WO2014049861A1 - Spectroscope - Google Patents

Spectroscope Download PDF

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Publication number
WO2014049861A1
WO2014049861A1 PCT/JP2012/075208 JP2012075208W WO2014049861A1 WO 2014049861 A1 WO2014049861 A1 WO 2014049861A1 JP 2012075208 W JP2012075208 W JP 2012075208W WO 2014049861 A1 WO2014049861 A1 WO 2014049861A1
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Prior art keywords
light receiving
light
resonance
photodetector
spectroscope
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PCT/JP2012/075208
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French (fr)
Japanese (ja)
Inventor
博樹 丹
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パイオニア株式会社
東北パイオニア株式会社
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Application filed by パイオニア株式会社, 東北パイオニア株式会社 filed Critical パイオニア株式会社
Priority to PCT/JP2012/075208 priority Critical patent/WO2014049861A1/en
Publication of WO2014049861A1 publication Critical patent/WO2014049861A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters

Definitions

  • the present invention relates to a spectrometer.
  • Dispersion spectrometers using infrared spectroscopy are known. This type of spectroscope irradiates a substance to be measured with infrared light, separates transmitted light or reflected light from the substance, obtains a spectrum, and measures the characteristics of the target substance.
  • a conventional dispersion-type spectroscope has a configuration in which transmitted light or reflected light from a target substance is spatially dispersed by a dispersing element such as a grating or a prism and received by a light receiving unit such as a CCD array.
  • Patent Document 1 discloses an interference filter that enables selection of a wavelength by making a gap between a pair of support substrates variable.
  • the dispersion type spectrometer as described above is based on the principle of spatially dispersing light by a dispersion element such as a grating, and therefore requires a sufficient space for dispersing light between the dispersion element and the light receiving unit. To do. For this reason, it is difficult to reduce the size of the device itself.
  • An object of this invention is to provide the spectrometer which can be reduced in size.
  • the invention according to claim 1 is a spectrometer, comprising a plurality of light receiving elements, each of the light receiving elements comprising a resonance part, wherein the plurality of resonance parts resonate at different wavelengths. To do.
  • the structure of the spectrometer which concerns on 1st Example is shown.
  • the structure of the spectrometer which concerns on 2nd Example is shown.
  • the structure of the spectrometer which concerns on 3rd Example is shown.
  • the spectroscope includes a plurality of light receiving elements, each of the light receiving elements includes a resonance unit, and the plurality of resonance units resonate at different wavelengths.
  • the above spectroscope includes a plurality of light receiving elements, and each light receiving element includes a resonance unit.
  • the plurality of resonating parts resonate at different wavelengths. Therefore, the incident light is split by the plurality of resonance parts.
  • each of the light receiving elements includes a photo detector
  • each of the resonating units includes a semi-reflective layer and a total reflective layer that are arranged to face each other
  • the photo detector is arranged with respect to the resonating unit. It arrange
  • the photodetector and the resonance unit are arranged in this order from the light receiving surface side of the light receiving element, that is, the light incident side.
  • the light of the wavelength selected by the resonance unit is detected by each photodetector.
  • each of the light receiving elements includes a photo detector
  • each of the resonating units includes a pair of semi-reflective layers disposed so as to face each other, and the photo detector is arranged with respect to the resonating unit. It arrange
  • the resonator unit and the photodetector are arranged in this order from the light receiving surface side of the light receiving element, that is, the light incident side.
  • the light of the wavelength selected by the resonance unit is detected by each photodetector.
  • each of the resonance units includes a first resonance unit and a second resonance unit
  • each of the light receiving elements includes the first resonance unit and the second resonance unit.
  • the photodetector is arranged between the resonance part.
  • the photodetector is disposed between the two resonating portions.
  • the light of the wavelength selected by the resonance unit is detected by each photodetector.
  • the first resonating unit includes a pair of semi-reflective layers disposed opposite to each other, and the second resonating unit includes a semi-reflective layer and a total reflective layer disposed opposite to each other.
  • the plurality of light receiving elements are arranged side by side in a direction intersecting the incident direction in the order of a light receiving element having a large thickness in a light incident direction to a thin light receiving element.
  • FIG. 1A shows the configuration of the spectrometer 100 according to the first embodiment.
  • the spectrometer 100 is used to measure the properties of a substance.
  • Light emitted from a light source passes through the measurement target substance and then enters the spectroscope 100 as light L.
  • the light L is incident on the spectroscope 100 as light including only light in a specific direction or light narrowed to a predetermined width, for example, through a pinhole or using an optical fiber.
  • Spectroscope 100 includes a plurality of light receiving elements 10 arranged side by side. Specifically, as shown in FIG. 1A, when the incident method of the light L is the X direction, the plurality of light receiving elements 10 are in a direction crossing the X direction, that is, a direction perpendicular to the X direction. They are arranged in an array in the direction. More specifically, the plurality of light receiving elements 10 are arranged side by side in the Y direction intersecting with the X direction, which is the light incident direction, in the order of the light receiving elements 10 having a large thickness in the X direction to the thin light receiving elements 10.
  • the shape of the light receiving element 10 viewed in the X direction that is, the cross-sectional shape is rectangular.
  • FIG. 1B shows an enlarged view of a part 10x of the spectroscope 100 in FIG.
  • FIG. 1B is an enlarged view of a three-stage portion of the light receiving element 10 constituting the spectroscope 100.
  • One light receiving element 10 includes a photodetector 11 and a resonating unit 12.
  • the resonating parts 12 included in the three light receiving elements 10 are designated as resonating parts 12p to 12r, respectively.
  • the resonating portions 12p to 12r have different lengths in the X direction, that is, the light incident direction, that is, the optical path lengths, and thus have different resonance wavelengths ⁇ .
  • the resonance wavelengths of the resonance parts 12p to 12r are ⁇ p, ⁇ q, and ⁇ r, respectively.
  • the spectroscope 100 is configured by arranging a plurality of light receiving elements 10 including the photodetector 11 and the resonating units 12 having different resonance wavelengths ⁇ side by side.
  • the spectroscope 100 has both a spectroscopic function and a light receiving function. That is, the photodetector 11 of each light receiving element 10 functions as a light receiving unit. A plurality of adjacently arranged resonating parts 12 exhibit a spectral function. In other words, the incident light L passes through the plurality of photodetectors 11 and then enters the plurality of resonance portions 12 having different resonance wavelengths. In each resonating unit 12, light having a wavelength corresponding to each optical path length is selected and supplied to the photodetector 11. The plurality of resonating units 12 of the spectroscope 100 realizes a spectroscopic function by the plurality of resonating units 12 having different resonance wavelengths selecting light of different wavelengths.
  • the configuration of one resonator 12 is shown in FIG.
  • the resonator 12 is formed by integrating a semi-reflective layer 13, a dielectric layer 14, and a total reflection layer 15.
  • the dielectric layer 14 may be made of an inorganic material or an organic material.
  • the semi-reflective layer 13 and the total reflective layer 15 are disposed to face each other.
  • the light L that has passed through the photodetector 11 passes through the semi-reflective layer 13, travels through the dielectric layer 14, is reflected by the total reflective layer 15, passes through the dielectric layer 14 again, and returns to the semi-reflective layer 13.
  • the light that has been repeatedly reflected between the semi-reflective layer 13 and the total reflective layer 15 is light having a wavelength that depends on the optical path length of the resonating unit 12, and is transmitted through the semi-transmissive layer 13 and incident on the photodetector 11. To do.
  • the photodetector 11 outputs the intensity of incident light as an electrical signal.
  • the spectroscope 100 includes the plurality of resonating units 12 having a spectroscopic function and the plurality of photodetectors 11 having a light receiving function, and thus splits incident light into a plurality of wavelengths. The intensity can be detected.
  • the photodetector 11 and the resonating unit 12 are disposed adjacent to each other, a space corresponding to the space between the dispersive element and the light receiving unit in the conventional dispersive spectroscope is not required, and thus the size can be reduced.
  • FIG. 2A shows the configuration of the spectroscope 200 according to the second embodiment. Similar to the first embodiment, the light L enters the spectroscope 200 as light including only light in a specific direction.
  • the spectroscope 200 includes a plurality of light receiving elements 20 arranged side by side. Specifically, as shown in FIG. 2A, the plurality of light receiving elements 20 are arranged in an array in the Y direction. More specifically, the plurality of light receiving elements 20 are arranged in the Y direction intersecting with the X direction, which is the light incident direction, in the order from the light receiving element 20 having a large thickness in the X direction to the thin light receiving element 20.
  • the shape of the light receiving element 20 viewed in the X direction that is, the cross-sectional shape is rectangular.
  • FIG. 2B shows an enlarged view of a part 20x of the spectroscope 200 in FIG.
  • FIG. 2B is an enlarged view of the three-stage portion of the light receiving element 20 constituting the spectroscope 200.
  • One light receiving element 20 includes a photodetector 21, a first resonance unit 221, and a second resonance unit 222.
  • the photodetector 21 is disposed between the first resonance unit 221 and the second resonance unit 222.
  • the first resonance parts 221 included in the three light receiving elements 20 are the resonance parts 221p to 221r, respectively, and the second resonance part 222 is the resonance parts 222p to 222r, respectively.
  • the resonating units 221p to 221r and 222p to 222r have different lengths in the X direction, that is, the light incident direction, that is, optical path lengths.
  • the wavelength of light selected by the resonance units 221 and 222 of the light receiving element 20 is determined by the sum of the lengths (optical path lengths) of the first resonance unit 221, the photodetector 21, and the second resonance unit 222. , ⁇ q, ⁇ r.
  • the spectroscope 200 is configured by arranging a plurality of light receiving elements 20 including the photodetector 21 and the resonating units 221 and 222 having different resonance wavelengths ⁇ side by side.
  • the spectroscope 200 has both a spectroscopic function and a light receiving function. That is, the photodetector 21 of each light receiving element 20 functions as a light receiving unit.
  • a plurality of adjacently arranged resonating portions 221 and 222 exhibit a spectral function. That is, the incident light L passes through the first resonating unit 221, passes through the photodetector 21, and enters the second resonating unit 222.
  • light having a wavelength corresponding to each optical path length is selected and supplied to the photodetector 21.
  • the plurality of resonance units 221 and 222 of the spectroscope 200 realize a spectral function by selecting light of different wavelengths by the plurality of resonance units 221 and 222 having different resonance wavelengths.
  • the configuration of the resonators 221 and 222 is shown in FIG.
  • the resonator 221 is formed by integrating a pair of opposed semi-reflective layers 23 and a dielectric layer 24 sandwiched therebetween.
  • the resonator 222 is formed by integrating the semi-reflective layer 23, the dielectric layer 24, and the total reflection layer 25.
  • the semi-reflective layer 23 and the total reflective layer 25 are disposed to face each other.
  • the light L that has passed through the first resonator 221 and the photodetector 21 is reflected by the total reflection layer 15 of the second resonator 222 and returns to the photodetector 21 and the second resonator 221 again.
  • the light repeatedly reflected between the semi-reflective layer 13 and the total reflection layer 15 on the light receiving surface side of the light receiving element 20 is light having a wavelength that depends on the optical path length of the light receiving element 20, and is incident on the photodetector 21. To do.
  • the photodetector 21 outputs the intensity of incident light as an electrical signal.
  • the spectroscope 200 includes the plurality of resonating units 221 and 222 having a spectroscopic function and the plurality of photodetectors 21 having a light receiving function, and thus splits incident light into a plurality of wavelengths. The intensity can be detected. Further, since the photodetector 21 and the resonating units 221 and 222 are disposed adjacent to each other, a space corresponding to the space between the dispersive element and the light receiving unit in the conventional dispersive spectroscope is not required, and thus the size can be reduced. .
  • FIG. 3A shows a configuration of a spectrometer 300 according to the third embodiment. Similar to the first embodiment, the light L enters the spectroscope 300 as light including only light in a specific direction.
  • the spectroscope 300 includes a plurality of light receiving elements 30 arranged side by side. Specifically, as shown in FIG. 3A, the plurality of light receiving elements 30 are arranged in an array in the Y direction. More specifically, the plurality of light receiving elements 30 are arranged in the Y direction intersecting with the X direction which is the incident direction of light in the order of the light receiving elements 30 having a large thickness in the X direction to the thin light receiving elements 30.
  • the shape of the light receiving element 30 viewed in the X direction that is, the cross-sectional shape is rectangular.
  • FIG. 3B is an enlarged view of a part 30x of the spectroscope 300 in FIG.
  • FIG. 3B is an enlarged view of the three-stage portion of the light receiving element 30 constituting the spectroscope 300.
  • One light receiving element 30 includes a photodetector 31 and a resonating unit 32.
  • the resonating parts 32 included in the three light receiving elements 30 are designated as resonating parts 32p to 32r, respectively.
  • the resonating portions 32p to 32r have different lengths in the X direction, that is, the light incident direction, that is, the optical path lengths, and thus have different resonance wavelengths ⁇ .
  • the resonance wavelengths of the resonance parts 32p to 32r are ⁇ p, ⁇ q, and ⁇ r, respectively.
  • the spectroscope 300 is configured by arranging a plurality of light receiving elements 30 including the photodetector 31 and the resonating units 32 having different resonance wavelengths ⁇ side by side.
  • the spectroscope 300 has both a spectroscopic function and a light receiving function. That is, the photodetector 31 of each light receiving element 30 functions as a light receiving unit. A plurality of adjacently arranged resonating parts 32 exhibit a spectral function. The incident light L is incident on a plurality of resonance portions 32 having different resonance wavelengths. In each resonance part 32, the light of a wavelength according to each optical path length is selected and supplied to the photodetector 31. The plurality of resonating units 32 of the spectroscope 300 realize a spectroscopic function by the light having different wavelengths selected by the plurality of resonating units 32 having different resonance wavelengths.
  • the configuration of one resonator 32 is shown in FIG.
  • the resonator 32 is formed by integrating two semi-reflective layers 33 arranged opposite to each other and a dielectric layer 34 sandwiched therebetween.
  • the light L incident on the resonating unit 32 passes through the semi-reflective layer 33, travels through the dielectric layer 34, is reflected by the semi-reflective layer 33, passes through the dielectric layer 34 again, and returns to the semi-reflective layer 33.
  • the light that is repeatedly reflected between the pair of semi-reflective layers 33 is light having a wavelength that depends on the optical path length of the resonating unit 32, and is transmitted through the semi-transmissive layer 33 and incident on the photodetector 31.
  • the photodetector 31 outputs the intensity of incident light as an electrical signal.
  • the spectroscope 300 includes the plurality of resonating units 32 having a spectroscopic function and the plurality of photodetectors 31 having a light receiving function, and thus splits incident light into a plurality of wavelengths. The intensity can be detected.
  • the photodetector 31 and the resonating unit 32 are disposed adjacent to each other, a space corresponding to the space between the dispersive element and the light receiving unit in the conventional dispersive spectroscope is not required, so that the size can be reduced.
  • the present invention can be used for a measuring instrument using a spectroscopic method for spectrally separating infrared light, visible light, or the like.

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  • Spectroscopy & Molecular Physics (AREA)
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Abstract

Provided is a spectroscope having a reduced size. This spectroscope is provided with a plurality of light receiving elements, and the light receiving elements are respectively provided with photodetectors and resonance sections. The resonance sections respectively select light at wavelengths different from each other by resonating at different wavelengths, and spectroscopic functions for inputted light as a whole are achieved. The light selected by means of the resonance sections, said light being at respective wavelengths, is detected by means of the photodetectors.

Description

分光器Spectrometer
　本発明は、　本発明は分光器に関する。 The present invention relates to a spectrometer.
　赤外分光法による分散型の分光器が知られている。この種の分光器は、測定対象の物質に赤外光を照射し、物質による透過光又は反射光を分光してスペクトルを得て、対象物質の特性を測定する。従来の分散型の分光器は、対象物質からの透過光又は反射光をグレーティング又はプリズムなどの分散素子により空間的に分散させ、ＣＣＤアレイなどの受光部により受講する構成を有する。 Dispersion spectrometers using infrared spectroscopy are known. This type of spectroscope irradiates a substance to be measured with infrared light, separates transmitted light or reflected light from the substance, obtains a spectrum, and measures the characteristics of the target substance. A conventional dispersion-type spectroscope has a configuration in which transmitted light or reflected light from a target substance is spatially dispersed by a dispersing element such as a grating or a prism and received by a light receiving unit such as a CCD array.
　なお、一対の支持基板間のギャップを可変とすることにより、波長の選択を可能とする干渉フィルタが特許文献１に記載されている。 Note that Patent Document 1 discloses an interference filter that enables selection of a wavelength by making a gap between a pair of support substrates variable.
特開平１１－２４８９３４号公報Japanese Patent Laid-Open No. 11-248934
　上記のような分散型の分光器は、グレーティングなどの分散素子により空間的に光を分散させる原理であるため、分散素子と受光部との間に光を分散させるための十分な空間を必要とする。このため、装置自体を小型化することが難しい。 The dispersion type spectrometer as described above is based on the principle of spatially dispersing light by a dispersion element such as a grating, and therefore requires a sufficient space for dispersing light between the dispersion element and the light receiving unit. To do. For this reason, it is difficult to reduce the size of the device itself.
　本発明の解決しようとする課題としては、上記のものが一例として挙げられる。本発明は、小型化が可能な分光器を提供することを目的とする。 The above is one example of problems to be solved by the present invention. An object of this invention is to provide the spectrometer which can be reduced in size.
　請求項１に記載の発明は、分光器であって、複数の受光素子を備え、前記受光素子の各々は共振部を備え、複数の前記共振部は、互いに異なる波長で共振することを特徴とする。 The invention according to claim 1 is a spectrometer, comprising a plurality of light receiving elements, each of the light receiving elements comprising a resonance part, wherein the plurality of resonance parts resonate at different wavelengths. To do.
第１実施例に係る分光器の構成を示す。The structure of the spectrometer which concerns on 1st Example is shown. 第２実施例に係る分光器の構成を示す。The structure of the spectrometer which concerns on 2nd Example is shown. 第３実施例に係る分光器の構成を示す。The structure of the spectrometer which concerns on 3rd Example is shown.
　本発明の好適な実施形態では、分光器は、複数の受光素子を備え、前記受光素子の各々は共振部を備え、複数の前記共振部は、互いに異なる波長で共振する。 In a preferred embodiment of the present invention, the spectroscope includes a plurality of light receiving elements, each of the light receiving elements includes a resonance unit, and the plurality of resonance units resonate at different wavelengths.
　上記の分光器は複数の受光素子を備え、各受光素子は共振部を備える。複数の共振部は、互いに異なる波長で共振する。よって、入射した光は複数の共振部により分光される。 The above spectroscope includes a plurality of light receiving elements, and each light receiving element includes a resonance unit. The plurality of resonating parts resonate at different wavelengths. Therefore, the incident light is split by the plurality of resonance parts.
　上記の分光器の一態様は、前記受光素子の各々はフォトディテクタを備え、前記共振部の各々は、対向配置された半反射層及び全反射層を備え、前記フォトディテクタは、前記共振部に対して前記受光素子の受光面側に配置される。 In one aspect of the spectroscope, each of the light receiving elements includes a photo detector, each of the resonating units includes a semi-reflective layer and a total reflective layer that are arranged to face each other, and the photo detector is arranged with respect to the resonating unit. It arrange | positions at the light-receiving surface side of the said light receiving element.
　この態様では、受光素子の受光面側、即ち光の入射側から順に、フォトディテクタ、共振部の順に配置される。共振部で選択された波長の光が各フォトディテクタにより検出される。 In this aspect, the photodetector and the resonance unit are arranged in this order from the light receiving surface side of the light receiving element, that is, the light incident side. The light of the wavelength selected by the resonance unit is detected by each photodetector.
　上記の分光器の他の一態様は、前記受光素子の各々はフォトディテクタを備え、前記共振部の各々は、対向配置された一対の半反射層を備え、前記フォトディテクタは、前記共振部に対して前記受光素子の受光面側と逆側に配置される。 In another aspect of the spectroscope, each of the light receiving elements includes a photo detector, each of the resonating units includes a pair of semi-reflective layers disposed so as to face each other, and the photo detector is arranged with respect to the resonating unit. It arrange | positions on the opposite side to the light-receiving surface side of the said light receiving element.
　この態様では、受光素子の受光面側、即ち光の入射側から順に、共振部、フォトディテクタの順に配置される。共振部で選択された波長の光が各フォトディテクタにより検出される。 In this aspect, the resonator unit and the photodetector are arranged in this order from the light receiving surface side of the light receiving element, that is, the light incident side. The light of the wavelength selected by the resonance unit is detected by each photodetector.
　上記の分光器の他の一態様は、前記共振部の各々は、第１の共振部と第２の共振部とを備え、前記受光素子の各々は、前記第１の共振部と前記第２の共振部との間に配置されたフォトディテクタを備える。 In another aspect of the spectroscope, each of the resonance units includes a first resonance unit and a second resonance unit, and each of the light receiving elements includes the first resonance unit and the second resonance unit. The photodetector is arranged between the resonance part.
　この態様では、各受光素子において、フォトディテクタは２つの共振部の間に配置される。共振部で選択された波長の光が各フォトディテクタにより検出される。また、好適には、前記第１の共振部は対向配置された一対の半反射層を備え、前記第２の共振部は対向配置された半反射層及び全反射層を備える。 In this aspect, in each light receiving element, the photodetector is disposed between the two resonating portions. The light of the wavelength selected by the resonance unit is detected by each photodetector. Preferably, the first resonating unit includes a pair of semi-reflective layers disposed opposite to each other, and the second resonating unit includes a semi-reflective layer and a total reflective layer disposed opposite to each other.
　好適な例では、前記複数の受光素子は、光の入射方向における厚さが厚い受光素子から薄い受光素子の順に、前記入射方向と交差する方向に並べて配置される。 In a preferred example, the plurality of light receiving elements are arranged side by side in a direction intersecting the incident direction in the order of a light receiving element having a large thickness in a light incident direction to a thin light receiving element.
　以下、図面を参照して本発明の好適な実施例について説明する。 Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
　［第１実施例］
　図１（ａ）は、第１実施例に係る分光器１００の構成を示す。分光器１００は、物質の性質の測定に使用される。図示しない光源から出射した光は、測定の対象物質を透過するなどした後、光Ｌとして分光器１００へ入射する。光Ｌは、例えばピンホールを通過させる、又は、光ファイバを使用することにより、特定の方向の光のみを含む光、又は所定の幅に絞られた光として分光器１００へ入射する。 [First embodiment]
FIG. 1A shows the configuration of the spectrometer 100 according to the first embodiment. The spectrometer 100 is used to measure the properties of a substance. Light emitted from a light source (not shown) passes through the measurement target substance and then enters the spectroscope 100 as light L. The light L is incident on the spectroscope 100 as light including only light in a specific direction or light narrowed to a predetermined width, for example, through a pinhole or using an optical fiber.
　分光器１００は、複数の受光素子１０が並べて配置されてなる。具体的には、図１（ａ）に示すように、光Ｌの入射方法をＸ方向とすると、複数の受光素子１０は、Ｘ方向と交差する方向、即ちＸ方向に垂直な方向であるＹ方向に並べてアレイ状に配置される。より詳細には、複数の受光素子１０は、Ｘ方向における厚さが厚い受光素子１０から薄い受光素子１０の順に、光の入射方向であるＸ方向と交差するＹ方向に並べて配置される。受光素子１０をＸ方向に見た形状、即ち断面形状は矩形である。 Spectroscope 100 includes a plurality of light receiving elements 10 arranged side by side. Specifically, as shown in FIG. 1A, when the incident method of the light L is the X direction, the plurality of light receiving elements 10 are in a direction crossing the X direction, that is, a direction perpendicular to the X direction. They are arranged in an array in the direction. More specifically, the plurality of light receiving elements 10 are arranged side by side in the Y direction intersecting with the X direction, which is the light incident direction, in the order of the light receiving elements 10 having a large thickness in the X direction to the thin light receiving elements 10. The shape of the light receiving element 10 viewed in the X direction, that is, the cross-sectional shape is rectangular.
　図１（ａ）における分光器１００の一部１０ｘを拡大したものを図１（ｂ）に示す。図１（ｂ）は、分光器１００を構成する受光素子１０の３段分の部分を拡大したものである。１つの受光素子１０は、フォトディテクタ１１と、共振部１２とを備える。図１（ｂ）において、３つの受光素子１０に含まれる共振部１２をそれぞれ共振部１２ｐ～１２ｒとする。共振部１２ｐ～１２ｒは、光の入射方向であるＸ方向における長さ、即ち、光路長が異なっており、それにより共振波長λが異なっている。共振部１２ｐ～１２ｒの共振波長はそれぞれλｐ、λｑ、λｒとなっている。このように、フォトディテクタ１１と、異なる共振波長λを有する共振部１２とを備える複数の受光素子１０が並べて隣接配置されることにより分光器１００が構成されている。 FIG. 1B shows an enlarged view of a part 10x of the spectroscope 100 in FIG. FIG. 1B is an enlarged view of a three-stage portion of the light receiving element 10 constituting the spectroscope 100. One light receiving element 10 includes a photodetector 11 and a resonating unit 12. In FIG. 1B, the resonating parts 12 included in the three light receiving elements 10 are designated as resonating parts 12p to 12r, respectively. The resonating portions 12p to 12r have different lengths in the X direction, that is, the light incident direction, that is, the optical path lengths, and thus have different resonance wavelengths λ. The resonance wavelengths of the resonance parts 12p to 12r are λp, λq, and λr, respectively. As described above, the spectroscope 100 is configured by arranging a plurality of light receiving elements 10 including the photodetector 11 and the resonating units 12 having different resonance wavelengths λ side by side.
　分光器１００は、分光機能と受光機能とを併せ持っている。即ち、各受光素子１０のフォトディテクタ１１は受光部として機能する。複数の隣接配置された共振部１２は分光機能を発揮する。即ち、入射する光Ｌは、複数のフォトディテクタ１１を透過した後、共振波長の異なる複数の共振部１２に入射する。各共振部１２では、各々の光路長に応じた波長の光を選択してフォトディテクタ１１に供給する。共振波長の異なる複数の共振部１２が異なる波長の光を選択することにより、分光器１００の複数の共振部１２は分光機能を実現する。 The spectroscope 100 has both a spectroscopic function and a light receiving function. That is, the photodetector 11 of each light receiving element 10 functions as a light receiving unit. A plurality of adjacently arranged resonating parts 12 exhibit a spectral function. In other words, the incident light L passes through the plurality of photodetectors 11 and then enters the plurality of resonance portions 12 having different resonance wavelengths. In each resonating unit 12, light having a wavelength corresponding to each optical path length is selected and supplied to the photodetector 11. The plurality of resonating units 12 of the spectroscope 100 realizes a spectroscopic function by the plurality of resonating units 12 having different resonance wavelengths selecting light of different wavelengths.
　１つの共振器１２の構成を図１（ｃ）に示す。共振器１２は、半反射層１３と、誘電体層１４と、全反射層１５とを一体化してなる。誘電体層１４は、無機材料又は有機材料で構成しても構わない。半反射層１３と全反射層１５とは対向配置される。フォトディテクタ１１を透過した光Ｌは、半反射層１３を透過して誘電体層１４を進み、全反射層１５で反射されて再び誘電体層１４を通過して半反射層１３へ戻る。こうして、半反射層１３と全反射層１５との間で反射を繰り返した光は、共振部１２の光路長に依存する波長の光であり、これが半透過層１３を透過してフォトディテクタ１１に入射する。フォトディテクタ１１は、入射した光の強度を電気信号として出力する。 The configuration of one resonator 12 is shown in FIG. The resonator 12 is formed by integrating a semi-reflective layer 13, a dielectric layer 14, and a total reflection layer 15. The dielectric layer 14 may be made of an inorganic material or an organic material. The semi-reflective layer 13 and the total reflective layer 15 are disposed to face each other. The light L that has passed through the photodetector 11 passes through the semi-reflective layer 13, travels through the dielectric layer 14, is reflected by the total reflective layer 15, passes through the dielectric layer 14 again, and returns to the semi-reflective layer 13. Thus, the light that has been repeatedly reflected between the semi-reflective layer 13 and the total reflective layer 15 is light having a wavelength that depends on the optical path length of the resonating unit 12, and is transmitted through the semi-transmissive layer 13 and incident on the photodetector 11. To do. The photodetector 11 outputs the intensity of incident light as an electrical signal.
　このように、第１実施例の分光器１００は、分光機能を有する複数の共振部１２と、受光機能を有する複数のフォトディテクタ１１とを備えるので、入射する光を複数の波長に分光してその強度を検出することができる。また、フォトディテクタ１１と共振部１２とは隣接配置されるので、従来の分散型分光器における分散素子と受光部の間のスペースに相当するスペースを必要としないため、小型化が可能となる。 As described above, the spectroscope 100 according to the first embodiment includes the plurality of resonating units 12 having a spectroscopic function and the plurality of photodetectors 11 having a light receiving function, and thus splits incident light into a plurality of wavelengths. The intensity can be detected. In addition, since the photodetector 11 and the resonating unit 12 are disposed adjacent to each other, a space corresponding to the space between the dispersive element and the light receiving unit in the conventional dispersive spectroscope is not required, and thus the size can be reduced.
　［第２実施例］
　図２（ａ）は、第２実施例に係る分光器２００の構成を示す。光Ｌは、第１実施例と同様に、特定の方向の光のみを含む光として分光器２００へ入射する。 [Second Embodiment]
FIG. 2A shows the configuration of the spectroscope 200 according to the second embodiment. Similar to the first embodiment, the light L enters the spectroscope 200 as light including only light in a specific direction.
　分光器２００は、複数の受光素子２０が並べて配置されてなる。具体的には、図２（ａ）に示すように、複数の受光素子２０はＹ方向に並べてアレイ状に配置される。より詳細には、複数の受光素子２０は、Ｘ方向における厚さが厚い受光素子２０から薄い受光素子２０の順に、光の入射方向であるＸ方向と交差するＹ方向に並べて配置される。受光素子２０をＸ方向に見た形状、即ち断面形状は矩形である。 The spectroscope 200 includes a plurality of light receiving elements 20 arranged side by side. Specifically, as shown in FIG. 2A, the plurality of light receiving elements 20 are arranged in an array in the Y direction. More specifically, the plurality of light receiving elements 20 are arranged in the Y direction intersecting with the X direction, which is the light incident direction, in the order from the light receiving element 20 having a large thickness in the X direction to the thin light receiving element 20. The shape of the light receiving element 20 viewed in the X direction, that is, the cross-sectional shape is rectangular.
　図２（ａ）における分光器２００の一部２０ｘを拡大したものを図２（ｂ）に示す。図２（ｂ）は、分光器２００を構成する受光素子２０の３段分の部分を拡大したものである。１つの受光素子２０は、フォトディテクタ２１と、第１の共振部２２１と、第２の共振部２２２とを備える。フォトディテクタ２１は、第１の共振部２２１と第２の共振部２２２との間に配置される。 FIG. 2B shows an enlarged view of a part 20x of the spectroscope 200 in FIG. FIG. 2B is an enlarged view of the three-stage portion of the light receiving element 20 constituting the spectroscope 200. One light receiving element 20 includes a photodetector 21, a first resonance unit 221, and a second resonance unit 222. The photodetector 21 is disposed between the first resonance unit 221 and the second resonance unit 222.
　図２（ｂ）において、３つの受光素子２０に含まれる第１の共振部２２１をそれぞれ共振部２２１ｐ～２２１ｒとし、第２の共振部２２２をそれぞれ共振部２２２ｐ～２２２ｒとする。共振部２２１ｐ～２２１ｒ、及び、２２２ｐ～２２２ｒは、光の入射方向であるＸ方向における長さ、即ち、光路長が異なっている。受光素子２０の共振部２２１及び２２２が選択する光の波長は、第１の共振部２２１と、フォトディテクタ２１と、第２の共振部２２２との長さ（光路長）の合計により決まり、それぞれλｐ、λｑ、λｒとなっている。このように、フォトディテクタ２１と、異なる共振波長λを有する共振部２２１及び２２２とを備える複数の受光素子２０が並べて隣接配置されることにより分光器２００が構成されている。 In FIG. 2B, the first resonance parts 221 included in the three light receiving elements 20 are the resonance parts 221p to 221r, respectively, and the second resonance part 222 is the resonance parts 222p to 222r, respectively. The resonating units 221p to 221r and 222p to 222r have different lengths in the X direction, that is, the light incident direction, that is, optical path lengths. The wavelength of light selected by the resonance units 221 and 222 of the light receiving element 20 is determined by the sum of the lengths (optical path lengths) of the first resonance unit 221, the photodetector 21, and the second resonance unit 222. , Λq, λr. Thus, the spectroscope 200 is configured by arranging a plurality of light receiving elements 20 including the photodetector 21 and the resonating units 221 and 222 having different resonance wavelengths λ side by side.
　分光器２００は、分光機能と受光機能とを併せ持っている。即ち、各受光素子２０のフォトディテクタ２１は受光部として機能する。複数の隣接配置された共振部２２１及び２２２は分光機能を発揮する。即ち、入射する光Ｌは、第１の共振部２２１を透過し、フォトディテクタ２１を透過し、第２の共振部２２２に入射する。各共振部２２１及び２２２では、各々の光路長に応じた波長の光を選択してフォトディテクタ２１に供給する。共振波長の異なる複数の共振部２２１及び２２２が異なる波長の光を選択することにより、分光器２００の複数の共振部２２１及び２２２は分光機能を実現する。 The spectroscope 200 has both a spectroscopic function and a light receiving function. That is, the photodetector 21 of each light receiving element 20 functions as a light receiving unit. A plurality of adjacently arranged resonating portions 221 and 222 exhibit a spectral function. That is, the incident light L passes through the first resonating unit 221, passes through the photodetector 21, and enters the second resonating unit 222. In each of the resonating units 221 and 222, light having a wavelength corresponding to each optical path length is selected and supplied to the photodetector 21. The plurality of resonance units 221 and 222 of the spectroscope 200 realize a spectral function by selecting light of different wavelengths by the plurality of resonance units 221 and 222 having different resonance wavelengths.
　共振器２２１及び２２２の構成を図２（ｃ）に示す。共振器２２１は、対向配置された一対の半反射層２３と、それらに挟まれた誘電体層２４とを一体化してなる。共振器２２２は、半反射層２３と、誘電体層２４と、全反射層２５とを一体化してなる。半反射層２３と全反射層２５は対向配置される。第１の共振器２２１及びフォトディテクタ２１を透過した光Ｌは、第２の共振器２２２の全反射層１５で反射されて再びフォトディテクタ２１及び第２の共振器２２１へと戻る。こうして、受光素子２０の受光面側の半反射層１３と全反射層１５との間で反射を繰り返した光は、受光素子２０の光路長に依存する波長の光であり、これがフォトディテクタ２１に入射する。フォトディテクタ２１は、入射した光の強度を電気信号として出力する。　 The configuration of the resonators 221 and 222 is shown in FIG. The resonator 221 is formed by integrating a pair of opposed semi-reflective layers 23 and a dielectric layer 24 sandwiched therebetween. The resonator 222 is formed by integrating the semi-reflective layer 23, the dielectric layer 24, and the total reflection layer 25. The semi-reflective layer 23 and the total reflective layer 25 are disposed to face each other. The light L that has passed through the first resonator 221 and the photodetector 21 is reflected by the total reflection layer 15 of the second resonator 222 and returns to the photodetector 21 and the second resonator 221 again. Thus, the light repeatedly reflected between the semi-reflective layer 13 and the total reflection layer 15 on the light receiving surface side of the light receiving element 20 is light having a wavelength that depends on the optical path length of the light receiving element 20, and is incident on the photodetector 21. To do. The photodetector 21 outputs the intensity of incident light as an electrical signal. *
　このように、第２実施例の分光器２００は、分光機能を有する複数の共振部２２１、２２２と、受光機能を有する複数のフォトディテクタ２１とを備えるので、入射する光を複数の波長に分光してその強度を検出することができる。また、フォトディテクタ２１と共振部２２１、２２２とは隣接配置されるので、従来の分散型分光器における分散素子と受光部の間のスペースに相当するスペースを必要としないため、小型化が可能となる。 As described above, the spectroscope 200 according to the second embodiment includes the plurality of resonating units 221 and 222 having a spectroscopic function and the plurality of photodetectors 21 having a light receiving function, and thus splits incident light into a plurality of wavelengths. The intensity can be detected. Further, since the photodetector 21 and the resonating units 221 and 222 are disposed adjacent to each other, a space corresponding to the space between the dispersive element and the light receiving unit in the conventional dispersive spectroscope is not required, and thus the size can be reduced. .
　［第３実施例］
　図３（ａ）は、第３実施例に係る分光器３００の構成を示す。光Ｌは、第１実施例と同様に、特定の方向の光のみを含む光として分光器３００へ入射する。 [Third embodiment]
FIG. 3A shows a configuration of a spectrometer 300 according to the third embodiment. Similar to the first embodiment, the light L enters the spectroscope 300 as light including only light in a specific direction.
　分光器３００は、複数の受光素子３０が並べて配置されてなる。具体的には、図３（ａ）に示すように、複数の受光素子３０はＹ方向に並べてアレイ状に配置される。より詳細には、複数の受光素子３０は、Ｘ方向における厚さが厚い受光素子３０から薄い受光素子３０の順に、光の入射方向であるＸ方向と交差するＹ方向に並べて配置される。受光素子３０をＸ方向に見た形状、即ち断面形状は矩形である。 The spectroscope 300 includes a plurality of light receiving elements 30 arranged side by side. Specifically, as shown in FIG. 3A, the plurality of light receiving elements 30 are arranged in an array in the Y direction. More specifically, the plurality of light receiving elements 30 are arranged in the Y direction intersecting with the X direction which is the incident direction of light in the order of the light receiving elements 30 having a large thickness in the X direction to the thin light receiving elements 30. The shape of the light receiving element 30 viewed in the X direction, that is, the cross-sectional shape is rectangular.
　図３（ａ）における分光器３００の一部３０ｘを拡大したものを図３（ｂ）に示す。図３（ｂ）は、分光器３００を構成する受光素子３０の３段分の部分を拡大したものである。１つの受光素子３０は、フォトディテクタ３１と、共振部３２とを備える。図３（ｂ）において、３つの受光素子３０に含まれる共振部３２をそれぞれ共振部３２ｐ～３２ｒとする。共振部３２ｐ～３２ｒは、光の入射方向であるＸ方向における長さ、即ち、光路長が異なっており、それにより共振波長λが異なっている。共振部３２ｐ～３２ｒの共振波長はそれぞれλｐ、λｑ、λｒとなっている。このように、フォトディテクタ３１と、異なる共振波長λを有する共振部３２とを備える複数の受光素子３０が並べて隣接配置されることにより分光器３００が構成されている。 3B is an enlarged view of a part 30x of the spectroscope 300 in FIG. FIG. 3B is an enlarged view of the three-stage portion of the light receiving element 30 constituting the spectroscope 300. One light receiving element 30 includes a photodetector 31 and a resonating unit 32. In FIG. 3B, the resonating parts 32 included in the three light receiving elements 30 are designated as resonating parts 32p to 32r, respectively. The resonating portions 32p to 32r have different lengths in the X direction, that is, the light incident direction, that is, the optical path lengths, and thus have different resonance wavelengths λ. The resonance wavelengths of the resonance parts 32p to 32r are λp, λq, and λr, respectively. As described above, the spectroscope 300 is configured by arranging a plurality of light receiving elements 30 including the photodetector 31 and the resonating units 32 having different resonance wavelengths λ side by side.
　分光器３００は、分光機能と受光機能とを併せ持っている。即ち、各受光素子３０のフォトディテクタ３１は受光部として機能する。複数の隣接配置された共振部３２は分光機能を発揮する。入射する光Ｌは、共振波長の異なる複数の共振部３２に入射する。各共振部３２では、各々の光路長に応じた波長の光を選択してフォトディテクタ３１に供給する。共振波長の異なる複数の共振部３２が異なる波長の光を選択することにより、分光器３００の複数の共振部３２は分光機能を実現する。 The spectroscope 300 has both a spectroscopic function and a light receiving function. That is, the photodetector 31 of each light receiving element 30 functions as a light receiving unit. A plurality of adjacently arranged resonating parts 32 exhibit a spectral function. The incident light L is incident on a plurality of resonance portions 32 having different resonance wavelengths. In each resonance part 32, the light of a wavelength according to each optical path length is selected and supplied to the photodetector 31. The plurality of resonating units 32 of the spectroscope 300 realize a spectroscopic function by the light having different wavelengths selected by the plurality of resonating units 32 having different resonance wavelengths.
　１つの共振器３２の構成を図３（ｃ）に示す。共振器３２は、対向配置された２つの半反射層３３と、その間に挟まれた誘電体層３４とを一体化してなる。共振部３２に入射した光Ｌは、半反射層３３を透過して誘電体層３４を進み、半反射層３３で反射されて再び誘電体層３４を通過して半反射層３３へ戻る。こうして、一対の半反射層３３の間で反射を繰り返した光は、共振部３２の光路長に依存する波長の光であり、これが半透過層３３を透過してフォトディテクタ３１に入射する。フォトディテクタ３１は、入射した光の強度を電気信号として出力する。 The configuration of one resonator 32 is shown in FIG. The resonator 32 is formed by integrating two semi-reflective layers 33 arranged opposite to each other and a dielectric layer 34 sandwiched therebetween. The light L incident on the resonating unit 32 passes through the semi-reflective layer 33, travels through the dielectric layer 34, is reflected by the semi-reflective layer 33, passes through the dielectric layer 34 again, and returns to the semi-reflective layer 33. Thus, the light that is repeatedly reflected between the pair of semi-reflective layers 33 is light having a wavelength that depends on the optical path length of the resonating unit 32, and is transmitted through the semi-transmissive layer 33 and incident on the photodetector 31. The photodetector 31 outputs the intensity of incident light as an electrical signal.
　このように、第３実施例の分光器３００は、分光機能を有する複数の共振部３２と、受光機能を有する複数のフォトディテクタ３１とを備えるので、入射する光を複数の波長に分光してその強度を検出することができる。また、フォトディテクタ３１と共振部３２とは隣接配置されるので、従来の分散型分光器における分散素子と受光部の間のスペースに相当するスペースを必要としないため、小型化が可能となる。 As described above, the spectroscope 300 according to the third embodiment includes the plurality of resonating units 32 having a spectroscopic function and the plurality of photodetectors 31 having a light receiving function, and thus splits incident light into a plurality of wavelengths. The intensity can be detected. In addition, since the photodetector 31 and the resonating unit 32 are disposed adjacent to each other, a space corresponding to the space between the dispersive element and the light receiving unit in the conventional dispersive spectroscope is not required, so that the size can be reduced.
　本発明は、赤外線や可視光等を分光する分光法を利用した測定機器など利用可能である。 The present invention can be used for a measuring instrument using a spectroscopic method for spectrally separating infrared light, visible light, or the like.
　１０、２０、３０　受光素子
　１１、２１、３１　フォトディテクタ
　１２、３２、２２１、２２２　共振部
　１３、２３、３３　半反射層
　１４、２４、３４　誘電体層
　１５、２５　全反射層 10, 20, 30 Photodetector 11, 21, 31 Photo detector 12, 32, 221, 222 Resonator 13, 23, 33 Semi-reflective layer 14, 24, 34 Dielectric layer 15, 25 Total reflective layer

Claims (6)

  1. 　複数の受光素子を備え、
    　前記受光素子の各々は共振部を備え、
    　複数の前記共振部は、互いに異なる波長で共振することを特徴とする分光器。     A plurality of light receiving elements,
    Each of the light receiving elements includes a resonance part,
    A plurality of the resonating units resonate at different wavelengths from each other.
  2. 　前記受光素子の各々はフォトディテクタを備え、
    　前記共振部の各々は、対向配置された半反射層及び全反射層を備え、
    　前記フォトディテクタは、前記共振部に対して前記受光素子の受光面側に配置されることを特徴とする請求項１に記載の分光器。     Each of the light receiving elements includes a photodetector,
    Each of the resonating parts includes a semi-reflective layer and a total reflective layer arranged to face each other,
    The spectroscope according to claim 1, wherein the photodetector is disposed on a light receiving surface side of the light receiving element with respect to the resonance unit.
  3. 　前記受光素子の各々はフォトディテクタを備え、
    　前記共振部の各々は、対向配置された一対の半反射層を備え、
    　前記フォトディテクタは、前記共振部に対して前記受光素子の受光面側と逆側に配置されることを特徴とする請求項１に記載の分光器。     Each of the light receiving elements includes a photodetector,
    Each of the resonating parts includes a pair of semi-reflective layers arranged to face each other.
    The spectroscope according to claim 1, wherein the photodetector is disposed on a side opposite to a light receiving surface side of the light receiving element with respect to the resonance unit.
  4. 　前記共振部の各々は、第１の共振部と第２の共振部とを備え、
    　前記受光素子の各々は、前記第１の共振部と前記第２の共振部との間に配置されたフォトディテクタを備えることを特徴とする請求項１に記載の分光器。     Each of the resonance parts includes a first resonance part and a second resonance part,
    2. The spectroscope according to claim 1, wherein each of the light receiving elements includes a photodetector disposed between the first resonance unit and the second resonance unit.
  5. 　前記第１の共振部は対向配置された一対の半反射層を備え、前記第２の共振部は対向配置された半反射層及び全反射層を備えることを特徴とする請求項４に記載の分光器。 The said 1st resonance part is equipped with a pair of semi-reflective layer arrange | positioned facing, The said 2nd resonance part is provided with the semi-reflection layer and total reflection layer which were arrange | positioned facing each other. Spectroscope.
  6. 　前記複数の受光素子は、光の入射方向における厚さが厚い受光素子から薄い受光素子の順に、前記入射方向と交差する方向に並べて配置されることを特徴とする請求項１乃至５のいずれか一項に記載の分光器。 The plurality of light receiving elements are arranged side by side in a direction intersecting the incident direction in order from a light receiving element having a large thickness in a light incident direction to a thin light receiving element. The spectroscope according to one item.
PCT/JP2012/075208 2012-09-28 2012-09-28 Spectroscope WO2014049861A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5339784A (en) * 1976-09-23 1978-04-11 Ibm Spectrophotometer
JPS62267624A (en) * 1986-05-15 1987-11-20 Minolta Camera Co Ltd Spectrometric sensor
US6380531B1 (en) * 1998-12-04 2002-04-30 The Board Of Trustees Of The Leland Stanford Junior University Wavelength tunable narrow linewidth resonant cavity light detectors
JP2010520615A (en) * 2007-03-01 2010-06-10 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Photodetector device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5339784A (en) * 1976-09-23 1978-04-11 Ibm Spectrophotometer
JPS62267624A (en) * 1986-05-15 1987-11-20 Minolta Camera Co Ltd Spectrometric sensor
US6380531B1 (en) * 1998-12-04 2002-04-30 The Board Of Trustees Of The Leland Stanford Junior University Wavelength tunable narrow linewidth resonant cavity light detectors
JP2010520615A (en) * 2007-03-01 2010-06-10 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Photodetector device

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