the substrate 11. As shown on wire grid polarizer 100, the first ribs 14, the second ribs 34, and the substrate 11 can be different and separate regions. All three can be different materials or two of the regions can be the same material and a third can be a different material. At least one of the second ribs 34, the first ribs 14, or the wires 12 can be absorptive. At least one of the second ribs 34, the first ribs 14, or the wires 12 can be transmissive. At least one of the second ribs 34, the first ribs 14, or the wires 12 can be reflective. In one embodiment, the wires 12 or the second ribs 34 can be absorptive and the other of the wires 12 or the second ribs 34 can be reflective.

As shown in FIGs. 7 and 11, wire grid polarizers 70 and 110 can further comprise a fill material 41 disposed in the first gaps Gi and in the second ga ps G₂. Thus, the first gaps Gi and the second ga ps G₂ can be solid- material-free gaps. The fill material 41 can substantially or totally fill the first gaps Gi and the second gaps G₂. The gaps G can be filled with fill material 41, such as by spin-on glass or ALD for example.

This filling or backfilling process can also add fill material 41 above tops 12_t of the wires 12, as shown in FIG. 7. This design can provide both structural strength and corrosion protection for the nano-structures. This design may be preferred if a transparent material is used as the fill material 41, such as for example glass for visible light polarization. The fill material 41 can in some desig ns substantially degrade polarizer performance, so fill material might be selected in these designs only if a need for structural strength and / or corrosion protection outweighs degradation in performance.

As shown in FIG. 11, fill material 41 in a gap G can be separate from fill material in an adjacent gap G. Fill material 41_a in the first gap Gi can be separate from fill material 41 in an adjacent second gap G₂. In other words, the fill material 41 does not extend over tops 12_t of the wires 12. This can be accomplished by beginning with wire grid polarizer 70, then etching the fill material 41 at least down to tops 12_t of the wires 12. By separating the fill material 41 in one gap G from fill material 41 in an adjacent gap G, the fill material 41 can be reflective for polarization of light or can be absorptive. Wire grid polarizers 70 and 110, with fill material 41 in the gaps G, are illustrated with a wire grid polarizer design having the second ribs 34, similar to wire grid polarizers 30, 60, and 100; but use of the fill material 41 is not limited to these designs and the fill material 41 can be added to wire grid polarizer designs shown in the other figures as well, such as with polarizers 10, 20, 40, 50, 80, and 90 for example.

Various regions of a polarizer, with fill material 41 in one gap G separate from fill material in an adjacent gap G, can have different purposes. The following is related to having this separated fill material 41, as shown in FIG. 11. At least one of the support ribs 13 (if used), the second ribs 34 (if used), the first ribs 14, the wires 12, or the fill material 41 can be absorptive. At least one of the support ribs 13 (if used), the second ribs 34 (if used), the first ribs 14, the wires 12, or the fill material 41 can be transmissive. At least one of the support ribs 13 (if used), the second ribs 34 (if used), the first ribs 14, the wires 12, or the fill material 41 can be reflective.

As shown on wire grid polarizer 110 in FIG. 11, the second ribs 34 can be divided into two regions 34a and 34b with a different material in each region. This division may be applicable to a wire grid polarize with the fill material 41, as shown in FIGs. 7 & 11, or without the fill material 41, as shown in FIG.3. The upper region 34a can be formed from one material 101b and the lower region 34b can be formed from a different material 101c (see FIG. 13). The lower region 34b can be the same material as, or a different material than, the first ribs 14. Method to make

Following are steps of a method of making a wire grid polarizer. This method can be performed in the order shown. The method need not include all of the following steps, depending on the wire grid polarizer design.

1. Providing a substrate 11 having an array of parallel, elongated support ribs 13 disposed over the substrate 11 with solid-material-free support-rib gaps G_s between the support ribs 13. See FIGs. 12 and 13. a. This step may be accomplished by patterning and etching a substrate 11.

b. The substrate may be homogenous and made of a single material, such as a wafer of glass for example. The support ribs 13 can be formed by etching into the substrate 11 and thus can be integrally formed from, and made of the same material as, the substrate 11. c. Alternatively, the substrate 11 and the support ribs 13 can include multiple regions lOla-d, with different regions comprising different materials, to allow for different functions of different regions, such as is shown in FIGs. 8-11.

d. Material 101a can be the support rib material 13 and can be the same as or different from substrate materials 101b, 101c, and / or lOld.

e. Material 101b can become second rib 34 material and possibly part or all of the first rib 14 material and can be the same as or different from materials 101a, 101c, and / or lOld.

f. Material 101c can be the first rib 14 material and possibly also a material for part of the second rib 34 and can be the same as or different from materials 101a, 101b, and / or lOld.

g. Material lOld can be material of the final substrate and can be the same as or different from materials 101a, 101b, and / or 101c.

Conformal coating the substrate 11 and the support ribs 13 with a layer of material 112 while maintaining the support-rib gaps G_s between the support ribs 13 (using a substrate 11 and support ribs 13 made of a single material as shown in FIG. 12 or a substrate and support ribs 13 made of layers of multiple materials as shown in FIG. 13). The conformal coating may be done by various methods, such as for example atomic layer deposition (ALD) or sputter. See FIG. 14. The layer of material 112 can be the material of the wires 12 that will be formed in the next step.

Etching the layer of material 112 to remove horizontal segments 112_h and leaving an array of parallel, elongated wires 12 along sides of the support ribs 13, including a pair of wires 12 for each support rib 13 with a wire 12 disposed along each side of the support rib 13. An anisotropic etch can etch away horizontal segments 112_h but leave most of the vertical segments 112_v due to the directional nature of this etch. See FIGs. 14- 15. Using the wires 12 as a mask to etch 131_a the support ribs 13 forming a first gap Gi between two wires 12 of each pair of wires 12 and to etch 131_b the substrate 11 between adjacent pairs of wires 12 (see FIG. 16) forming an array of parallel elongated first ribs 14, with each pair of wires 12 disposed over a single first rib 14 and a plurality of second gaps G₂ including a second gap G₂ disposed between adjacent first ribs 14.

a. Etching 131_a the support ribs 13 to create the first gap Gi between the wires 12 can improve wire grid polarizer performance.

b. Etch chemistry and settings can be selected such that both the support ribs 13 and the substrate 11 are etched with minimal etch of the wires 12.

c. Using the wires 12 as a mask to etch 131_a the support ribs 13 can include etching only part of the support ribs 13 such that a portion of the support ribs 13 remains in the first gaps Gi between the wires. See FIGs. 1, 4, and 8. This may be preferred for added structural support for the wires 12.

d. Using the wires 12 as a mask to etch 131_a the support ribs 13 can include etching 131_a away the entire support ribs 13 and stopping the etch between the pair of wires 12 substantially at a base 12 of the wires 12 and at a top 14_t of the first ribs 14. See FIGs. 2, 5, and 9.

e. Using the wires 12 as a mask to etch 131_a the support ribs 13 can include etching away substantially the entire support ribs 13 and can further comprise etching 131_a the first ribs 14 between two wires 12 of each pair of wires 12 forming a pair of parallel, elongated second ribs 34 disposed over and at outer edges 14₀ of each of the first ribs 14 with a wire 12 disposed over each second rib 34. See FIGs. 3, 6, 7, 10, and 11. This may be preferred for improved wire grid polarizer performance, but may create wire grid polarizer durability concerns if wire 12 aspect ratio is too high and / or wire width is too small.

5. Backfilling the gaps G with fill material 41. The fill material 41 can be

formed by spinning on a liquid that can harden upon evaporation of an included solvent. For example, spin-on a liquid glass in a solvent, then bake out the solvent. Another method is applying multiple layers by use of atomic layer deposition (ALD). See FIG. 7. Backfilling may be preferred as an additional step for improved wire grid polarizer durability, but can adversely affect wire grid polarizer performance, and thus durability requirements may need to be balanced against performance

requirements.

6. Etching the fill material 41 at least down to tops 12_t of the wires 12 and separating fill material 41 in one gap G (e.g.41_a in Gi) from fill material 41 in an adjacent gap G (e.g.41 in G₂). See FIG. 11. This may be preferred if the fill material 41 in the gaps G is an absorptive material to absorb one polarization or is a reflective material to separate polarization states.

7. Conformal coating the wires 12, the first ribs 14, the second ribs 34 (if used), and exposed portions of the substrate 11 with a second layer of material 172 while maintaining the first gap Gi between the pair of wires and the second gaps G₂ between adjacent first ribs 14;

8. Etching the second layer of material 172 to remove horizontal segments 172_h and leaving an array of parallel, elongated side bars 42. An anisotropic etch can etch away horizontal segments 172_h but leave most of the vertical segments 172_v due to the directional nature of this etch. See FIGs.4-6 and 17.

Gap width (\N± and W₂) relationships

As shown in FIGs. 1 and 3, the first gap Gi can have a first gap width Wi and the second gap G₂ can have a second gap width W₂. The first gap width Wi can be the same as the support rib width. The second gap width W₂ can be equal to the support rib gap width W_Gs minus two times the wire width Wi₂ (W₂ = W_Gs - 2*Wi₂). Support rib gap width W_Gs and support rib width W can be controlled by the lithography technique (mask, interference

lithography, etc.) used to make the support ribs 13. Wire width \N₁₂ can be controlled by the layer of material width Wn₂, which can be determined by the deposition technique used (e.g. ALD or sputter) and duration of application of this layer of material 112. The ability to control separately the first gap width Wi and the second gap width W₂ can give the wire grid polarizer designer considerable freedom for optimizing a wire grid polarizer design.

In some applications, it can be beneficial, for improved performance, durability, or manufacturing considerations, to equalize the gaps G. Thus, the first gap width Wi can be substantially equal to a second gap width W₂.

In other applications, it can be beneficial, for improved performance, durability, or manufacturing considerations, to have non-equal gaps G. A larger of a first gap width Wi or a second gap width W₂ divided by a smaller of the first gap width Wi or the second gap width W₂ can be greater than 1.0 and less than or equal to 1.1 (1.0 <— w₂≤ 1.1 or 1.0 <— w₁≤ 1.1). A larger of a first gap width Wi or a second gap width W₂ divided by a smaller of the first gap width Wi or the second gap width W₂ can be greater or equal to than 1.1 and less than or equal to 1.5 (1.1 <— < 1.5 or 1.1 <— < 1.5). A difference between the first gap width Wi and the second gap width W₂ can be between 0 nanometers and 30 nanometers in one aspect, between 25 nanometers and 50 nanometers in another aspect, or less than 60 nanometers in another aspect.

Measurement of gap width on an actual wire grid polarizer may be less precise than measurement on a drawing because the wires or ribs can lean to one side and can vary in width from top to bottom . Thus, if there question of where to measure in order to determine if the gap widths fall within these requirements, then measure at base 12 of the wires 12. General information for a ll embodiments

US Patent Application Number 13/326,566, filed on 12/15/2011, and US Patent Numbers US 7,570,424 and US 7,961,393, incorporated herein by reference i n their entirety, provide examples of possible substrate materials, dielectric materials including absorptive dielectric materials and transmissive dielectric materia ls, a nd reflective materials for separating the light into two, opposite polarization states. The reflective materials can also be made of a semiconductor material doped to achieve a desired level of conductivity, or other types of conductors such as certain forms of carbon.

The wire grid polarizers described herein can be made with a relatively large wire 12 and / or side bar 42 aspect ratio (wire thickness divided by wire width - Thi₂ / Wi₂ or side bar thickness divided by side bar width). A large wire 12 aspect ratio can be accomplished by formation of relatively tall support ribs 13 in relation to a width Wn₂ of the layer of material 112 (which may approximate eventual wire width W₁₂). Modeling has shown good polarization characteristics with wire 12 and / or side bar aspect ratios of between 8 and 60 in one aspect, between 4 and 7 in another aspect, or between 3 and 8 in another aspect, depending on the wavelength for desired polarization and overa ll wire grid polarizer design. Modeling has shown good polarization characteristics with wire width Wi₂ of between 5 nm and 20 nm for polarization of some ultraviolet wavelengths. Modeling has shown good polarization characteristics with a wire thickness T ₁₂ of between 50 nm and 100 nm in one aspect, between 90 nm and 160 nm i n another aspect, or between 150 nm and 300 nm in another aspect, depending on the

wavelength for desired polarization. Modeling has shown that optimal first rib thickness T₁₄ is wavelength dependent.

Lithography techniques can limit a possible minimum pitch.

Lithography techniques can provide a pitch of the support ribs 13, but two wires can be made for every support rib, thus effectively cutting the pitch in half. This small pitch can allow for more effective pola rization and can allow polarization at lower wavelengths.

Claims

What is claimed is: 1. A wire grid polarizer comprising:

a. an array of parallel, elongated na no-structures disposed over a surface of a substrate, each of the nano-structures including:

i. a first rib disposed over the surface of the substrate;

ii. a pair of parallel, elongated wires, each laterally oriented with respect to one another, and disposed over the first rib; iii. a first gap between the pair of wires; and

iv. each wire of the pair of wires has two opposite sides

substantially orthogonal to the surface of the substrate; b. a plurality of second gaps including a second gap disposed between adjacent first ribs; and

c. the substrate being transmissive.

2. The wire grid polarizer of claim 1, further comprising a pair of parallel, elongated side bars, each laterally oriented with respect to one another, including a side bar disposed along and adjoining each side of each wire.

3. The wire grid polarizer of claim 2, wherein:

a. at least one of the first rib, the pair of wires, or the pair of side bars is absorptive; and

b. at least one of the first rib, the pair of wires, or the pair of side bars is reflective.

4. The wire grid polarizer of claim 1, further comprising a support rib

disposed above the first rib between the pair of wires and extending partially into the first gap.

5. The wire grid polarizer of claim 4, wherein a support rib thickness is between 5% and 35% of a wire thickness.

6. The wire grid polarizer of claim 1, further comprising a pair of parallel, elongated second ribs disposed over the first rib at outer edges of the first rib, wherein each wire of the pair of wires is disposed over a different second rib and the first gap extends from between the pair of wires down between the pair of second ribs.

7. The wire grid polarizer of claim 6, further comprising a pair of parallel, elongated side bars, each laterally oriented with respect to one another, including a side bar disposed along and adjoining each side of each wire and disposed along and adjoining each of two opposite sides of each second rib.

8. The wire grid polarizer of claim 7, wherein:

a. at least one of the pair of second ribs, the first rib, the pair of wires, or the pair of side bars is absorptive; and

b. at least one of the pair of second ribs, the first rib, the pair of wires, or the pair of side bars is reflective.

9. The wire grid polarizer of claim 1, wherein the first gaps and the second gaps are solid-material-free gaps.

10. The wire grid polarizer of claim 1, further comprising a fill material

disposed in the first gaps and in the second gaps.

11. The wire grid polarizer of claim 10, wherein fill material in a gap is

separate from fill material in an adjacent gap.

12. The wire grid polarizer of claim 11, wherein the fill material is absorptive.

13. The wire grid polarizer of claim 1, wherein a first gap width is substantially equal to a second gap width.

14. The wire grid polarizer of claim 1, wherein a larger of a first gap width or a second gap width divided by a smaller of the first gap width or the second gap width is greater than 1.0 and less than or equal to 1.1.

15. The wire grid polarizer of claim 1, wherein a larger of a first gap width or a second gap width divided by a smaller of the first gap width or the second gap width is greater than or equal to 1.1 and less than or equal to 1.5.

16. A method of making a wire grid polarizer, the method comprising the

following steps in order:

a. providing a substrate having an array of parallel, elongated support ribs disposed over the substrate with solid-material-free support-rib gaps between the support ribs, the substrate being substantially transmissive to incoming light;

b. conformal coating the substrate and the support ribs with a layer of material while maintaining the support-rib gaps between the support ribs;

c. etching the layer of material to remove horizontal segments and leaving an array of parallel, elongated wires along sides of the support ribs, including a pair of wires for each support rib with a wire disposed along each side of the support rib; and

d. using the wires as a mask and etching the support ribs between two wires of the pair of wires and etching the substrate between adjacent pairs of wires forming :

i. an array of parallel elongated first ribs, with each pair of wires disposed over a single first rib;

ii. a first gap between the pair of wires; and

iii. a plurality of second gaps including a second gap disposed between adjacent first ribs.

17. The method of claim 16, wherein etching the support ribs includes etching only part of the support ribs such that a portion of the support ribs remains in the first gaps between the wires.

18. The method of claim 16, wherein etching the support ribs includes etching away the entire support ribs and stopping the etch between the pair of wires substantially at a base of the wires and at a top of the first ribs.

19. The method of claim 16, wherein etching the support ribs includes

substantially etching away the entire support ribs and then etching into the first ribs between two wires of each pair of wires forming a pair of parallel, elongated second ribs disposed over and at outer edges of each of the first ribs with a wire disposed over each second rib.

20. The method of claim 16, further comprising :

a. conformal coating the wires, the first ribs, and exposed portions of the substrate with a second layer of material while maintaining the first gap between the pair of wires and the second gaps between adjacent first ribs;

b. etching the second layer of material to remove horizontal segments and leaving an array of parallel, elongated side bars.