WO2014088263A1 - Sensor system - Google Patents

Abstract

A sensor system according to the present invention includes a sensor unit that performs an inspection on a detection target. The sensor unit has a sensor that has multiple unit sensors. The unit sensor has: a substrate; a first electrode arranged on the substrate; a second electrode arranged so as to be spaced apart from the first electrode on the substrate; and one or more nanostructures that are electrically connected to the first electrode and the second electrode, wherein the electrical characteristics of the nanostructure change depending on the detection target. The sensor is arranged such that the plurality of unit sensors forms an array.

Description

Sensor system

The present invention relates to a sensor system, and more particularly, to a sensor system including a sensor unit for performing a test on a sensing object, wherein the sensor unit includes a sensor including a plurality of unit sensors, wherein the unit sensor includes: A substrate, a first electrode disposed on the substrate. A second electrode disposed on the substrate and spaced apart from the first electrode, and at least one nanostructure electrically connected to the first electrode and the second electrode and changing electrical characteristics according to a sensing object; The sensor relates to a sensor system in which the plurality of unit sensors are arranged in an array.

With the development of science and medical technology, various sensor devices have been steadily developed and used. In particular, recently, the development of chemical and biological sensors using characteristics of nanostructures such as carbon nanotubes, and sensor structures based on various types of carbon nanotubes have been used.

An example of a sensor according to the prior art based on carbon nanotubes is a sensor composed of a plurality of carbon nanotubes and first and second electrodes positioned at both ends of the plurality of carbon nanotubes. In the sensor according to the related art, a reference voltage is applied to the second electrode, the resistance of the carbon nanotubes changes according to the sensing object, and the voltage or current of the first electrode may change according to the resistance of the carbon nanotubes. .

Sensors using these carbon nanotubes can be inspected through electrical properties that change depending on the sensing object, thereby obtaining accurate inspection results. However, in the case of the sensor using the carbon nanotubes, the reliable attachment of the sensing object and the accurate inspection result derived therefrom have a great influence on the inspection reliability.

According to an aspect of the present invention, there is provided a sensor system including a sensor unit configured to inspect an object to be detected, wherein the sensor unit includes a sensor including a plurality of unit sensors, wherein the unit sensor comprises: a substrate disposed on the substrate; 1 electrode. A second electrode disposed on the substrate and spaced apart from the first electrode, and at least one nanostructure electrically connected to the first electrode and the second electrode and changing electrical characteristics according to a sensing object; The sensor aims to provide a sensor system in which the plurality of unit sensors are arranged in an array to improve inspection accuracy.

In order to achieve the above object, the sensor system of the present invention, the sensor unit for performing a test on the sensing object, comprising: the sensor unit includes a sensor including a plurality of unit sensors,

The unit sensor is a substrate, a first electrode disposed on the substrate. A second electrode disposed on the substrate and spaced apart from the first electrode, and at least one nanostructure electrically connected to the first electrode and the second electrode and changing electrical characteristics according to a sensing object; The sensor is disposed in an array of the plurality of unit sensors.

Preferably, the sensor system according to an embodiment of the present invention, the unit sensor is arranged to have a matrix structure of M × N.

Preferably, the sensor system according to an embodiment of the present invention further includes an insulator disposed on the substrate and disposed between the first electrode and the second electrode.

Preferably, in the sensor system according to an embodiment of the present invention, the nanostructures include at least one of nanotubes, nanowires, nanorods, nanoribbons, nanofilms, and nanoballs.

Preferably, the sensor system according to an embodiment of the present invention, a first conductor disposed on the first electrode and electrically connected to the first electrode, and disposed on the second electrode and the second electrode A second conductor electrically connected to an electrode, wherein a portion of the at least one nanostructure is disposed between the first electrode and the first conductor, and a portion of the at least one nanostructure is It is disposed between the second electrode and the second conductor.

Preferably, the sensor system according to an embodiment of the present invention, the sensor further comprises a metal oxide semiconductor field effect transistor (MOSFET) disposed to be located below the first electrode and the second electrode, At least one of the source, gate, and drain of the MOSFET is electrically connected to at least one of the first electrode and the second electrode.

Preferably, the sensor system according to an embodiment of the present invention, wherein the sensor portion comprises a printed circuit board, the sensor is disposed on the printed circuit board, the printed circuit board is removable with respect to the sensor system Is configured.

Preferably, the sensor system according to an embodiment of the present invention further comprises a sample supply, wherein the sample supply comprises a particle separator for separating the particles and the medium in the solution from the solution.

Preferably, the sensor system according to an embodiment of the present invention, the particle separation unit, a body formed with a plurality of spaced pores constituting a pore array, and provided on the body and the electric field by the application of an external power source Including an electrode to form,

The electrode may include a first electrode and a second electrode respectively connected to opposite polarity terminals of the external power source,

At least one pore positioned between the first electrode and the second electrode, the pore differing from the shortest distance from the pore to the first electrode closest to the second electrode closest to the second electrode. .

Preferably, in the sensor system according to an embodiment of the present invention, at least one of the pores forming the pore array is disposed with the first electrode or the second electrode.

Preferably, in the sensor system according to an embodiment of the present invention, the first electrode includes a first electrode pad and a plurality of first branch electrodes connected to the first electrode pad, and the second electrode is A second electrode pad and a second branch electrode connected to the second electrode pad,

A pore positioned between the first branch electrode and the second branch electrode, wherein the shortest distance from the pore to the nearest first branch electrode and the shortest distance from the pore to the nearest second branch electrode are mutually different. There is at least one different pore.

Preferably, in the sensor system according to an embodiment of the present invention, the one or more pores are configured to contact the first branch electrode or the second branch electrode.

Preferably, in the sensor system according to the exemplary embodiment, irregularities corresponding to the shape of the pore array are formed at sides of the first and second branch electrodes, and the pore array is formed at a portion where the irregularities are formed. Is placed.

Preferably, the sensor system according to an embodiment of the present invention, the body includes a base, a hydrophilic coating layer disposed on the base, and a hydrophobic coating layer disposed on the hydrophilic coating layer, the hydrophilic coating layer is the pore And a base portion below the portion where the pore array is formed.

Preferably, the sensor system according to an embodiment of the present invention, the sensor system further includes a transceiver for transmitting and receiving a signal with an external device.

Preferably, the sensor system according to an embodiment of the present invention, the signal processing unit for generating a patterned signal by processing the result value inspected by the sensor unit; And a display unit for outputting the result, wherein the signal processor processes the result value to generate a patterned signal, and the display unit outputs the patterned result value.

Inspection method using the sensor system of the present invention. A sensor system comprising: a sensor unit for inspecting a sensing object, wherein the sensor unit comprises a sensor including a plurality of unit sensors, wherein the unit sensor comprises: a substrate; a first electrode disposed on the substrate; A second electrode disposed on the substrate and spaced apart from the first electrode, and at least one nanostructure electrically connected to the first electrode and the second electrode and changing electrical characteristics according to a sensing object; The sensor is a test method using a sensor system arranged in an array of the plurality of unit sensors,

Supplying a sample to be examined to the sample supply;

Respectively supplying one or more receptors to one or more regions on the sensor;

Supplying the sample onto the sensor unit; And

Using a sensor system comprising examining a reaction between the receptor and the sample.

Preferably, the inspection method using a sensor system according to an embodiment of the present invention, partitioning the sensor into a plurality of areas including one or more unit sensors (S) and one or more receptors on each of the partitioned areas Supplying; It further comprises.

Preferably, the inspection method using a sensor system according to an embodiment of the present invention, the step of inspecting the adsorption of the receptor and the sensor; And selecting, by the receptor, the sensor adsorbed to the sensor.

Preferably, the inspection method using a sensor system according to an embodiment of the present invention, the sensor system further comprises a sample supply, the sample supply comprises a particle separator for separating particles and medium in the solution from the solution ,

A pretreatment step of separating the sample; It further includes.

Preferably, the inspection method using the sensor system according to an embodiment of the present invention further comprises a signal processing unit for generating a signal by processing the result value inspected by the sensor unit, and a display unit for outputting the result, Generating a patterned signal by processing a result value in the signal processor; Outputting the result value in the form of a pattern on the display unit; It further includes.

Preferably, the test method using a sensor system according to an embodiment of the present invention further comprises a pattern analysis diagnostic step of contrasting the response pattern and the response indicator pattern between the receptor and the sample;

According to the sensor system according to the present invention, by including the sensor including the CMOS circuit including the MOSFET, it is possible to derive the test result as an electrical signal. That is, by including a MOSFET that can be used as an amplifier and / or an ADC, the change in the electrical properties of the nanostructures can be amplified and / or digitally converted directly on the substrate, thereby improving the accuracy of the measurement. For example, when testing for abnormalities such as the presence or absence of a pathogen or the presence of cancer cells through an antigen-antibody reaction, the sensor according to the present invention may show the test result as an electrical signal, so that the test result is clearly derived and thus the test reliability. This can be improved and convenience can be improved by using a separate tag (TAG) for determining the inspection result.

In addition, the sensor according to the present invention may have the following advantages as the plurality of unit sensors (S) is configured in an array.

First, as a solution including a receptor and an inspection target are sputtered on a plurality of zones having a predetermined area on a sensor array, inspection of the plurality of receptors using one sensor may be performed, and thus, pattern analysis. Type diagnosis can be made. For example, a pattern-analytical diagnosis that compares an antigen-antibody response test result pattern using actual cancer cells with an antigen-antibody response test result pattern of a sample to be detected can be performed, thereby enabling a high probability range of diagnosis.

In addition, since a plurality of unit sensors are provided, inspection reliability may be improved since the inspection result derived by the unit sensor or the unit sensor may be selectively used.

In addition, the sensor unit may include a printed circuit board, the sensor may be disposed on the printed circuit board, and the printed circuit board may be detachably configured with respect to the sensor system so that the sensor unit may be replaced as the inspection is performed. have.

In addition, the sensor system according to the present invention includes a sample supply, the sample supply comprises a particle separator, so that the sample can be easily separated by inspection of the solution form. In addition, the particle separation unit is configured to separate the particles in the solution from the pore formed on the particle separation unit is prevented from closing the pore array by the particles and can ensure a smooth flow of the medium from which the particles are separated.

In addition, as the particle separation part of the sensor system according to the present invention is formed with a hydrophilic coating layer inside the pore and a hydrophobic coating layer is formed outside the above-mentioned part, the particles of the sample to be separated are induced to flow to the inside of the pore array. Separation efficiency can be further improved.

In addition, since the particle separation unit of the sensor system according to the present invention can be manufactured using a silicon wafer, the production cost can be reduced because it can be mass produced through a conventional silicon precision processing process.

In addition, as the sensor system according to the present invention includes a transceiver, the result of the inspection through the sensor unit may be transmitted to a specialized institution such as a medical institution, thereby making detailed diagnosis of the result. Therefore, the user's convenience may be improved as the test result is transmitted to the specialized institution through the transceiver unit after the test is performed regardless of time and place.

1 is a conceptual diagram illustrating a sensor system according to the present invention.

2 is a diagram illustrating a sensor system according to an exemplary embodiment of the present invention.

3 is a view of a particle separator included in the sample supply unit of the sensor system according to an embodiment of the present invention.

4 is a view of a particle separator included in the sample supply unit of the sensor system according to an embodiment of the present invention.

FIG. 5 is a cross-sectional view taken along X-X shown in FIG. 3.

6 is a view showing a sensor unit according to an embodiment of the present invention.

7 is an enlarged view of a sensor according to an embodiment of the present invention.

FIG. 8 is a cross-sectional view taken along the line Y-Y shown in FIG. 7.

9 and 10 are enlarged views of nanostructures disposed on a unit sensor according to an exemplary embodiment of the present invention.

11 is a view showing the operation of the sensor according to an embodiment of the present invention.

In order to achieve the above object, the sensor system of the present invention, the sensor unit for performing a test on the sensing object, comprising: the sensor unit includes a sensor including a plurality of unit sensors,

The unit sensor is a substrate, a first electrode disposed on the substrate. A second electrode disposed on the substrate and spaced apart from the first electrode, and at least one nanostructure electrically connected to the first electrode and the second electrode and changing electrical characteristics according to a sensing object; The sensor is disposed in an array of the plurality of unit sensors.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, and only the embodiments make the disclosure of the present invention complete, and the general knowledge in the art to which the present invention belongs. It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase.

Unless otherwise defined, all terms (including technical and scientific terms) used in the present specification may be used in a sense that can be commonly understood by those skilled in the art. In addition, the terms defined in the commonly used dictionaries are not ideally or excessively interpreted unless they are specifically defined clearly.

1 is a conceptual diagram showing the structure of a sensor system according to an embodiment of the present invention.

Referring to FIG. 1, the sensor system according to the present invention may include an input unit, a sample supply unit, a transfer unit, a sensor unit, a transceiver, and a controller.

The input unit may generate and input a predetermined signal according to a user's intention. For example, the input unit may include a manipulation device such as a button for applying a predetermined signal by the user, and a predetermined signal may be generated and transmitted to the controller according to the input of the manipulation device.

The sample supply is provided to provide a sample for use in the inspection. The sample may be in the form of a solution containing predetermined particles as a sample used for the test, for example, but may be a liquid such as blood, but is not limited thereto. In this case, the sample supply unit may extract only the target component or site necessary for the test from the sample, and may include a predetermined separation device for this purpose. For example, it may include a separation device for separating the plasma from the blood when the plasma is required for the test. On the other hand, the separation device may comprise a plasma separation device using the electrophoresis.

The conveyer conveys the sample provided through the sample supply to each part of the sensor system. For example, the sample provided through the supply unit may be transferred to the sensor unit to perform an inspection operation, and then the sample may be transferred to a discharge device or other device for discarding the sample, but is not limited thereto.

The sensor unit is provided to perform the inspection by receiving the sample, and is configured to obtain desired data from the sample. The sensor unit may sense various signals such as, for example, an electrical resistance sensed in a sample, and may include a CMOS circuit.

The transceiver is provided to transmit the result detected by the sensor to the external device as a predetermined signal through a predetermined communication circuit, or to receive a signal transmitted from the external device.

For example, the transceiver may be configured to include a communication module such as Bluetooth, but is not limited thereto.

The controller controls the operations of the input unit, the sensor unit, the output unit, and the transceiver unit. For example, the controller may be a central processing unit including a predetermined memory and a computing unit.

Hereinafter, the specific embodiment of the sensor system 1 which concerns on this invention is described with reference to drawings.

Referring to FIG. 2, the sensor system 1 according to the present invention may include an input unit 10, a sample supply unit 20, a transfer unit 40, and a sensor unit 30.

The input unit 10 may generate and input a predetermined signal according to a user's intention. As shown in FIG. 2, the input unit 10 may include an operation device such as a button for applying a predetermined signal by a user according to a selection. A predetermined signal is generated according to the input of the manipulation device and transmitted to a controller (not shown), and the operation of the sensor system 1 may be performed through the controller (not shown).

The sample supply unit 20 is provided such that a sample to be tested is supplied to the sensor system 1, and may be, for example, a predetermined collecting device in which a solution such as blood may be placed in a drop state, but is not limited thereto. In this case, the sample supply unit 20 may include a predetermined separation device according to a method of inspecting the sample. For example, it may include a predetermined particle separation unit for separating the blood into blood cells and plasma when the pathogen and the cell state are to be examined through the plasma in the blood. In this case, the particle separator may be configured as a separation device using a dielectric phenomenon. The particle separation unit will be described later.

The sensor unit 30 is provided to inspect the sample. The sensor unit 30 may include a predetermined sensor for inspecting a sample, and for example, a sensor including a CMOS circuit may be provided.

Preferably, the sensor unit 30 may be detachably provided. For example, the sensor unit 30 may be provided on a detachable circuit board in the sensor system 1, and may be configured to be replaced after performing a one-time inspection on the sample. Therefore, since the inspection may be performed by replacing the sensor unit 30 after the inspection is performed, the inspection reliability may be improved.

The detailed configuration of the sensor unit 30 will be described later in detail.

The transfer part 40 may comprise, for example, a predetermined pump. That is, a pump may be provided to pump the sample in the form of a solution such as blood to the sensor unit 30 or the discharge unit 50.

On the other hand, although not shown in Figure 2, it may further include a transceiver (not shown). The transmission and reception unit (not shown) includes a communication circuit, and transmits the information inspected by the sensor unit 30 to an external device as a predetermined signal through the communication circuit, or to receive a signal transmitted from the external device. do. For example, the transceiver unit (not shown) may include a predetermined communication module such as a Bluetooth communication module, but is not limited thereto.

According to the transmission and reception unit (not shown), the result of the inspection through the sensor unit 30 is transmitted to a specialized institution such as a medical institution can be a detailed diagnosis of the result. Therefore, the user's convenience may be improved as the test result is transmitted to a specialized institution through the transceiver (not shown) after the test is performed regardless of time and place.

On the other hand, the discharge unit 50 may be provided to process and discharge the finished sample. As described above, the sample may be guided by the transfer unit 40 to move to the sensor unit 30 and the discharge unit 50.

Hereinafter, the particle separator 100 will be described according to an exemplary embodiment.

As described above, the sample supply unit 20 of the sensor system 1 according to the present invention may include a particle separation unit 100. 3 to 5 are views showing the structure of the particle separation unit 100 of the sample supply unit 20 according to an embodiment of the present invention.

3 is a view showing a particle separation unit 100 according to an embodiment of the present invention, Figure 4 is a view showing a particle separation unit 100 according to an embodiment of the present invention, Figure 5 is in FIG. It is a figure which shows the cross section along X-X shown.

The particle separator 100 according to the embodiment includes a body 110 in which the pore array 114 is formed, and an electrode 120 disposed on the body 110 to generate an electric field.

First, the body 110 will be described.

Body 110 is configured in a plate shape having a predetermined thickness and width. In one portion C of the body 110, several pores 115 are formed. Preferably, as shown in FIGS. 1 to 3, the pore 115 is disposed to have a predetermined array to form a pore array 114, but is not limited thereto. The pore array 114 is configured to form an array by placing several pores 115 passing through a portion of the body 110 with several rows. The pore 115 may be formed by allowing a portion of the body 110 to pass through, for example, according to a predetermined etching process. Each pore 115 may be configured in a circular shape, for example, and preferably, the inner diameter W1 of each pore 115 may have a size of 10 nm to 100 nm. In addition, since the particle separation efficiency may be lowered when the ratio of the spacing W2 between the pores 115 to the inner diameter of each pore 115 is too small or large, the inner diameter W1 and the pore 115 of the pore 115 may be reduced. The ratio of the intervals W2 between) may be 1: 1 to 1:10.

The body 110 may be configured to include a base 111, a hydrophilic coating layer 112, and a hydrophobic coating layer 113.

The base 111 is configured to have a predetermined thickness and width and supports the body 110. The base 111 is made of an insulating material so as not to affect the electric field formed by the electrode 120, and may be made of a material having good workability so that processing such as partial etching can be easily performed. For example, the base 111 may include silicon, and may be preferably made of a silicon wafer having a predetermined thickness and width and processed through a silicon wafer processing process.

Meanwhile, as shown in FIG. 3, the base 111 below the portion C on which the above-described pore array 114 is formed may be removed. Accordingly, the portion C in which the pore array 114 is formed may be relatively thinner than other portions so that the solution sample to be separated may easily exit the pore array 114 and flow downward. In this case, removing the base 111 of the portion where the pore array 114 is formed may be performed by using a predetermined etching method, but is not limited thereto.

Preferably, after forming a hydrophilic coating layer 112 and a hydrophobic coating layer 113 on the base 111, forming a pore array 114 in a portion (C), the pore array 114 By performing the etching process of removing the bottom portion 111 under the portion (C) is formed, only the hydrophilic coating layer 112 and the hydrophobic coating layer 113 on which the pore array 114 is formed at the portion where the pore array 114 is formed. You can leave it.

A coating layer is provided on the base 111. The coating layer is composed of a hydrophilic coating layer 112 disposed on the base 111, and a hydrophobic coating layer 113 disposed on the hydrophilic coating layer 112, the hydrophilic coating layer 112 and the hydrophobic coating layer 113 is the base portion It may be provided by forming a film having a predetermined thickness through a process of depositing a predetermined material on the 111, but is not limited thereto.

The hydrophilic coating layer 112 is a layer formed of a material having a strong moisture affinity than the hydrophobic coating layer 113, for example, may be composed of a material such as SiO ₂ . As the hydrophilic coating layer 112 is formed on the base 111, it may be configured to be disposed between the hydrophobic coating layer 113 and the base 111. Meanwhile, the hydrophilic coating layer 112 may be configured to form the inner circumferential surface of each pore 115, as shown in FIG. 5.

The hydrophobic coating layer 113 is a layer formed of a material having a small moisture affinity compared to the hydrophilic coating layer 112, for example, may be composed of a material such as Si ₃ N ₄ . The hydrophobic coating layer 113 is disposed on the hydrophilic coating layer 112, and thus may form an upper surface of the body 110.

On the other hand, if each of the coating layers 112 and 113 is too thin or thick, particle separation efficiency may be reduced, the thickness of the hydrophilic coating layer 112 may be 10 nm to 1 um, the thickness of the hydrophobic coating layer 113 10 nm to 1 um.

In the particle separation part 100 according to the present invention, a hydrophobic coating layer 113 is formed on an upper surface through which a solution that is a sample flows, and a hydrophilic coating layer 112 is formed on a lower surface thereof, and the hydrophilic coating layer 112 is a pore ( As the inner circumferential surface of 115 is formed, the flow of medium through the pore 115 may be promoted. That is, as the hydrophilic coating layer 112 is formed on the inner side of the pore 115 and the lower portion of the hydrophobic coating layer 113, the medium is induced to flow in the inner direction of the pore 115 having a high water affinity, thereby facilitating the flow of the medium. And particle separation efficiency can be improved. For example, when separating the plasma and blood cells in the blood using the particle separation unit 100 according to the present invention, the plasma is induced in the inner direction of the pores 115 formed with the hydrophilic coating layer 112, thereby separating the blood cells and plasma The efficiency can be further improved.

Hereinafter, the electrode 120 will be described.

The electrode 120 is formed on the body 110. Electrode 120 is formed from a variety of conductive materials, for example, metals such as aluminum, gold, platinum, copper, silver, tungsten, titanium, or metal oxides such as ITO, SnO ₂ , conductive plastics, and metal impregnated polymers. The material may be selected, but is not limited thereto. On the other hand, preferably, the electrode 120 may be made of gold with less corrosiveness.

The electrode 120 includes first and second electrodes 130 and 140 connected to the + and − polarity terminals of the external power supply, respectively. The first electrode 130 and the first electrode 140 are formed to be spaced apart from each other to form an electric field.

The first electrode 130 includes a first electrode pad 132 and several first branch electrodes 134 connected to the first electrode pad 132, and the first electrode 140 includes a second electrode. And an electrode pad 142 and several second branch electrodes 144 connected to the second electrode pad 142.

Meanwhile, in the embodiments and the drawings, the first and second electrodes 130 and 140 are connected to the electrode pads 132 and 142 and the electrode pads 132 and 142, respectively, and have several branches extending in the form of branches. Although described as including the electrodes 134 and 144, but not limited thereto, two electrodes 130 and 140 connected to terminals having opposite polarities and having arbitrary configurations and shapes are provided and the electrodes 130 and 140 are provided. A pore array 114 having any configuration and shape can be formed therebetween.

The first and second electrode pads 132 and 142 are connected to an external power source, and the first and second electrode pads 132 and 142 are respectively connected to one polarity terminal of an external power source and an opposite polarity terminal of the external power source. . Meanwhile, the first and second electrode pads 132 and 142 may be configured to extend to both sides of a portion where the pore array 114 on the body 110 is formed, but is not limited thereto.

On the other hand, since the dielectrophoretic effect may vary according to the voltage, frequency, etc. of the power source to be applied, when the separation of the solution sample using the particle separation unit 100 according to the present invention, the external power applied is less than 10V It is preferred to have a voltage and a frequency of 10 Hz to 10 kHz.

The first and second branch electrodes 134 and 144 are connected to the first and second electrode pads 132 and 142, respectively, and are disposed on a portion where the pore array 114 is formed.

The first branch electrode 134 and the second branch electrode 144 are alternately disposed on the portion C on which the pore array 114 is formed, and the first branch electrode 134 and the second branch electrode 144 are disposed. Residual spaces may be provided between the polarized particles captured by the repulsive force from the first and second branch electrodes 134 and 144 due to the electrophoretic effect. That is, the first branch electrode 134-the remaining space-the second branch electrode 134-the remaining space may be repeatedly arranged on the upper surface of the particle separator 100 according to the present invention.

The first and second branch electrodes 134 and 144 are alternately arranged on the portion C on which the pore array 114 is formed, and the first and second branch electrodes 134 and 134 are disposed. Each of the first and second branch electrodes 134 and 144 may generate an electric field when AC power is applied to the electrode 120.

One of the pores 115 of the pores 115 included in the pore array 114 is a pore 115 positioned between the first electrode 130 and the first electrode 140, from the pore 115. There may be at least one pore 115 that is different from the shortest distance to the nearest first electrode 130 and the shortest distance to the closest first electrode 140.

For example, the distance between the pore 115 and the first branch electrode 134 may be different from the distance between the pore 115 and the second branch electrode 144. That is, the distance between the pore 115 and the first branch electrode 134 may be greater than the distance between the pore 115 and the second branch electrode 144, and vice versa. Therefore, the pore 115 may be disposed closer to either one of the first branch electrode 134 or the second branch electrode 144. Meanwhile, the pore 115 may be formed in contact with any one of the first and second branch electrodes 134 and 144.

For example, as shown in FIG. 5, the shortest distance between any one pore H and the second branch electrode 144 may be K, and the pore H and the first branch electrode 134 may be in contact with each other. By being formed, the shortest distance between the pore H and the first branch electrode 134 may be zero.

Thus, as the pore 115 is formed adjacent to either one of the first and second branch electrodes 134, 144, the polarizable particles in the solution sample cause the first branch electrode 134 and the second branch electrode 144. When the polarized particles move apart from the first and second branch electrodes 134 and 144 under the repulsive force between the two layers, the pore 115 as well as the first and second branch electrodes 134 and 144 may be formed. You can also move away from). Therefore, the closing of the pores 115 by the polarizable particles can be prevented to improve the particle separation efficiency of the particle separation unit 100.

Preferably, as shown in FIGS. 3 to 5, one or more pores 115 may be disposed in contact with the first branch electrode 134 or the second branch electrode 144. For example, as illustrated in FIGS. 3 to 5, the sidewalls of the first and second branch electrodes 134 and 144 may be configured such that irregularities corresponding to the shape of the pore array 114 are formed. It may have a shape of a semi-circular, polygonal, etc., but is not limited thereto.

As the unevenness corresponding to the shape of the pore array 114 is formed at the sides of the first and second branch electrodes 134 and 144, the first and second branch electrodes 134 and 144 may form the pore array 114. At the same time, the pore array 114 may be disposed to be in contact with any one of the first and second branch electrodes 134 and 144. Accordingly, the polarity of the first branch electrode 134 and the second branch electrode 144 by the repulsive force due to the electrophoretic phenomenon caused by the electric field generated between the first branch electrode 134 and the second branch electrode 144. The particles are spaced apart from the first branch electrode 134 and the second branch electrode 144 and the pore 115, so that the polarizable particles may remain trapped in the remaining space without closing the pore 115. have.

When the AC power is applied to the electrode 120, an electric field as described above may be formed. Subsequently, when the solution is flowed to the particle separator 100, the polarizable particles in the solution have a dielectrophoretic effect in the electric field and remain trapped in the space between the first and second branch electrodes 134 and 144. Done. Therefore, the closing of the pore array 114 by the polarizable particles can be prevented and a smooth flow of the medium can be ensured.

In other words, when filtered by the pore array 114, the particle separation efficiency may be lowered because the polarizable particles close each pore 115 to block the flow passage of the particles, whereas the particles according to the present invention Since the separator 100 is trapped in the space between the first and second branch electrodes 134 and 144 by the dielectrophoretic effect, the separation of the pores 115 is prevented, thereby improving particle separation efficiency. Can be.

For example, when blood is used as a sample, and the physical condition is to be examined using the sensor system 1 according to the present invention, it is preferable that the plasma and blood cells in the blood are separated and tested as desired. At this time, the separation between the plasma and the blood cells is easily made through the particle separation unit 100 as described above, and thus the reliability of the test may be further improved.

Preferably, the particle separation unit 100, as described above, the hydrophobic coating layer 113 is formed on the upper surface, the hydrophilic coating layer 112 is formed on the lower surface and the inner peripheral surface of the pore array 114, the separation, The desired sample of solution may be directed to flow inwardly of the pore 115 to facilitate the flow of medium to further improve particle separation efficiency.

In addition, since the particle separation unit 100 according to the present invention may be manufactured using a silicon wafer, the production cost may be reduced since the particle separation unit 100 may be mass produced through a conventional silicon precision processing process.

Hereinafter, the structure of the sensor unit 30 according to an embodiment will be described with reference to the drawings.

6 is a view showing a sensor unit 30 according to an embodiment of the present invention, Figure 7 is an enlarged view showing a sensor 200 according to an embodiment of the present invention, Figure 8 is shown in FIG. 9 and 10 are enlarged views of the nanostructure 240 disposed on the unit sensor S according to an embodiment of the present invention.

As described above, the sensor unit 30 may include a sensor 200 provided on a predetermined circuit board 32. On the other hand, as shown in Figure 6, the circuit board 32 is configured detachably with respect to the sensor system 1, can be replaced according to use.

The sensor 200 may include a plurality of unit sensors S, and a sample may be inspected through the unit sensors S. In this case, the unit sensor S may be arranged in a matrix structure having rows and columns of M × N structure.

6 to 10, the sensor 200 includes a substrate 280, a first electrode 250, a second electrode 260, and at least one nanostructure 240.

In addition, the sensor 200 may further include an insulator 230, a first conductor 210, a second conductor 220, and a metal oxide semiconductor field effect transistor (hereinafter, simply referred to as a MOSFET 280).

One unit sensor S includes the above-described substrate 280, the first electrode 250, the second electrode 260, and at least one nanostructure 240, and also includes an insulator 230 and a first electrode. The semiconductor device may further include a conductor 210, a second conductor 220, and a metal oxide semiconductor field effect transistor (hereinafter, simply referred to as a MOSFET 280).

As the substrate 280, various kinds of substrates may be used. For example, the substrate 280 may be a semiconductor substrate (eg, a silicon substrate), a silicon on insulator (SOI) substrate, a glass substrate, or a plastic substrate.

The first electrode 250 is formed on the substrate 280. The first electrode 250 may have various structures. For example, the first electrode 250 may have a single layer structure or a multilayer structure. For example, the first electrode 250 may be formed of a single layer of aluminum (Al). As another example, the first electrode 250 may be composed of an aluminum layer and a palladium (Pd) layer disposed thereon. As another example, the first electrode 250 may be composed of an aluminum layer, a palladium layer disposed on the aluminum layer, and a gold (Au) layer disposed on the palladium layer. Although an example in which the first electrode 250 (or the first conductor 210) is circular is illustrated in the drawing, the first electrode 250 may be variously modified.

The second electrode 260 is also formed on the substrate 280, and may have various structures similar to the first electrode 250. The second electrode 260 is formed to be spaced apart from the first electrode 250. Therefore, the second electrode 260 does not directly contact the first electrode 250.

The second electrode 260 is disposed to be spaced apart from the first electrode 250. As illustrated in FIG. 7, the second electrode 260 may have an arrangement structure substantially surrounding the side surface of the first electrode 250, but is not limited thereto.

In an embodiment, the second electrode 260 is configured in the form of a predetermined plate electrode formed on the substrate 280, and a plurality of holes are formed in the second electrode 260, and inside each hole At least one first electrode 250 may be located in the. On the other hand, since the second electrode 260 and the first electrode 250 are spaced apart from each other, the inner perimeter of the hole is spaced apart from the outer perimeter of the first electrode 250 by a predetermined distance from the first electrode ( It may be arranged to substantially surround the outer periphery of (250). However, the present invention is not limited thereto, and the first electrode 250 and the second electrode 260 may be spaced apart from each other.

Meanwhile, the first electrode 250 does not have to be positioned at the same height as the second electrode 260, and the first electrode 250 and the second electrode 260 may have different heights from each other. Included in the category.

It is preferable that a reference voltage, which is a predetermined voltage, is applied to the second electrode 260 (thus, it is preferable that the voltage or current of the first electrode 250 is changed according to the change in the electrical characteristics of the nanostructure 240). .). The reference voltage may be, for example, a power supply voltage or a ground voltage.

At least one nanostructure 240 is electrically connected to the first electrode 250 and the second electrode 260. For example, the nanostructure 240 may be formed in such a manner that a portion of one nanostructure 240 contacts the first electrode 250 and another portion of the nanostructure 240 contacts the second electrode 260. It may be connected to the first electrode 250 and the second electrode 260. In another example, a portion of one nanostructure 240 contacts the first electrode 250, a portion of the other nanostructure 240 contacts the second electrode 260, and the one nanostructure ( The nanostructures 240 may be connected to the first electrode 250 and the second electrode 260 in such a manner that the 240 and the other nanostructure 240 contact each other. In another example, a portion of one nanostructure 240 contacts the first electrode 250, a portion of the other nanostructure 240 contacts the second electrode 260, and the one nanostructure The nanostructures 240 are connected to the first electrode 250 and the second electrode 260 in such a manner that the 240 and the other nanostructure 240 are connected to each other through another at least one nanostructure 240. ) Can be accessed.

In one embodiment, nanostructure 240 may be dense like a entangled net. Meanwhile, as shown in FIGS. 9 and 10, the nanostructure 240 is densely disposed on the first electrode 250, the second electrode 260, and the insulator 230, and then the first electrode. The first conductor 210 and the second conductor 220 may be stacked on the 250 and the second electrode 260. Accordingly, the nanostructure 240 may be disposed between the first electrode 250 and the first conductor 210 and between the second electrode 260 and the second conductor 220.

As the nanostructure 240, various kinds of nanostructures 240 may be used. For example, nanotubes, nanowires, nanorods, nanoribbons, nanofilms, or nanoballs may be used as the nanostructures 240. In addition, as the nanostructure 240, carbon nanotubes (hereinafter, simply referred to as CNTs), semiconductor nanowires, or conductive polymers may be used. CNTs can be divided into CNTs with metal properties and semiconductors with CNTs according to their electrical properties, and single-walled CNTs, double-walled CNTs and multi-walls, depending on the number of walls. walled) CNTs, and the like. At least one of a wide variety of materials including SnO 2, ZnO, In 2 O 3, and CdO may be used as a material forming the semiconductor nanowire.

In one implementation, nanostructure 240 may have a length much greater than the dimensions of its cross section. Such nanostructures 240 may include wires, ribbons, and tubes. In one embodiment, such nanostructures 240 may be disposed over the structure such that they extend parallel to the surface of the structure in which they are located.

The electrical characteristics of the nanostructure 240 change depending on the sensing target. The electrical property that is changed can be, for example, a resistor. That is, the resistance of the nanostructure 240 may vary depending on the presence or concentration of the sensing target. The sensing object may be, for example, a protein, deoxyribonucleic acid (hereinafter, simply referred to as DNA), a molecule, or an ion. Functionalization so that nanostructure 240 reacts to a particular sensing target such that nanostructure 240 has selectivity, that is, the electrical properties of nanostructure 240 vary among specific sensing targets. May be performed. In one embodiment, functionalization affects nanostructure 240 to detect proteins, tumor markers, molecules, and viruses in solution, allowing the sensor to detect electrical properties. The nanostructure 240 used in the sensor according to the embodiment of the present invention may have a random arrangement.

For example, the sensing object to which the nanostructure 240 is exposed may be liquid or gaseous (or the sensing object is included in the liquid or gas). For example, as described above, the sensing object may be in the form of a solution including medium such as plasma. As another example, the sensing object may be a molecule such as a complex molecule. On the other hand, the molecules may be located in solution.

The insulator 230 is formed on the substrate 280 and is positioned between the first electrode 250 and the second electrode 260. That is, the first electrode 250 and the second electrode 260 may be disposed to be spaced apart from each other, and the insulator 230 may be disposed between the first electrode 250 and the second electrode 260. For example, as illustrated in FIGS. 7 and 8, when the first electrode 250 is configured in a circular shape, and the second electrode 260 is configured to surround the outer circumference of the first electrode 250, the first electrode 250 is formed. The insulator 230 may be located in a space between the first electrode 250 and the second electrode 260. In this case, the insulator 230 may be configured in a ring shape, for example, may be formed in an annular shape. The nanostructure 240 is positioned on the upper surface of the insulator 230.

The first conductor 210 is positioned on the first electrode 250 with at least one nanostructure 240 interposed therebetween. Thus, a portion of the at least one nanostructure 240 is located between the first electrode 250 and the first conductor 210. For example, the first conductor 210 may be a gold layer.

The second conductor 220 is positioned on the second electrode 260 with at least one nanostructure 240 interposed therebetween. Thus, a portion of the at least one nanostructure 240 is located between the second electrode 260 and the second conductor 220. For example, the second conductor 220 may be a gold layer.

MOSFET 270 is positioned below first electrode 250 and second electrode 260. Although the drawing illustrates an example in which the first electrode 250 is electrically connected to the gate 272 of the MOSFET 270, at least one of the gate 272, the source 271, and the drain 273 of the MOSFET 270 is represented. It is sufficient that is electrically connected to at least one of the first electrode 250 and the second electrode 260. MOSFET 270 includes gate 272, source 271, drain 273, channel region 275, gate insulating film 274, gate electrode 286, source electrode 277, drain electrode 278 and An insulating film 279 is included. MOSFET 270 may further include wells 276. The left side of the MOSFET 270 shown in the figure shows a p-channel metal-oxide semiconductor (PMOS), a source and a gate are doped with a P type, and the well is doped with an N type, and the right side has an NMOS (n -channel metal-oxide semiconductor, the source and the gate are doped with N type, and the substrate is a P type substrate. The MOSFET 270 may be used as part of a complementary metal oxide semiconductor (CMOS) circuit (not shown) formed on the substrate 280.

The CMOS circuit may be used as an amplifier, an analog-to-digital converter (ADC), or a switch for selecting a part of several first electrodes 20 and 100. It is preferable that a digital signal corresponding to a change in electrical characteristics of the nanostructure 240 is generated by the CMOS circuit.

6 and 7, the unit sensor S including the first electrode 250, the second electrode 260, the nanostructure 240, the insulator 230, and the MOSFET 270 is provided. By forming a plurality to form an array structure, the sensor 200 may be implemented in the form of a sensor array.

When performing the test using the sensor 200 having the structure as described above, for example, when performing the examination of abnormal symptoms using the antigen-antibody reaction, a solution with a receptor may be placed on the sensor 200. have. In this case, the receptor may be, for example, any antibody capable of causing an antigen-antibody reaction.

The solution may be placed on the sensor 200 by any method, such as a sputtering method, such that the receptor is attached to the sensor 200 within a predetermined area range. On the other hand, as the sensor 200 according to the present invention includes a plurality of unit sensors S forming an array, the solution lies on a predetermined area range of the sensor 200 and includes different receptors. Multiple solutions may lie on several regions of one sensor 200.

Subsequently, a sample to be detected is supplied onto the solution. As described above, the test subject may be plasma, or cellular components, bearing antigen in an antigen-antibody response. As the test object is supplied on the solution, the antibody in the solution and the antigen in the test object may cause an antigen-antibody reaction, which may change the electrical properties of the nanostructure 240.

Hereinafter, an inspection method using the sensor system 1 according to the present invention will be described.

The inspection method using the sensor system 1 according to the present invention includes supplying a sample to be inspected to the sample supply unit 20, supplying one or more receptors to one or more regions on the sensor unit 30, respectively. Supplying a sample onto the sensor unit (30). And examining the reaction between the receptor and the sample.

First, the sample to be inspected may be supplied to the sample supply unit 20. The sample may be in the form of a solution such as blood as described above, but is not limited thereto.

Meanwhile, the sample supply unit 20 may include a predetermined particle separation unit 100. Accordingly, according to a preferred embodiment of the inspection method using the sensor system 1 of the present invention, the method further comprises a pre-processing step of separating the sample supplied to the sample supply unit 20 to provide to the sensor unit 30 can do. That is, only the components used for the inspection among the components in the sample may be separated and supplied to the sensor unit 30 through the particle separation unit 100, and the particle separation unit 100 may be a particle using, for example, a dielectrophoretic effect. It may be composed of a separation unit (100). The particle separation unit 100 using the electrophoretic effect may separate the plasma component and the blood cell component in the blood and supply only the plasma component to the sensor unit 30 so that the plasma component can be used for the test.

Meanwhile, one or more receptors may be supplied to one or more regions on the sensor unit 30, respectively. The receptor may be provided in a form included in a predetermined solution, but is not limited thereto. Meanwhile, after the solution including the receptor is placed on the sensor unit 30 according to an example, the sensor unit 30 may be mounted on the sensor system 1 according to the present invention, and the inspection may be performed. . For example, a solution containing a predetermined antibody may be placed on the sensor unit 30 to cause an antigen-antibody reaction with plasma.

As described above, the sensor unit 30 of the sensor system 1 according to the present invention includes a sensor 200 including a plurality of unit sensors S, and the unit sensor S includes a substrate 280. ), A first electrode 250 disposed on the substrate 280, a second electrode 260 spaced apart from the first electrode 250 on the substrate 280, and the first electrode ( 250 and at least one nanostructure 240 electrically connected to the second electrode 260 and varying in electrical properties according to a sensing object, and the sensor 200 includes the plurality of unit sensors S. May be arranged in an array.

With this sensor structure, the area on the sensor can be divided into several areas so that one or more receptors can be placed on each area, and different receptors are supplied to each area to simultaneously use the respective different receptors. Inspection can be done.

For example, when the receptors used to test cancer cells are A, B, C, ... I, a solution containing each receptor is a predetermined area range on the sensor 200 as shown in FIG. After sputtering on, the test can proceed.

Meanwhile, at this time, it may be checked whether the receptor is reliably adsorbed on the sensor. That is, the inspection method using the sensor system 1 according to the present invention may further include the step of inspecting the adsorption between the receptor and the sensor. The preceding inspection step may be, for example, an electrical inspection step such as a change in electrical resistance, but is not limited thereto. As described above, as the sensor has a structure in which the plurality of unit sensors S form an array, the sensor may selectively inspect the unit sensors S of the plurality of unit sensors S. As described above, an inspection may be performed by selecting the unit sensor S to which the receptor is most reliably adsorbed. Therefore, the inspection method using the sensor system 1 according to the present invention may further include selecting the unit sensor S to which the receptor is adsorbed. In this case, selecting the unit sensor S to which the receptor is adsorbed may include a concept of selecting a test result derived from the unit sensor S to which the receptor is adsorbed.

Then, a sample is supplied to the sensor unit 30 and the reaction between the sample and the receptor included in the solution is examined. In this case, as described above, a plurality of solutions including at least one or more receptors on the sensor unit 30 are placed in several regions on the sensor unit 30, and as samples are supplied on the regions, different kinds of solutions are provided. It can be tested by using both receptors at the same time. Therefore, the degree of expression by each receptor may appear three-dimensionally, by examining the results obtained through this can be easily identified whether the cancer cells.

For example, when the level of expression of other receptors is low compared to the high level of expression by several kinds of receptors, it is judged that the probability of cancer cells is low.

In this way, as it is possible to perform a three-dimensional examination using several receptors at the same time, a pattern analysis type diagnosis can be made. That is, according to a preferred embodiment of the test method using the sensor system 1 according to the present invention, it is possible to perform a pattern analysis type diagnosis to three-dimensionally diagnose the reaction between the receptor and the sample placed in each area, the pattern The analytical diagnostic step may further include, for example, a pattern analysis diagnostic step of matching a response pattern between a plurality of receptors placed on the plurality of regions and a sample and a response indicator pattern serving as a predetermined indicator.

For example, a pattern-analysis diagnosis that compares an antigen-antibody response test result pattern using actual cancer cells with an antigen-antibody response test result pattern of a sample to be detected can be made, thus allowing a high probability range of diagnosis.

In addition, as the pattern analysis type diagnosis becomes possible, a time-series variation pattern and a change pattern of the test result of the sample may also be derived, and thus the reliability and accuracy of the diagnosis may be further improved.

Accordingly, although not shown in the drawing, the signal processing unit for converting a signal so as to confirm the result value inspected by the sensor unit 30, and a predetermined display unit further, the signal processing unit processes the result value Steps. And outputting the result value in the form of a pattern on a display unit.

For example, the signal processor may process a signal sensed by the sensor unit 30 to generate a patterned signal, and the display unit may output the result in a patterned form.

For example, a test result of a subject in good health and a test result of a patient having a predetermined pathology may be output and compared in a pattern form.

The pattern indicated by the test result may be different from the pattern indicated by the test result of a healthy subject and a pathological subject. Accordingly, according to this, as the test result of the actual subject is compared with the test result of the healthy subject and the test result of the pathological subject as described above, the pattern shape appears more similar to the test result of the actual pathological subject. It can be inferred that the subject has a disease similar to that of the subject, and thus, a pattern analysis type diagnosis for analyzing and comparing patterns can be made.

Since the sensor 200 according to the present invention includes a CMOS circuit including a MOSFET, the sensor 200 may derive a test result as an electrical signal. That is, by including a MOSFET that can be used as an amplifier and / or an ADC, a change in electrical characteristics of the nanostructure 240 can be amplified and / or digitally converted directly on the substrate 280, thereby improving accuracy of measurement. Can be. For example, when an abnormality such as the presence or absence of a pathogen or the presence or absence of cancer cells through an antigen-antibody reaction is performed, the sensor 200 according to the present invention may have a test result as an electrical signal, so that the test result is clearly derived. As a result, inspection reliability is improved, and a separate tag TAG may not be used for determining the inspection result, thereby improving convenience.

In addition, the sensor 200 according to the present invention may have the following advantages as the plurality of unit sensors S are configured in an array.

First, as a test object and a solution including a receptor are sputtered on a plurality of areas having a predetermined area on the sensor array, a plurality of tests may be performed using one sensor 200.

For example, in the case of cancer cells in which abnormal signs are detected by various factors, it is difficult to accurately determine whether the cancer cells are only by antigen-antibody reaction test using one receptor. However, since the sensor 200 according to the present invention includes a sensor array in which a plurality of unit sensors S are formed, a plurality of solutions including different kinds of receptors are sputtered on the sensor array, and the plurality of receptors are sputtered. Three-dimensional inspection can be performed.

For example, when the receptors used to test cancer cells are A, B, C, ... I, a solution containing each receptor is a predetermined area on the sensor 200, as shown in FIG. After sputtering into the range, the inspection can proceed. As a result of using different types of receptors, the level of expression by each of the receptors can be expressed in three dimensions, and whether the cancer cells can be easily identified. For example, when the level of expression of other receptors is low compared to the high level of expression by several kinds of receptors, it is judged that the probability of cancer cells is low. In this way, as it is possible to perform a three-dimensional examination using several receptors at the same time, a pattern analysis type diagnosis can be made. That is, a pattern-analysis diagnosis that compares the antigen-antibody reaction test result pattern using actual cancer cells with the antigen-antibody reaction test result pattern of a sample to be detected can be performed, thereby enabling a diagnosis of a high probability range.

In addition, since a plurality of unit sensors S are provided, the test results derived by the unit sensor S or the unit sensor S may be selectively used, thereby improving test reliability.

For example, when performing an examination of abnormal symptoms using an antigen-antibody reaction, the receptor used for the antigen-antibody reaction selects the unit sensor S most reliably adsorbed, or by the unit sensor S Since the derived test results can be selected and used to derive the test results, the test reliability can be improved.

For example, as shown in FIG. 11, before attaching a receptor on a certain area and inspecting, the unit sensor S of which the receptor is most reliably adsorbed among the plurality of unit sensors S on which each receptor is adsorbed is examined. ) Can be used for inspection, resulting in improved test results. In this case, whether the receptor is adsorbed can be confirmed by performing a predetermined test before the test. For example, a preliminary inspection such as measuring a predetermined electrical resistance value can confirm whether the receptor is adsorbed.

Although the preferred embodiments have been illustrated and described above, the invention is not limited to the specific embodiments described above, and does not depart from the gist of the invention as claimed in the claims. Various modifications can be made by the vibrator, and these modifications should not be understood individually from the technical idea or the prospect of the present invention.

Claims (22)

1. In the sensor system (1) comprising a;

   The sensor unit 30 includes a sensor 200 including a plurality of unit sensors (S),

   The unit sensor S,

   Substrate 280,

   The first electrode 250 is disposed on the substrate (280).

   A second electrode 260 spaced apart from the first electrode 250 on the substrate 280, and

   At least one nanostructure 240 is electrically connected to the first electrode 250 and the second electrode 260 and the electrical characteristics change according to the sensing object,

   The sensor 200 is a sensor system (1) is arranged in an array of the plurality of unit sensors (S).
2. The method of claim 1,

   And the unit sensor (S) is arranged to have a matrix structure of M × N.
3. The method of claim 1,

   A sensor system (1) disposed on the substrate (280), further comprising an insulator disposed between the first electrode (250) and the second electrode (260).
4. The method of claim 1,

   The nanostructure 240,

   A sensor system (1) comprising at least one of nanotubes, nanowires, nanorods, nanoribbons, nanofilms, and nanoballs.
5. The method of claim 1,

   A first conductor 210 disposed on the first electrode 250 and electrically connected to the first electrode 250, and

   And a second conductor 220 disposed on the second electrode 260 and electrically connected to the second electrode 260.

   A portion of the at least one nanostructure 240 is disposed between the first electrode 250 and the first conductor 210,

   A portion of the at least one nanostructure (240) is disposed between the second electrode (260) and the second conductor (1).
6. The method of claim 1,

   The sensor 200,

   And further comprising a metal oxide semiconductor field effect transistor (MOSFET) disposed below the first electrode 250 and the second electrode 260.

   At least one of the source 271, the gate 272, and the drain 273 of the MOSFET is electrically connected to at least one of the first electrode 250 and the second electrode 260 (1). ).
7. The method of claim 1,

   The sensor unit 30 includes a printed circuit board 32,

   The sensor 200 is disposed on the printed circuit board 32,

   The printed circuit board 32 is a sensor system 1 detachably configured with respect to the sensor system 1.
8. The method of claim 1,

   Further comprising a sample supply unit 20,

   The sample supply unit 20,

   A sensor system (1) comprising a particle separator (100) for separating particles and medium in a solution from a solution.
9. The method of claim 8,

   The particle separation unit 100,

   A body 110 in which a plurality of spaced pores 115 forming a pore array 114 are formed, and

   It is provided on the body 110 and includes an electrode 120 to form an electric field by the application of an external power source,

   The electrode 120,

   A first electrode 130 and a second electrode 140 respectively connected to opposite polarity terminals of the external power source;

   A pore 115 positioned between the first electrode 130 and the second electrode 140, the closest distance from the pore 115 to the first electrode 130 closest to the first electrode 130. Sensor system (1) in which at least one pore (115) with different shortest distances to the two electrodes (140) is present.
10. The method of claim 9,

    One or more of the pores 115 of the pores 115 forming the pore array 114,

    Sensor system (1) in contact with the first electrode (250) or the second electrode (260).
11. The method of claim 10,

    The first electrode 130 includes a first electrode pad 132 and a plurality of first branch electrodes 134 connected to the first electrode pad 132.

    The second electrode 140 includes a second electrode pad 142 and a second branch electrode 144 connected to the second electrode pad 142.

    A pore 115 positioned between the first branch electrode 134 and the second branch electrode 144, the shortest distance from the pore 115 to the closest first branch electrode 134 and the pore. Sensor system (1) wherein at least one pore (115) differing from each other from (115) to the nearest second branch electrode (144) is different.
12. The method of claim 11,

    The one or more pores (115) are in contact with the first branch electrode (134) or the second branch electrode (144).
13. The method of claim 11,

    Concavities and convexities corresponding to the shape of the pore array 114 are formed at the sides of the first branch electrode 134 and the second branch electrode 144.

    The sensor system (1) in which the pore array (114) is disposed at a portion where the unevenness is formed.
14. The method of claim 9,

    The body 110 includes a base 111, a hydrophilic coating layer 112 disposed on the base 111, and a hydrophobic coating layer 113 disposed on the hydrophilic coating layer 112.

    The hydrophilic coating layer 112 forms the inner circumferential surface of the pore 115,

    Sensor system (1) with the base (111) below the portion where the pore array (114) is formed.
15. The method of claim 1,

    The sensor system 1,

    The sensor system (1) further comprises a transceiver for transmitting and receiving signals with an external device.
16. The method of claim 1,

    A signal processor for processing a result value inspected by the sensor unit 30 to generate a patterned signal; And a display unit for outputting the result.

    And the signal processing unit processes the result value to generate a patterned signal, and the display unit outputs the patterned result value.
17. A sensor system 1 including; a sensor unit 30 for performing a test on a sensing object,

    The sensor unit 30 includes a sensor 200 including a plurality of unit sensors (S),

    The unit sensor S,

    Substrate 280,

    The first electrode 250 is disposed on the substrate (280).

    A second electrode 260 spaced apart from the first electrode 250 on the substrate 280, and

    At least one nanostructure 240 is electrically connected to the first electrode 250 and the second electrode 260 and the electrical characteristics change according to the sensing object,

    The sensor 200 is an inspection method using the sensor system 1 in which the plurality of unit sensors S are arranged in an array.

    Supplying a sample to be examined to the sample supply;

    Respectively supplying one or more receptors to one or more regions on the sensor;

    Supplying the sample onto the sensor unit; And

    Testing the reaction between the receptor and the sample.
18. The method of claim 17,

    And dividing the plurality of sensors into a plurality of areas including one or more unit sensors (S) and supplying one or more receptors to each of the partitioned areas. .
19. The method of claim 18,

    Checking whether the receptor and the sensor 200 are adsorbed; And

    And selecting, by the receptor, the sensor (200) adsorbed to the sensor (200).
20. The method of claim 17,

    The sensor system 1 further includes a sample supply 20, which includes a particle separator 100 that separates particles and medium in the solution from the solution.

    A pretreatment step of separating the sample; Inspection method using a sensor system further comprising.
21. The method of claim 1,

    It further includes a signal processing unit for generating a signal by processing the result value inspected by the sensor unit 30, and a display unit for outputting the result,

    Generating a patterned signal by processing a result value in the signal processor;

    The method may further include outputting the result value in a pattern form on the display unit.
22. The method of claim 21,

    And a pattern analysis diagnostic step of matching a response pattern and a response indicator pattern between the receptor and the sample.

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