WO2014025881A3 - A polymer-based microfluidic resistive sensor for detecting distributed loads, methods, and processes for fabricating the same - Google Patents

A polymer-based microfluidic resistive sensor for detecting distributed loads, methods, and processes for fabricating the same Download PDF

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Publication number
WO2014025881A3
WO2014025881A3 PCT/US2013/053941 US2013053941W WO2014025881A3 WO 2014025881 A3 WO2014025881 A3 WO 2014025881A3 US 2013053941 W US2013053941 W US 2013053941W WO 2014025881 A3 WO2014025881 A3 WO 2014025881A3
Authority
WO
WIPO (PCT)
Prior art keywords
polymer
fabricating
processes
methods
distributed loads
Prior art date
Application number
PCT/US2013/053941
Other languages
French (fr)
Other versions
WO2014025881A2 (en
Inventor
Julie HAO (Zhili)
Ali Beskok
Peng Cheng
Wenting GU
Arindam Ghosh
Boxiong LIAO
Yuxi LIAO
Original Assignee
Old Dominion University Reasearch Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Old Dominion University Reasearch Foundation filed Critical Old Dominion University Reasearch Foundation
Publication of WO2014025881A2 publication Critical patent/WO2014025881A2/en
Publication of WO2014025881A3 publication Critical patent/WO2014025881A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/126—Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/0085—Manufacture of substrate-free structures using moulds and master templates, e.g. for hot-embossing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/205—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using distributed sensing elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/225—Measuring circuits therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0292—Sensors not provided for in B81B2201/0207 - B81B2201/0285
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/03—Processes for manufacturing substrate-free structures
    • B81C2201/034—Moulding

Abstract

A device, method, and process for fabricating a sensor comprising a polymer-based microfluidic sensing platform for detecting distributed loads. The sensing platform comprises a polymer microstructure; and an electrolyte-enabled distributed transducer. The electrolyte-enabled distributed transducer comprises: a microchannel formed in the unitary polymer microstructure configured to hold an electrolyte; and an electrode underneath the microchannel. The microfluidic sensing platform is configured to detect distributed loads at the micron-millimeter scale.
PCT/US2013/053941 2012-08-07 2013-08-07 A polymer-based microfluidic resistive sensor for detecting distributed loads, methods, and processes for fabricating the same WO2014025881A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261680500P 2012-08-07 2012-08-07
US61/680,500 2012-08-07

Publications (2)

Publication Number Publication Date
WO2014025881A2 WO2014025881A2 (en) 2014-02-13
WO2014025881A3 true WO2014025881A3 (en) 2014-04-03

Family

ID=50068698

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2013/053941 WO2014025881A2 (en) 2012-08-07 2013-08-07 A polymer-based microfluidic resistive sensor for detecting distributed loads, methods, and processes for fabricating the same

Country Status (1)

Country Link
WO (1) WO2014025881A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107144389B (en) * 2017-06-09 2022-11-25 燕山大学 Embeddable strip-shaped fully-flexible multi-dimensional force sensor

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3304528A (en) * 1965-09-29 1967-02-14 Leonard U Rastrelli Elastomeric strain gauge
US20040072357A1 (en) * 2000-12-19 2004-04-15 Matthias Stiene Device for measuring blood coagulation and method thereof
US20090007685A1 (en) * 2007-07-02 2009-01-08 The Hong Kong Polytechnic University Piezoresistive strain gauge using doped polymeric fluid
US20090242059A1 (en) * 2005-09-28 2009-10-01 Emil Kartalov Pdms microfluidic components and methods of operation of the same
US20100024572A1 (en) * 2006-07-28 2010-02-04 California Institute Of Technology Polymer nems for cell physiology and microfabricated cell positioning system for micro-biocalorimeter
US20120118066A1 (en) * 2010-11-12 2012-05-17 Majidi Carmel S Stretchable two-dimensional pressure sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3304528A (en) * 1965-09-29 1967-02-14 Leonard U Rastrelli Elastomeric strain gauge
US20040072357A1 (en) * 2000-12-19 2004-04-15 Matthias Stiene Device for measuring blood coagulation and method thereof
US20090242059A1 (en) * 2005-09-28 2009-10-01 Emil Kartalov Pdms microfluidic components and methods of operation of the same
US20100024572A1 (en) * 2006-07-28 2010-02-04 California Institute Of Technology Polymer nems for cell physiology and microfabricated cell positioning system for micro-biocalorimeter
US20090007685A1 (en) * 2007-07-02 2009-01-08 The Hong Kong Polytechnic University Piezoresistive strain gauge using doped polymeric fluid
US20120118066A1 (en) * 2010-11-12 2012-05-17 Majidi Carmel S Stretchable two-dimensional pressure sensor

Also Published As

Publication number Publication date
WO2014025881A2 (en) 2014-02-13

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