WO2014011228A1 - High speed circuit assembly with integral terminal and mating bias loading electrical connector assembly - Google Patents

High speed circuit assembly with integral terminal and mating bias loading electrical connector assembly Download PDF

Info

Publication number
WO2014011228A1
WO2014011228A1 PCT/US2013/030981 US2013030981W WO2014011228A1 WO 2014011228 A1 WO2014011228 A1 WO 2014011228A1 US 2013030981 W US2013030981 W US 2013030981W WO 2014011228 A1 WO2014011228 A1 WO 2014011228A1
Authority
WO
WIPO (PCT)
Prior art keywords
terminals
recesses
circuit
integral
contact members
Prior art date
Application number
PCT/US2013/030981
Other languages
French (fr)
Inventor
James Rathburn
Original Assignee
Hsio Technologies, Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hsio Technologies, Llc filed Critical Hsio Technologies, Llc
Priority to US14/408,039 priority Critical patent/US9350124B2/en
Publication of WO2014011228A1 publication Critical patent/WO2014011228A1/en
Priority to US14/864,215 priority patent/US10159154B2/en
Priority to US15/062,137 priority patent/US9761520B2/en
Priority to US15/698,271 priority patent/US10453789B2/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1646Characteristics of the product obtained
    • C23C18/165Multilayered product
    • C23C18/1653Two or more layers with at least one layer obtained by electroless plating and one layer obtained by electroplating
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02Electroplating of selected surface areas
    • C25D5/022Electroplating of selected surface areas using masking means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/325Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by abutting or pinching, i.e. without alloying process; mechanical auxiliary parts therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/36Assembling printed circuits with other printed circuits
    • H05K3/368Assembling printed circuits with other printed circuits parallel to each other
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4007Surface contacts, e.g. bumps
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18Pretreatment of the material to be coated
    • C23C18/1851Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18Pretreatment of the material to be coated
    • C23C18/1851Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material
    • C23C18/1872Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material by chemical pretreatment
    • C23C18/1875Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material by chemical pretreatment only one step pretreatment
    • C23C18/1879Use of metal, e.g. activation, sensitisation with noble metals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/20Details of printed circuits not provided for in H05K2201/01 - H05K2201/10
    • H05K2201/2072Anchoring, i.e. one structure gripping into another

Definitions

  • the present disclosure relates to a high density electrical interconnect between at least two components in an electronic system using a unique circuit structure fabrication technique that leverages processes used in the printed circuit and semiconductor packaging industries.
  • PCB printed circuit board
  • Flexible circuits have become very popular in many applications where the ability to bend the circuit to connect one member of a system to another has some benefit. These flexible circuits are made in a very similar fashion as rigid PCB's, where layers of circuitry and dielectric materials are laminated. The main difference is the material set used for construction. Typical flexible circuits start with a polymer film that is clad, laminated, or deposited with copper. A photolithography image with the desired circuitry geometry is printed onto the copper, and the polymer film is etched to remove the unwanted copper. Flexible circuits are very commonly used in many electronic systems such as notebook computers, medical devices, displays, handheld devices, autos, aircraft and many others.
  • Flexible circuits are processed similar to that of rigid PCB's with a series of imaging, masking, drilling, via creation, plating, and trimming steps. The resulting circuit can be bent, without damaging the copper circuitry. Flexible circuits are solderable, and can have devices attached to provide some desired function. The where the material set and design features can often provide better electrical performance than a comparable rigid circuit.
  • circuits are connected to electrical system in a variety of ways. In most cases, a portion of the circuitry is exposed to create a connection point. Once exposed, the circuitry can be connected to another circuit or component by soldering, conductive adhesive, thermo-sonic welding, pressure or a mechanical connector. In general, the terminals are located on an end of the flexible circuit, where edge traces are exposed or in some cases an area array of terminals are exposed. Often there is some sort of mechanical enhancement at or near the connection to prevent the joints from being disconnected during use or flexure.
  • Rigid PCBs and package substrates experience challenges as the feature sizes and line spacing are reduced to achieve further miniaturization and increased circuit density.
  • the use of laser ablation has become increasingly used to create the via structures for fine line or fine pitch structures.
  • the use of lasers allows localized structure creation, where the processed circuits are plated together to create via connections from one layer to another.
  • laser processed via structures can experience significant taper, carbon contamination, layer-to-layer shorting during the plating process due to registration issues, and high resistance interconnections that may be prone to result in reliability issues.
  • the challenge of making fine line PCBs often relates to the difficulty in creating very small or blind and buried vias.
  • the process used by current technology is based upon a dry film process, where a substrate of some sort has a copper layer as the base circuit layer onto which a dry film is applied.
  • the dry film is then patterned with a laser to create the circuit patterns.
  • the next copper layer is added and etched as appropriate, with the laser used to drill through the film to expose the previous copper layer so a via can be plated to join the circuit layers.
  • This process is typically used for semiconductor package substrates and larger format circuit boards, such as used in a cell phone.
  • the dry film technology is used to build fine line techniques.
  • the package substrate and the larger format circuit board build up are very expensive compared to traditional low density laminate technology, and suffer from several limitations inherent to the process.
  • the cost increases dramatically since the entire surface of the lower density base board must be processed with the build up process across the entire area, not just in the areas where the high density is required.
  • Another limitation is the reliability of the via structures joining one circuit layer to another, which tend to be a barrel plated structures with the side walls of the via plated and in many cases must be filled with a via fill material to eliminate an air pocket which may separate during solder reflow temperatures.
  • the vias require drilling through the dry film to expose the previous circuit layer in order to create the via that connects the circuit layers.
  • the dry film is applied as a solid contiguous sheet where the material on that particular layer is restricted to that particular material across the entire layer in the build up less the areas ablated to create the via target for joining the previous and subsequent circuit layers. That is, the dry layer film is homogeneous across the entire layer.
  • the present disclosure relates to a high density electrical interconnect between at least two components, such as a high density circuit to a low density PCB.
  • a high density circuit to a low density PCB.
  • the present disclosure adds a bulk conductive material to create very small low resistance terminals to increase density and reduce line and feature pitch of the circuits as well as a host of electrical enhancements that provide an electrical circuit that may prove to be superior to the traditional methods.
  • the terminal can be created with various features, including undercuts, that cannot be formed using dry film technology.
  • One embodiment is directed to a high density circuit assembly including an array of integral terminals plated on a first circuit member including an electro-lessly plated shell with an electro-plated core.
  • a printed circuit board includes a plurality of are electrically coupled with circuitry on the printed circuit board and extend into the recesses. Insertion of the integral terminals on the first circuit member into the recesses on the PCB is a zero or low insertion force process. Shifting the printed circuit board relative to the first circuit member electrically couples the integral terminals with the contact members.
  • the integral terminal can be a variety of shapes, including a non-cylindrical shape.
  • the integral terminals preferably include a plurality of discrete contact surfaces that electrically couple with the contact members on the PCB.
  • the integral terminals include a narrow portions and the contact members include arms that mechanically couple with the narrow portions on the integral terminals.
  • the terminals include at least one feature, such as an undercut, that cannot be formed using dry film technology.
  • the present disclosure is also directed to a method of making an array of integral terminals on a circuit assembly.
  • the method includes the steps of depositing at least a first liquid dielectric layer on the first surface of a first circuit member.
  • the dielectric material is imaged to create a plurality of first recesses corresponding to the array of integral terminals, via holes, and channels for circuit traces.
  • the selected surfaces of the first recesses are processed to accept electro- less conductive plating deposition.
  • Electro-lessly plating is applied to the selected surfaces of the first recesses to create a plurality of first conductive structures electrically coupled to, and extending generally perpendicular to, the first circuitry layer.
  • a plating resist is applied, followed by electro-plating to the electro-less plating to substantially fill first recesses with a conductive material.
  • the steps of depositing, processing, electro-less plating, and electro-plating are repeated to form the integral terminals of a desired shape.
  • the dielectric layers are then removed to expose the terminals.
  • a printed circuit board is prepared with a plurality of recesses configured to receive the integral terminals.
  • a plurality of contact members that are electrically coupled with circuitry on the printed circuit board are configured to extend into the recesses.
  • the integral terminals on the first circuit member are positioned in the recesses of the printed circuit board. Shifting the printed circuit board relative to the first circuit member electrically couples the integral terminals with the contact members.
  • the electrical devices can be formed using printing technology, adding intelligence to the circuit assembly.
  • the vias and associated circuit geometry can be imaged in the liquid dielectric in a variety of shapes and sizes, depending on the terminal structure on the circuit members.
  • the contact members and vias can be positioned at a variety of locations, heights, or spacing to match the parameters of existing connections making it easy to replace an existing circuit without changing hardware or the PCB.
  • the present disclosure permits the creation of blind or buried conductive structures on very tight pitch of about 25 microns or below without the use of laser ablation.
  • Figures 1A and 1 B are top and side views of a plurality of high density circuit structures combined with a low density PCB in accordance with an embodiment of the present disclosure.
  • Figure 1 C is a side view of the PCB merged with the high density circuit structures in accordance with an embodiment of the present disclosure.
  • Figure 2A is a cross-sectional view of a method of making a high density circuit structure in accordance with an embodiment of the present disclosure.
  • Figure 2B is a cross-sectional view of an alternate method of making a high density circuit structure in accordance with an embodiment of the present disclosure.
  • circuit of Figure 1 in accordance with an embodiment of the present disclosure.
  • Figure 4 illustrates application to a second circuitry layer to the high density electrical circuit of Figure 1 in accordance with an embodiment of the present disclosure.
  • Figure 5 illustrates an optional dielectric layer on the high density electrical circuit of Figure 1 in accordance with an embodiment of the present disclosure.
  • Figure 6 illustrates an optional etching step on the high density electrical circuit of Figure 1 in accordance with an embodiment of the present disclosure.
  • Figure 7 illustrates an electrical interconnect interfaced with a BGA device in accordance with an embodiment of the present disclosure.
  • Figure 8 illustrates an electrical interconnect for a flexible circuit in accordance with an embodiment of the present disclosure.
  • Figures 9A-9E illustrate a method of making a free standing integral terminal in accordance with an embodiment of the present disclosure.
  • Figures 10A and 10B illustrate a connector on a PCB configured to mate with the terminal of Figure 9E in accordance with an embodiment of the present disclosure.
  • Figures 1 1A and 1 1 B illustrate an alternate connector on a PCB configured to mate with the terminal of Figure 9E in accordance with an embodiment of the present disclosure.
  • Figure 12 illustrates another connector on a PCB configured to mate with the terminal of Figure 9E in accordance with an embodiment of the present disclosure.
  • Figure 13 illustrates an electrical interconnect for an IC package in accordance with an embodiment of the present disclosure.
  • Figure 14 illustrates an alternate electrical circuit for an IC package in accordance with an embodiment of the present disclosure.
  • Figure 15 is a side sectional view of an electrical circuit in accordance with an embodiment of the present disclosure.
  • Figure 16 is a side sectional view of an alternate electrical circuit with compliant material in accordance with an embodiment of the present disclosure.
  • Figure 17 illustrates an electrical circuit with optical features in accordance with an embodiment of the present disclosure. features in accordance with an embodiment of the present disclosure.
  • Figure 19 illustrates an alternate high density circuit structure with vias in accordance with an embodiment of the present disclosure.
  • Figure 20 illustrates an alternate high density circuit structure with printed electrical devices in accordance with an embodiment of the present disclosure.
  • Figure 21 illustrates an alternate high density electrical circuit with compliant electrical pads to plug into another connector in accordance with an embodiment of the present disclosure.
  • a high density circuit structure according to the present disclosure may permit fine contact-to-contact spacing (pitch) on the order of less than 1 .0 mm pitch, and more preferably a pitch of less than about 0.7 millimeter, and most preferably a pitch of less than about 0.4 millimeter.
  • pitch fine contact-to-contact spacing
  • Such fine pitch high density circuit structures are especially useful for communications, wireless, and memory devices.
  • the present high density circuit structure can be configured as a low cost, high signal performance electrical interconnect assembly, which has a low profile that is particularly useful for desktop and mobile PC applications.
  • IC devices can be installed and uninstalled without the need to reflow solder.
  • the solder-free electrical connection of the IC devices is environmentally friendly.
  • the high density circuit structure can also be a portion of a socket or semiconductor package.
  • Figures 1A and 1 B schematically illustrate the merger of a lower density circuit 20 with one or more high density circuits 22A, 22B, 22C, 22D ("22") into the contiguous assembly of Figure 1 C.
  • the lower density circuit 20 may be a printed circuit board, a flexible circuit, or the like.
  • the high density circuit 22 can be a printed circuit board, an IC socket, a semiconductor package, or the like.
  • Dielectric material 24 is optionally applied to the surface 26 of the low density circuit 20 so the location of the high density circuits 22 is at least partially defined and isolated.
  • the dielectric material 24 may be a film or a liquid dielectric.
  • the dielectric material 24 is imaged to expose the circuit locations 28 for the high density circuits 22, improving alignment of vias on the lower density main core 20 with the high density circuits 22.
  • the base layer can be a material such as polyimide or liquid crystal polymer. If the circuit assembly 30 is a rigid circuit board, the base can be FR4 or one of many high speed laminates or substrates. If the circuit assembly 30 is a semiconductor package, the base can be a material such as FR4, BT resin of any one of a variety of laminate or substrate materials. If the circuit assembly 30 is an electrical connector or socket, the base can be molded LCP, machined plastic, or a variety of films or substrate materials.
  • the high density circuits 22 can be made using conventional build up technology described above or using the process described below.
  • the high density circuits 22 are then merged with the low density circuit 20.
  • the high density circuits 22 can be fabricated in-situ directly on the low density circuit 20 using the processes described herein. The present method permits the high density circuits 22 to be formed directly in the circuit locations 28, without having to extend the processing across the entire low density circuit 20.
  • FIG. 2A is a side cross-sectional view of a method of making the high density electrical circuits 22 in accordance with an embodiment of the present disclosure.
  • the first step is to start with base material of some sort, such as a copper foil 32A or a core 34 of some sort to act as a support member. If the starting base is copper foil 32A, then the foil can act as the first layer circuitry or escape layer which would be the layer to be merged with the circuit locations 28 on the low density circuit 20.
  • the foil 32A can be the termination points for BGA attachment to the low density circuit 20.
  • the base 34 can also be a sacrificial member that is removed at some point later in the process to reveal the individual coupons 22.
  • copper foil circuitry layer 32A is located on reinforcing layer 34.
  • the layer 34 can be a traditional PCB or laminated to a
  • the circuitry layer 32A can be preformed or can be formed using a fine line imaging step is conducted to etch copper foil as done with many PCB processes.
  • Liquid dielectric material 36 is applied to surface 38 and flows between the regions of the circuitry 32A.
  • a dry dielectric film by contrast, does not flow into the recessed regions.
  • the dielectric layer 36 can be tack cured to partially link the polymer and allow for handling, while retaining the ability to image the material in a photolithography process.
  • the dielectric layer 36 can be processed with a laser direct imaging process known as LDI.
  • the dielectric material 36 is typically imaged to create recesses 37 that expose the desired locations 40 on circuitry layer 32A with theoretical via locations 37 created as part of the image directly in proximity to the circuitry layer 32A.
  • One benefit of imaging the dielectric layer 36 is that the via structures do not need to be round as with traditional drilled vias. Any shape that can be imaged and will result in a grown full metal via 54 of the desired shape.
  • the dielectric surface 46 can be planarized to create a very consistent dielectric thickness and planarity, as well as assist with preparing select surfaces for electro-less copper plating adhesion.
  • the dielectric layer 36 is preferably processed to promote electro-less copper plating using one or more of plasma treatment, permanganate, carbon treatment, impregnating copper nano-particles to activate the desired surfaces to promote electroplating.
  • the dielectric material 36 is processed to promote plating adhesion to the side walls 44 of the recesses 37. Electro-less copper plating is applied to the side walls 44 of the recesses 37 to create conductive structures 50, resulting in a three-dimensional landscape.
  • the conductive structure 50 is an annular-shaped via electrically coupled to the circuitry layer 32A with a center opening or recess 52.
  • a higher deposition rate electroplate copper can be used to fill the resist is stripped and the copper deposition 50, 54 is optionally planarized.
  • the resulting conductive pillars 56 include a shell 50 of electro-less conductive material and a core 54 of electro-plated conductive material.
  • a present process creates the ability to stack full metal vias 54 in subsequent deposition steps to create a high aspect ratio via without the need to drill through the entire stack 22 in one operation. Another benefit is the ability to provide a mounting point for a packaged semiconductor device where a copper pillars 54 are created as an alternative to conventional via in pad construction which can be plagued with reliability issues and high costs to manufacture.
  • the present process enhances the electroplating process is to deposit electro-less copper or copper flash to provide a bus structure for bulk copper electro plating.
  • the copper bus structure is subsequently removed with a differential etch process that leaves bulk copper 54 intact.
  • An alternate step can be employed to add multiple layers of resist 36 and continue the copper growth procedure if desired, with the resulting structures encapsulated by the next dielectric application.
  • the shape of the conductive structures 50, 54 is dictated by the shape of the recesses 37.
  • a square recess 37 results in a square-shaped conductive structure 54.
  • the plating process can be controlled to a certain degree, but in some cases with fine pitch geometries and high speed circuits, upper surfaces 46 of the dielectric 36 and the conductive structure 54 may vary in topography or height relative to the field, and the dielectric material 36 may vary in thickness slightly especially if liquid material is used. Consequently, it is preferred to planarize to surfaces 46 of the conductive structures 54 and the exposed surface 46 of the dielectric 36 between steps to control thickness and flatness of the electrical circuit 22.
  • additional foil layer 32B is applied and processed to create a circuit structure using any of the techniques discussed herein.
  • the conductive material 54 electrically couples the circuit layer 32A to the circuit layer 32B.
  • the present method permits the material between layers and within each layer to be varied.
  • One aspect of the present process that differs from the traditional dry film build up process is the nature of the dielectric deposition in liquid form.
  • the dielectric layer 36 can be applied by screen printing, stencil printing, jetting, flooding, previous circuit landscape 32A. During the development process, desired regions remain and the regions that are not desired are washed away with fine resolution of the transition regions within the landscape. Multiple depositions steps can be tack cured and imaged such that thicker sections of dielectric 36 can be developed and washed away in one or multiple strip operations. As a result, internal cavities or mass regions can be excavated and subsequently filled at the next dielectric layer with materials that have physical properties differing from the base dielectric 36.
  • the excavated regions can be filled or treated with materials that have a different dielectric constant, vary in conductive or mechanical or thermal properties to achieve a desired performance function not possible with a contiguous dry film technique.
  • the present process not only provides the ability to alter the material set and associated properties in a given layer, but the material set can be altered at any given point within a given deposition or layer.
  • the present process can also be used in combination with existing dry film techniques.
  • one or more of the layers can be a preformed dielectric film to leave air dielectric gaps between traces.
  • Recesses 37 in the dielectric layer 36 that expose circuitry 32A can be formed by printing, embossing, imprinting, laser cutting, chemical etching with a printed mask, or a variety of other techniques.
  • Figure 2B illustrates an alternate high density electrical circuit 22 in accordance with an embodiment of the present disclosure.
  • the process is the same as discussed in connection with Figure 2A, except that the sidewalls 44 of the dielectric material 36 are not processed to receive electro-less plating. Rather, a bulk conductive material 42 is applied directly to exposed portions 40 of the circuit layer 32A.
  • the surface 46 is preferably planarized and the circuit layer 32B is applied using any of the techniques disclosed herein.
  • Figure 3 illustrates higher aspect ratio conductive pillar 60 formed on the electrical circuit 22 without the foil layer 32B.
  • the process discussed above is repeated by applying another layer 62 of liquid dielectric 36 that is imaged to created recesses 64 that expose the upper surface 66 of the copper pillar 42.
  • the upper surfaces 66 of the copper pillars 42 are then plated as discussed above to create conductive extension 68 of the copper pillar 42.
  • the conductive extensions 68 are planarized to permit die attach point 70 to facilitate flip chip attach of the die 72 to the conductive extensions enlarged to facilitate soldering of the die 72 to the conductive extensions 68.
  • Figure 4 illustrates circuitry layer 80 is applied to the top surface 78 of the electrical circuit 22 and coupled to the conductive extensions 68.
  • the circuitry layer 80 creates the base for additional routing layers and to facilitate vertical connection to subsequent layers in the stack in accordance with an alternate embodiment of the present disclosure.
  • FIG. 5 illustrates liquid dielectric layer 90 added to the subsequent circuitry layer 80 in accordance with an alternate embodiment of the present disclosure.
  • the liquid dielectric layer 90 is imaged to create recesses 92 that expose portions 94 of the circuitry layer 80 that corresponds with the via extensions 68.
  • the dielectric layer 90 protects the portions of the circuitry layers 80 that are not to be etched and provides access to the foil intimate to the conductive structures 42 and 68.
  • the extension 68 is optionally conductive structure 50 with a core 54 of conductive or non-conductive material.
  • Figure 6 illustrates a subsequent etch process that removes the copper foil 94 (see Figure 5) located in the recesses 92 to allow access for the next plating step to join the layers together in accordance with an alternate embodiment of the present disclosure.
  • the resist layer 90 can be stripped to provide a level to be planarized as the base of further processing or the resist layer 90 can be left in place provided it is of the proper material type.
  • the exposed regions that provided access for etch and plating can be filled with similar material to seal the layer which can be planarized for further processing if desired.
  • FIG. 7 illustrates one possible variation of the electrical circuit 22.
  • Recesses 92 are filled with a dielectric material 96 and the surface 98 is planarized to receive circuitry plane 100.
  • Liquid dielectric layer 102 is deposited on the circuitry plane 100 and imaged to expose selective regions 104.
  • the selective regions 104 are configured to correspond to solder balls 120 on BGA device 122.
  • bottom dielectric layer 106 is optionally deposited on circuitry layer 52 in a manner to expose selective regions 108.
  • the electrical circuit 22 is further processed with conventional circuit fabrication processes to create larger diameter through vias or device termination locations 104, 108, laser direct imaging, legend application etc.
  • the via 1 10 is formed using electro-less plating of each layer of the stack, as illustrated in Figure 6.
  • Figure 8 illustrate an alternate embodiment in which the electrical circuit 22 is used in a flexible circuit applications.
  • the electrical circuit 22 is laminated with ground planes and cover layers 1 12, 1 14.
  • the insulating layers 112, 1 14 are applied by jet printing of polyimide or liquid crystal polymers (LCP) inks as a final layer or as a combination of laminated film and jetted material.
  • LCP liquid crystal polymers
  • Figures 9A-9E illustrate an embodiment in which the electrical circuit 22 is enhanced by selectively plating terminals 130 (see Figure 9E) to traces or target pads 132 in accordance with an embodiment of the present disclosure.
  • the electrical circuit 22 is processed with an imageable or ablateable plating resist 134A in order to keep the target pad 132 of base copper exposed.
  • the resist 134 is a liquid material that is imaged to expose the target pad 132, as discussed herein.
  • Another layer 134B of liquid plating resist is added and exposed.
  • the target pad 132 is plated with copper 136 to build up the terminal 130.
  • Additional liquid resist layers 134C ( Figure 9C) and further copper plating form a neck portion 131 of the terminal 130.
  • a final resist layer 134D ( Figure 9D) is added and further copper 136 is plated onto the terminal 130.
  • Multiple layers of resist 134 can be built up and a variety of terminal shapes can be created as a function of the resist thickness and the shape of the target opening where plating is deposited to the previous target layer while not depositing onto the resist.
  • the resist layers 134 are stripped as a mass or congruous material set as illustrated in Figure 9E.
  • the built-up or free standing integral terminal 130 is left as part of the circuit assembly 22.
  • the free standing post or terminal 130 includes a plurality of contact surfaces or facets 138A, 138B, 138C, 138D, 138E ("138") that can potentially electrically couple with the PCB 20 (see Figure 1 A).
  • Neck portion 131 provides an undercut that cannot be formed using dry film technology.
  • the terminals 130 can be a variety of shapes to facilitate engagement with the PCB 20, such as for example, cylindrical or non-cylindrical, regular or irregular, symmetrical or asymmetrical, rectangular, curvilinear, and the like.
  • the layers 134 typically not possible to make using conventional molding or machining techniques, referred to herein as a "non-moldable feature.”
  • terminal 130 can be constructed of solder.
  • the shape of the terminal 130 can form a connection to a mating connector with contact members shaped in such a way that the terminals can be biased or engaged to create a mechanical and electrical connection, in some cases in a self retained fashion and in other cases with the assistance of an external loading or load maintaining mechanism to enable long term connection.
  • Figures 10A and 10B illustrate side and top views of a mating connector 140 on PCB 20 configured to engage with the terminal 130 in accordance with an embodiment of the present disclosure.
  • the circuit stack for the PCB 20 is preferably constructed using the techniques discussed herein.
  • Contact members 142 are attached to surface 144 of the PCB 20 and electrically coupled to via 146.
  • the contact members 142 cantilever over a portion of recesses 148 that are sized to receive the terminals 130. As best illustrated in Figure 10B, diameters 150 of exposed portions 152 of the recesses 148 are greater than diameters 154 of the terminals 130.
  • the terminals 130 are aligned with the exposed portions 152 and inserted.
  • the circuit assembly 22 By shifting the circuit assembly 22 in direction 156, one or more of the surfaces 138A, 138B, or 138C electrically couple with the contact members 142.
  • multiple surfaces 138 engage with the contact members 142.
  • the contact members 142 are part of a preformed circuit structure that is laminated onto the surface 144. Unwanted portions of the copper circuit structures is then etched away.
  • the recesses 148 are temporarily filled with a solder mask and the contact members 142 are imaged in the locations shown. The solder mask is then removed to reveal the recesses 148 and the cantilevered contact members 142.
  • Contact members 162 are attached to the PCB 20 and electrically coupled to via 164.
  • the contact members 162 cantilever over a portion of elongated recesses 168 that are sized to receive the terminals 130.
  • the circuit member 22 is removed to expose the terminals 130. Diameters 170 of the exposed portions 172 of the recesses 168 are greater than diameters 154 of the terminals 130.
  • the terminals 130 are aligned with the exposed portions 172 and inserted.
  • the circuit assembly 22 By shifting the circuit assembly 22 in direction 176, one or more of the surfaces 138A, 138B, or 138C (see Figure 10A) electrically couple with the contact members 162.
  • Arms 178 of the contact members 162 preferably extend around slightly less than 180 degrees of the terminal 130 to maximize contact surface area.
  • the arms 178 preferably contact wrap around at least 120 degrees and preferably at least 150 degrees of the terminals 130. In another embodiment, the arms 178 contact the terminals 130 in at least two locations.
  • the shapes and patterns of the contact members 142, 162 can be created, with contacts inserted discretely as individual members or blanked or etched from sheet or strip material to enable in-situ creation of the contact field, with shapes complimentary to the terminal shape for reliable low force engagement.
  • Figure 12 illustrates an array of contact members 180 with compliant arms 182 on a PCB 20 that provide self-retention or snap-fit engagement with the terminals 130 in accordance with an embodiment of the present disclosure.
  • the contacts can be stamped and formed from a variety of resilient conductive materials.
  • the electrical circuit 22 is removed to expose the terminals 130.
  • the surfaces 138B of the neck portion 131 (see Figure 10A) of the terminals 130 are positioned to engage with the arms 182.
  • the terminals 130 are shifted in direction 184 the arms 182 flex outward. Once the terminal 130 is in region 186 it is trapped by the resilient force of the compliant arms 182.
  • Figure 13 illustrates an electrical circuit 22 for semiconductor packaging applications in accordance with an embodiment of the present disclosure.
  • the stack 190 can be final processed with a variety of options to facilitate electrical connections to IC devices 192A, 192B, 192C and to system level attachment to PCB 20. to the structure directly (see e.g. , Figure 2) or to receive BGA device 192A.
  • plating 194B is extended to facilitate direct soldering of IC device die 192B with paste.
  • plating 194C is wire bonded 196 to the IC device 192C.
  • the low density main core 20 can be processed to accept a traditional ball grid array attachment 198 for an area array configuration or plated with solder/tin etc. for a no lead peripheral termination.
  • the low density main core 20 can also be fashioned to have plating or post extensions 194D to facilitate direct solder attach with paste and provide a natural standoff from the PCB 20.
  • Figure 14 illustrates an electrical circuit 22 for a semiconductor packages 202 with dielectric materials 204 surrounding the conductive structures 206 in accordance with an embodiment of the present disclosure.
  • Internal circuits and terminations may also be added by imaging or drilling the core material with a larger opening than needed and filling those openings with liquid dielectric and imaging the desired geometry to facilitate conductive structure formation.
  • Figure 15 illustrates an alternate electrical circuit 230 with an insulating layer 232 applied to the circuit geometry 234.
  • the nature of the application and imaging of the liquid dielectric layer 232 leaves selected portions 236 of the circuit geometry 234 expose if desired.
  • the resulting high density electrical circuit 230 can potentially be considered entirely "green” with limited or no chemistry used to produce beyond the direct write materials.
  • the dielectric layers of the present disclosure may be constructed of any of a number of dielectric materials that are currently used to make sockets, semiconductor packaging, and printed circuit boards. Examples may include UV stabilized tetrafunctional epoxy resin systems referred to as Flame Retardant 4 (FR- 4); bismaleimide-triazine thermoset epoxy resins referred to as BT-Epoxy or BT Resin; and liquid crystal polymers (LCPs), which are polyester polymers that are extremely unreactive, inert and resistant to fire. Other suitable plastics include phenolics, polyesters, and Ryton® available from Phillips Petroleum Company.
  • one or more of the dielectric materials are designed to provide electrostatic dissipation or to reduce cross-talk between the traces of the circuit geometry.
  • An efficient way to prevent electrostatic discharge (“ESD”) is to construct one of the layers from materials that are not too conductive but that will values in the range of 10" to 10 " Ohm-meters.
  • Figure 16 illustrates an alternate high density electrical circuit 250 in accordance with an embodiment of the present disclosure.
  • Liquid dielectric layer 252 is imaged to include openings 254 into which compliant material 256 is deposited before formation of circuit geometry 258.
  • the compliant material 256 improves reliability during flexure of the electrical circuit 250.
  • Figure 17 illustrates an alternate high density electrical circuit 260 in accordance with an embodiment of the present disclosure.
  • Optical fibers 262 are located between layers 264, 266 of dielectric material.
  • optical fibers 262 are positioned over compliant layer 268, and dielectric layer 270 is deposited over and around the optical fibers 262.
  • a compliant layer 272 is preferably applied above the optical fiber 262 as well.
  • the compliant layers 268, 272 support the optical fibers 262 during flexure.
  • the dielectric layer 270 is formed or printed with recesses into which the optical fibers 262 are deposited.
  • optical quality materials 274 are deposited during formation of the high density electrical circuit 260.
  • the optical quality material 274 and/or the optical fibers 262 comprise optical circuit geometries.
  • the metalization process allows for deposition of coatings in-situ that enhances the optical transmission or reduces loss.
  • the precision of the metalization process reduces misalignment issues when the optical materials 274 are optically coupled with another optical structure.
  • Figure 18 illustrates another embodiment of a present high density electrical circuit 280 in accordance with an embodiment of the present disclosure.
  • Embedded coaxial RF circuits 282 or printed micro strip RF circuits 284 are located with dielectric/metal layers 286. These RF circuits 282, 284 are preferably created by imaged liquid dielectrics and metallization geometry.
  • the application and imaging of the liquid dielectric layers 296 creates recesses 298 that control the location, cross section, material content, and aspect ratio of the conductive traces 292 and the conductive pillars 294. Maintaining the greater provides greater signal integrity than traditional subtractive trace forming technologies. For example, traditional methods take a sheet of a given thickness and etches the material between the traces away to have a resultant trace that is usually wider than it is thick. The etching process also removes more material at the top surface of the trace than at the bottom, leaving a trace with a trapezoidal cross- sectional shape, degrading signal integrity in some applications. Using the recesses 298 to control the aspect ratio of the conductive traces 292 and the conductive pillars 294 results in a more rectangular or square cross-section, with the corresponding improvement in signal integrity.
  • pre-patterned or pre-etched thin conductive foil circuit traces are transferred to the recesses 298.
  • a pressure sensitive adhesive can be used to retain the copper foil circuit traces in the recesses 298.
  • the trapezoidal cross-sections of the pre-formed conductive foil traces are then post- plated.
  • the plating material fills the open spaces in the recesses 298 not occupied by the foil circuit geometry, resulting in a substantially rectangular or square cross- sectional shape corresponding to the shape of the recesses 298.
  • a thin conductive foil is pressed into the recesses 298, and the edges of the recesses 298 acts to cut or shear the conductive foil.
  • the process locates a portion of the conductive foil in the recesses 298, but leaves the negative pattern of the conductive foil not wanted outside and above the recesses 298 for easy removal.
  • the foil in the recesses 298 is preferably post plated to add material to increase the thickness of the conductive traces 292 in the circuit geometry and to fill any voids left between the conductive foil and the recesses 298.
  • Figure 20 illustrates a high density electrical circuit 300 with printed electrical devices 302.
  • the electrical devices 302 can include passive or active functional elements. Passive structure refers to a structure having a desired electrical, magnetic, or other property, including but not limited to a conductor, resistor, capacitor, inductor, insulator, dielectric, suppressor, filter, varistor, ferromagnet, and the like.
  • electrical devices 302 include printed LED indicator 304 and display electronics 306. Geometries can also be printed to provide capacitive coupling 308. Compliant material can be added between circuit geometry, such as discussed above, so the present electrical circuit compliance within the connector.
  • the electrical devices 302 are preferably printed during construction of the circuit assembly 300.
  • the electrical devices 302 can be ground planes, power planes, electrical connections to other circuit members, dielectric layers, conductive traces, transistors, capacitors, resistors, RF antennae, shielding, filters, signal or power altering and enhancing devices, memory devices, embedded IC, and the like.
  • the electrical devices 302 can be formed using printing technology, adding intelligence to the high density electrical circuit 300.
  • Features that are typically located on other circuit members can be incorporated into the circuit 300 in accordance with an embodiment of the present disclosure.
  • the electrical devices 302 can also be created by aerosol printing, such as disclosed in U.S. Patent Nos. 7,674,671 (Renn et al.); 7,658,163 (Renn et al.); 7,485,345 (Renn et al.); 7,045,015 (Renn et al.); and 6,823,124 (Renn et al.), which are hereby incorporated by reference.
  • Printing processes are preferably used to fabricate various functional structures, such as conductive paths and electrical devices, without the use of masks or resists.
  • Features down to about 10 microns can be directly written in a wide virtually any substrate - silicon, glass, polymers, metals and ceramics.
  • the substrates can be planar and non-planar surfaces.
  • the printing process is typically followed by a thermal treatment, such as in a furnace or with a laser, to achieve dense functionalized structures.
  • Ink jet printing of electronically active inks can be done on a large class of substrates, without the requirements of standard vacuum processing or etching.
  • the inks may incorporate mechanical, electrical or other properties, such as, conducting, insulating, resistive, magnetic, semi conductive, light modulating, piezoelectric, spin, optoelectronic, thermoelectric or radio frequency.
  • a plurality of ink drops are dispensed from the print head directly to a substrate or on an intermediate transfer member.
  • the transfer member can be a planar or non-planar structure, such as a drum.
  • the surface of the transfer member can be coated with a non-sticking layer, such as silicone, silicone rubber, or Teflon.
  • the ink (also referred to as function inks) can include conductive materials, semi-conductive materials (e.g., p-type and n-type semiconducting materials), metallic material, insulating materials, and/or release materials.
  • the ink pattern can be deposited in precise locations on a substrate to create fine lines having a width smaller than 10 microns, with precisely controlled spaces between the lines.
  • the ink drops form an ink pattern corresponding to portions of a transistor, such as a source electrode, a drain electrode, a dielectric layer, a semiconductor layer, or a gate electrode.
  • the substrate can be an insulating polymer, such as polyethylene terephthalate (PET), polyester, polyethersulphone (PES), polyimide film (e.g. Kapton, available from DuPont located in Wilmington, DE; Upilex available from Ube Corporation located in Japan), or polycarbonate.
  • PET polyethylene terephthalate
  • PET polyester
  • PET polyethersulphone
  • polyimide film e.g. Kapton, available from DuPont located in Wilmington, DE; Upilex available from Ube Corporation located in Japan
  • the substrate can be made of an insulator such as undoped silicon, glass, or a plastic material.
  • the substrate can also be patterned to serve as an electrode.
  • the substrate can further be a metal foil insulated from the gate electrode by a non-conducting material.
  • the substrate can also be a woven material or paper, planarized or otherwise modified on at least one surface by a polymeric or other coating to accept the other structures.
  • Electrodes can be printed with metals, such as aluminum or gold, or conductive polymers, such as polythiophene or polyaniline.
  • the electrodes may also include a printed conductor, such as a polymer film comprising metal particles, such or some other conductive carbon material, or a conductive oxide such as tin oxide or indium tin oxide.
  • Dielectric layers can be printed with a silicon dioxide layer, an insulating polymer, such as polyimide and its derivatives, poly-vinyl phenol, polymethylmethacrylate, polyvinyldenedifluoride, an inorganic oxide, such as metal oxide, an inorganic nitride such as silicon nitride, or an inorganic /organic composite material such as an organic-substituted silicon oxide, or a sol-gel organosilicon glass.
  • Dielectric layers can also include a bicylcobutene derivative (BCB) available from Dow Chemical (Midland, Mich.), spin-on glass, or dispersions of dielectric colloid materials in a binder or solvent.
  • BCB bicylcobutene derivative
  • Semiconductor layers can be printed with polymeric semiconductors, such as, polythiophene, poly(3-alkyl)thiophenes, alkyl-substituted oligothiophene, polythienylenevinylene, poly(para-phenylenevinylene) and doped versions of these polymers.
  • polymeric semiconductors such as, polythiophene, poly(3-alkyl)thiophenes, alkyl-substituted oligothiophene, polythienylenevinylene, poly(para-phenylenevinylene) and doped versions of these polymers.
  • An example of suitable oligomeric semiconductor is alpha- hexathienylene. Horowitz, Organic Field-Effect Transistors, Adv. Mater., 10, No. 5, p. 365 (1998) describes the use of unsubstituted and alkyl-substituted oligothiophenes in transistors.
  • a field effect transistor made with regioregular poly(3- hexylthiophene) as the semiconductor layer is described in Bao et al., Soluble and Processable Regioregular Poly(3-hexylthiophene) for Thin Film Field-Effect Transistor Applications with High Mobility, Appl. Phys. Lett. 69 (26), p. 4108 (December 1996).
  • a field effect transistor made with a-hexathienylene is described in U.S. Pat. No. 5,659,181 , which is incorporated herein by reference.
  • a protective layer can optionally be printed onto the electrical devices.
  • the protective layer can be an aluminum film, a metal oxide coating, a polymeric film, or a combination thereof.
  • Organic semiconductors can be printed using suitable carbon-based compounds, such as, pentacene, phthalocyanine, benzodithiophene, buckminsterfullerene or other fullerene derivatives, tetracyanonaphthoquinone, and tetrakisimethylanimoethylene.
  • suitable carbon-based compounds such as, pentacene, phthalocyanine, benzodithiophene, buckminsterfullerene or other fullerene derivatives, tetracyanonaphthoquinone, and tetrakisimethylanimoethylene.
  • a desired media such as for example, a conducting fluid solution, a semiconducting fluid solution, an insulating fluid solution, and a precursor material to facilitate subsequent deposition.
  • a desired media such as for example, a conducting fluid solution, a semiconducting fluid solution, an insulating fluid solution, and a precursor material to facilitate subsequent deposition.
  • the precursor material can be surface active agents, such as octadecyltrichlorosilane (OTS).
  • a separate print head is used for each fluid solution.
  • the print head nozzles can be held at different potentials to aid in atomization and imparting a charge to the droplets, such as disclosed in U.S. Pat. No. 7,148,128 (Jacobson), which is hereby incorporated by reference.
  • Alternate print heads are disclosed in U.S. Pat. No. 6,626,526 (Ueki et al.), and U.S. Pat. Publication Nos. 2006/0044357 (Andersen et al.) and 2009/0061089 (King et al.), which are hereby incorporated by reference.
  • the print head preferably uses a pulse-on-demand method, and can employ one of the following methods to dispense the ink drops: piezoelectric, magnetostrictive, electromechanical, electro pneumatic, electrostatic, rapid ink heating, magneto hydrodynamic, or any other technique well known to those skilled in the art.
  • the deposited ink patterns typically undergo a curing step or another processing step before subsequent layers are applied.
  • printing is intended to include all forms of printing and coating, including: pre-metered coating such as patch die coating, slot or extrusion coating, slide or cascade coating, and curtain coating; roll coating such as knife over roll coating, forward and reverse roll coating; gravure coating; dip coating; spray coating; meniscus coating; spin coating; brush coating; air knife coating; screen printing processes; electrostatic printing processes; thermal printing processes; and other similar techniques.
  • pre-metered coating such as patch die coating, slot or extrusion coating, slide or cascade coating, and curtain coating
  • roll coating such as knife over roll coating, forward and reverse roll coating
  • gravure coating dip coating
  • spray coating meniscus coating
  • spin coating spin coating
  • brush coating air knife coating
  • screen printing processes electrostatic printing processes
  • thermal printing processes and other similar techniques.
  • Figure 21 illustrates an alternate high density electrical circuit 320 with compliant material 322 added between circuit geometries 324, 326 to facilitate insertion of exposed circuit geometries 328, 330 into a receptacle or socket.
  • the liquid dielectric is typically imaged to create the recesses that receive the compliant material 322.
  • the compliant material 322 can supplement or replace the compliance in the receptacle or socket.
  • the compliance is provided by a combination of the compliant material 322 and the exposed circuit geometries 328, 330. with integral terminals 350 in accordance with an embodiment of the present disclosure.
  • the integral terminals 350 are grown directly in first circuit member 352 as discussed herein.
  • the first circuit member 352 may be a semiconductor package substrate, printed circuit member, a flexible circuit, a socket housing, or the like.
  • mating connector 354 is an interconnect to second circuit member 356, such as a PCB.
  • Planar contacts 358 are etched in place within interconnect housing 360 or formed separately and assembled into connector housing 360.
  • the contacts 358 include one or more beams 362 that are permitted to flex within the housing 360.
  • protrusion 366 at distal ends of the beams 362 are configured to engage with the terminals 350, causing the beams 362 to flex outward in direction 370.
  • the protrusions 366 are biased into engagement with undercuts 368 on the integral terminals 350 by bias force 364.
  • the bias force 364 retains the circuit member 352 to the connector housing 360.
  • An external fixation mechanism may also be used to secure the first circuit member 352 to the housing 360.
  • Figure 23 illustrates an embodiment for forming a snap-fit coupling with the integral terminals 350 in accordance with an embodiment of the present disclosure.
  • Vertical contacts 380 include a pair of opposing beams 382A, 382B that flex outward 384 as integral terminals 350 are brought into engagement in direction 386.
  • Distal portions 388 of the terminals 350 preferably have a circular cross sectional shape that facilitates engagement.
  • the circuit member 352 is moved in the direction 386 until it engages with connector housing 390.
  • space 392 between the connector housing 390 and the integral contact 350 is slightly greater than radius of the distal portion 388 of the contact 350 so the beams 382 are continually biases against the contact 350.
  • the beams 382 close to form a snap-fit engagement with the terminals 350.
  • Figures 24A and 24B illustrate alternate engagement mechanisms between contact members 400A, 400B (“400") and integral terminals 402 on first circuit member 404 in accordance with an embodiment of the present disclosure.
  • Distal portions 406A, 406B (“406") of the contacts members 400 are configured to ("408") have shapes complementary to neck portions 410 of the terminals 402.
  • distal portion 406B of contact member 400B is formed from two discrete beams 414A, 414B that can flex outward during engagement with the terminals 402.
  • Bends 412 near the distal portions 406 permit the terminals 402 to slide into engagement along axis 416 that is generally perpendicular to primary axis 418 of the contact members 400. Lateral or biasing loads can optionally be provided for low insertion force applications. An external mechanism can be used to maintain contact load 416 or engagement between the terminals 402 and the contact members 400 such that the terminals 402 are held by the contacts 400.
  • the terminals 402 are forced into engagement with the contact members 400 with a lateral or biasing load 416 in a zero Insertion force mechanism with an external feature maintaining contact load 416 against the contact members 400 in a normally open environment, or the mechanism releases preloaded contact members 400 such that they engage with the terminals 402 in a normally closed environment.
  • the terminals 402 can be installed and engaged in an environment containing each of the loading mechanisms described (normal force snap retention, LIF, ZIF etc.).
  • Figure 25 illustrates an embodiment in which terminals 420 are soldered to PCB 422 in accordance with an embodiment of the present disclosure.
  • Solder 424 wicks around the terminals 420 during reflow and engages with undercuts 426 to create an extremely strong joint.
  • the present integral terminals 420 with undercuts 426 creates a joint much stronger than the conventional BGA solder ball
  • BGA solder ball joints often require under fill to survive thermal or mechanical shock, not required in the illustrated embodiment because the integral terminals 420 provide a natural controlled height standoff 428.
  • the neck region 426 of the terminals 420 provides a natural level of compliance as the ductile copper can provide some level of decoupling between the terminal 420, the circuit member 430 (such as an IC package) and the system board 422 to reduce the failure effects of thermal expansion coefficient disparities as well as mechanical stress of shock.
  • Figure 26 illustrates a solder deposit 450 on the terminals 452 in accordance with an embodiment of the present disclosure.
  • the terminals 452 are tin plated and are capped with solder 450 in a popular for high pin count area array devices as an alternative to flip chip or C4 attachment.
  • the advantage of the present approach is that flip chip and C4 attachments are limited in pitch due to the potential for solder bridging of conventional solder balls as the spacing between them during reflow is reduced.
  • the terminal deposition technique can also be enhanced to create the center conductor for a RF or SMA style coaxial connector, with the dielectric spacer and grounded shroud components added as a discrete component or assembly.
  • the terminal deposition technique can also be enhanced to create the center conductor for a RF or SMA style coaxial connector, with the dielectric spacer and grounded shroud components constructed with an in-situ molded process, with the grounding shield features selectively metalized to the desired portions of the molded polymer.
  • Embodiments of this method are disclosed in commonly assigned PCT application entitled SEMICONDUCTOR SOCKET WITH DIRECT SELECTIVE METALIZATION (Attorney Docket No. 49956-3701 ), filed on the same date herewith, which is hereby incorporated by reference.

Abstract

A method of making an array of integral terminals on a circuit assembly. The method includes the steps of depositing at least a first liquid dielectric layer on the first surface of a first circuit member, imaged to include a plurality of first recesses corresponding to the array of integral terminals. The selected surfaces of the first recesses are processed to accept electro-less conductive plating deposition. Electro-lessly plating is applied to the selected surfaces of the first recesses to create a plurality of first conductive structures electrically coupled to, and extending generally perpendicular to, the first circuitry layer. Electro-plating is applied to the electro-less plating to substantially first recesses with a conductive material. The steps of depositing, processing, electro-less plating, and electro-plating are repeated to form the integral terminals of a desired shape. The dielectric layers are removed to expose the terminals.

Description

HIGH SPEED CIRCUIT ASSEMBLY WITH INTEGRAL TERMINAL AND MATING BIAS LOADING ELECTRICAL CONNECTOR ASSEMBLY
Cross-Reference to Related Applications
[0001] This application claims the benefit of United States Provisional Application No. 61/669,893, filed July 10, 2012, the disclosure of which is hereby incorporated by reference.
Technical Field
[0002] The present disclosure relates to a high density electrical interconnect between at least two components in an electronic system using a unique circuit structure fabrication technique that leverages processes used in the printed circuit and semiconductor packaging industries.
Background of the Invention
[0003] Traditional printed circuits are often constructed in what is commonly called rigid or flexible formats. The rigid versions are used in nearly every electronic system, where the printed circuit board (PCB) is essentially a laminate of materials and circuits that when built is relatively stiff or rigid and cannot be bent significantly without damage.
[0004] Flexible circuits have become very popular in many applications where the ability to bend the circuit to connect one member of a system to another has some benefit. These flexible circuits are made in a very similar fashion as rigid PCB's, where layers of circuitry and dielectric materials are laminated. The main difference is the material set used for construction. Typical flexible circuits start with a polymer film that is clad, laminated, or deposited with copper. A photolithography image with the desired circuitry geometry is printed onto the copper, and the polymer film is etched to remove the unwanted copper. Flexible circuits are very commonly used in many electronic systems such as notebook computers, medical devices, displays, handheld devices, autos, aircraft and many others.
[0005] Flexible circuits are processed similar to that of rigid PCB's with a series of imaging, masking, drilling, via creation, plating, and trimming steps. The resulting circuit can be bent, without damaging the copper circuitry. Flexible circuits are solderable, and can have devices attached to provide some desired function. The where the material set and design features can often provide better electrical performance than a comparable rigid circuit.
[0006] Flexible circuits are connected to electrical system in a variety of ways. In most cases, a portion of the circuitry is exposed to create a connection point. Once exposed, the circuitry can be connected to another circuit or component by soldering, conductive adhesive, thermo-sonic welding, pressure or a mechanical connector. In general, the terminals are located on an end of the flexible circuit, where edge traces are exposed or in some cases an area array of terminals are exposed. Often there is some sort of mechanical enhancement at or near the connection to prevent the joints from being disconnected during use or flexure.
[0007] In general, flexible circuits are expensive compared to some rigid PCB products. Flexible circuits also have some limitations regarding layer count or feature registration, and are therefore generally only used for small or elongated applications.
[0008] Rigid PCBs and package substrates experience challenges as the feature sizes and line spacing are reduced to achieve further miniaturization and increased circuit density. The use of laser ablation has become increasingly used to create the via structures for fine line or fine pitch structures. The use of lasers allows localized structure creation, where the processed circuits are plated together to create via connections from one layer to another. As density increases, however, laser processed via structures can experience significant taper, carbon contamination, layer-to-layer shorting during the plating process due to registration issues, and high resistance interconnections that may be prone to result in reliability issues. The challenge of making fine line PCBs often relates to the difficulty in creating very small or blind and buried vias.
[0009] The process used by current technology is based upon a dry film process, where a substrate of some sort has a copper layer as the base circuit layer onto which a dry film is applied. The dry film is then patterned with a laser to create the circuit patterns. The next copper layer is added and etched as appropriate, with the laser used to drill through the film to expose the previous copper layer so a via can be plated to join the circuit layers. This process is typically used for semiconductor package substrates and larger format circuit boards, such as used in a cell phone. For larger format circuit boards, the dry film technology is used to build fine line techniques.
[0010] In both cases, the package substrate and the larger format circuit board build up are very expensive compared to traditional low density laminate technology, and suffer from several limitations inherent to the process. For example, in the case where a low density laminate base is used as the starting point for subsequent high density layers are built up, the cost increases dramatically since the entire surface of the lower density base board must be processed with the build up process across the entire area, not just in the areas where the high density is required.
[0011] Another limitation is the reliability of the via structures joining one circuit layer to another, which tend to be a barrel plated structures with the side walls of the via plated and in many cases must be filled with a via fill material to eliminate an air pocket which may separate during solder reflow temperatures. The vias require drilling through the dry film to expose the previous circuit layer in order to create the via that connects the circuit layers. The dry film is applied as a solid contiguous sheet where the material on that particular layer is restricted to that particular material across the entire layer in the build up less the areas ablated to create the via target for joining the previous and subsequent circuit layers. That is, the dry layer film is homogeneous across the entire layer.
Brief Summary of the Invention
[0012] The present disclosure relates to a high density electrical interconnect between at least two components, such as a high density circuit to a low density PCB. By combining methods used in the PCB fabrication and semiconductor packaging industries, the present disclosure enables fine line high density circuit structures with attractive cost of manufacture.
[0013] The present disclosure adds a bulk conductive material to create very small low resistance terminals to increase density and reduce line and feature pitch of the circuits as well as a host of electrical enhancements that provide an electrical circuit that may prove to be superior to the traditional methods. The terminal can be created with various features, including undercuts, that cannot be formed using dry film technology.
[0014] One embodiment is directed to a high density circuit assembly including an array of integral terminals plated on a first circuit member including an electro-lessly plated shell with an electro-plated core. A printed circuit board includes a plurality of are electrically coupled with circuitry on the printed circuit board and extend into the recesses. Insertion of the integral terminals on the first circuit member into the recesses on the PCB is a zero or low insertion force process. Shifting the printed circuit board relative to the first circuit member electrically couples the integral terminals with the contact members.
[0015] The integral terminal can be a variety of shapes, including a non-cylindrical shape. The integral terminals preferably include a plurality of discrete contact surfaces that electrically couple with the contact members on the PCB. In one embodiment, the integral terminals include a narrow portions and the contact members include arms that mechanically couple with the narrow portions on the integral terminals. In another embodiment the terminals include at least one feature, such as an undercut, that cannot be formed using dry film technology.
[0016] The present disclosure is also directed to a method of making an array of integral terminals on a circuit assembly. The method includes the steps of depositing at least a first liquid dielectric layer on the first surface of a first circuit member. The dielectric material is imaged to create a plurality of first recesses corresponding to the array of integral terminals, via holes, and channels for circuit traces. The selected surfaces of the first recesses are processed to accept electro- less conductive plating deposition. Electro-lessly plating is applied to the selected surfaces of the first recesses to create a plurality of first conductive structures electrically coupled to, and extending generally perpendicular to, the first circuitry layer. A plating resist is applied, followed by electro-plating to the electro-less plating to substantially fill first recesses with a conductive material. The steps of depositing, processing, electro-less plating, and electro-plating are repeated to form the integral terminals of a desired shape. The dielectric layers are then removed to expose the terminals.
[0017] In one embodiment, a printed circuit board is prepared with a plurality of recesses configured to receive the integral terminals. A plurality of contact members that are electrically coupled with circuitry on the printed circuit board are configured to extend into the recesses. The integral terminals on the first circuit member are positioned in the recesses of the printed circuit board. Shifting the printed circuit board relative to the first circuit member electrically couples the integral terminals with the contact members. own by incorporating electrical devices or other passive and active function, such as for example, ground planes, power planes, electrical connections to other circuit members, dielectric layers, conductive traces, transistors, capacitors, resistors, RF antennae, shielding, filters, signal or power altering and enhancing devices, memory devices, embedded IC, and the like. In some embodiments, the electrical devices can be formed using printing technology, adding intelligence to the circuit assembly.
[0019] The vias and associated circuit geometry can be imaged in the liquid dielectric in a variety of shapes and sizes, depending on the terminal structure on the circuit members. The contact members and vias can be positioned at a variety of locations, heights, or spacing to match the parameters of existing connections making it easy to replace an existing circuit without changing hardware or the PCB. The present disclosure permits the creation of blind or buried conductive structures on very tight pitch of about 25 microns or below without the use of laser ablation.
[0020] Traditional PCB and flex circuit fabrication methods take sheets of material and stack them up, laminate, and/or drill. The materials in each layer are limited to the materials in a particular sheet. The present disclosure employs a liquid dielectric that is image, permitting a wide variety of materials to be applied on a single layer with a registration relative to the features of the previous layer. Selective addition of conductive, non-conductive, or semi-conductive materials at precise locations to create a desired effect has the major advantages in tuning impedance or adding electrical function on a given layer. Tuning performance on a layer by layer basis relative to the previous layer greatly enhances electrical performance.
Brief Description of the Several Views of the Drawing
[0021] Figures 1A and 1 B are top and side views of a plurality of high density circuit structures combined with a low density PCB in accordance with an embodiment of the present disclosure.
[0022] Figure 1 C is a side view of the PCB merged with the high density circuit structures in accordance with an embodiment of the present disclosure.
[0023] Figure 2A is a cross-sectional view of a method of making a high density circuit structure in accordance with an embodiment of the present disclosure.
[0024] Figure 2B is a cross-sectional view of an alternate method of making a high density circuit structure in accordance with an embodiment of the present disclosure. circuit of Figure 1 in accordance with an embodiment of the present disclosure.
[0026] Figure 4 illustrates application to a second circuitry layer to the high density electrical circuit of Figure 1 in accordance with an embodiment of the present disclosure.
[0027] Figure 5 illustrates an optional dielectric layer on the high density electrical circuit of Figure 1 in accordance with an embodiment of the present disclosure.
[0028] Figure 6 illustrates an optional etching step on the high density electrical circuit of Figure 1 in accordance with an embodiment of the present disclosure.
[0029] Figure 7 illustrates an electrical interconnect interfaced with a BGA device in accordance with an embodiment of the present disclosure.
[0030] Figure 8 illustrates an electrical interconnect for a flexible circuit in accordance with an embodiment of the present disclosure.
[0031] Figures 9A-9E illustrate a method of making a free standing integral terminal in accordance with an embodiment of the present disclosure.
[0032] Figures 10A and 10B illustrate a connector on a PCB configured to mate with the terminal of Figure 9E in accordance with an embodiment of the present disclosure.
[0033] Figures 1 1A and 1 1 B illustrate an alternate connector on a PCB configured to mate with the terminal of Figure 9E in accordance with an embodiment of the present disclosure.
[0034] Figure 12 illustrates another connector on a PCB configured to mate with the terminal of Figure 9E in accordance with an embodiment of the present disclosure.
[0035] Figure 13 illustrates an electrical interconnect for an IC package in accordance with an embodiment of the present disclosure.
[0036] Figure 14 illustrates an alternate electrical circuit for an IC package in accordance with an embodiment of the present disclosure.
[0037] Figure 15 is a side sectional view of an electrical circuit in accordance with an embodiment of the present disclosure.
[0038] Figure 16 is a side sectional view of an alternate electrical circuit with compliant material in accordance with an embodiment of the present disclosure.
[0039] Figure 17 illustrates an electrical circuit with optical features in accordance with an embodiment of the present disclosure. features in accordance with an embodiment of the present disclosure.
[0041] Figure 19 illustrates an alternate high density circuit structure with vias in accordance with an embodiment of the present disclosure.
[0042] Figure 20 illustrates an alternate high density circuit structure with printed electrical devices in accordance with an embodiment of the present disclosure.
[0043] Figure 21 illustrates an alternate high density electrical circuit with compliant electrical pads to plug into another connector in accordance with an embodiment of the present disclosure.
Detailed Description of the Invention
[0044]A high density circuit structure according to the present disclosure may permit fine contact-to-contact spacing (pitch) on the order of less than 1 .0 mm pitch, and more preferably a pitch of less than about 0.7 millimeter, and most preferably a pitch of less than about 0.4 millimeter. Such fine pitch high density circuit structures are especially useful for communications, wireless, and memory devices.
[0045] The present high density circuit structure can be configured as a low cost, high signal performance electrical interconnect assembly, which has a low profile that is particularly useful for desktop and mobile PC applications. IC devices can be installed and uninstalled without the need to reflow solder. The solder-free electrical connection of the IC devices is environmentally friendly. In another embodiment, the high density circuit structure can also be a portion of a socket or semiconductor package.
[0046] Figures 1A and 1 B schematically illustrate the merger of a lower density circuit 20 with one or more high density circuits 22A, 22B, 22C, 22D ("22") into the contiguous assembly of Figure 1 C. The lower density circuit 20 may be a printed circuit board, a flexible circuit, or the like. The high density circuit 22 can be a printed circuit board, an IC socket, a semiconductor package, or the like.
[0047] Dielectric material 24 is optionally applied to the surface 26 of the low density circuit 20 so the location of the high density circuits 22 is at least partially defined and isolated. The dielectric material 24 may be a film or a liquid dielectric. The dielectric material 24 is imaged to expose the circuit locations 28 for the high density circuits 22, improving alignment of vias on the lower density main core 20 with the high density circuits 22. processed to enable electro-less or electrolytic copper plating to adhere to the surface of the dielectric and grow a thick trace or pillar or via structure within the imaged region with undesired areas remaining un-plated or post plate etched to remove unwanted copper. Once the surfaces are plated, a higher deposition rate electroplate copper can be applied to build up the thickness or area of copper as desired.
[0049] If the circuit assembly 30 is a flexible circuit, the base layer can be a material such as polyimide or liquid crystal polymer. If the circuit assembly 30 is a rigid circuit board, the base can be FR4 or one of many high speed laminates or substrates. If the circuit assembly 30 is a semiconductor package, the base can be a material such as FR4, BT resin of any one of a variety of laminate or substrate materials. If the circuit assembly 30 is an electrical connector or socket, the base can be molded LCP, machined plastic, or a variety of films or substrate materials.
[0050] The high density circuits 22 (also referred to as "coupons") can be made using conventional build up technology described above or using the process described below. The high density circuits 22 are then merged with the low density circuit 20. In another embodiment, the high density circuits 22 can be fabricated in-situ directly on the low density circuit 20 using the processes described herein. The present method permits the high density circuits 22 to be formed directly in the circuit locations 28, without having to extend the processing across the entire low density circuit 20.
[0051] Figure 2A is a side cross-sectional view of a method of making the high density electrical circuits 22 in accordance with an embodiment of the present disclosure. The first step is to start with base material of some sort, such as a copper foil 32A or a core 34 of some sort to act as a support member. If the starting base is copper foil 32A, then the foil can act as the first layer circuitry or escape layer which would be the layer to be merged with the circuit locations 28 on the low density circuit 20. In the case where the high density circuit 22 is a semiconductor package, the foil 32A can be the termination points for BGA attachment to the low density circuit 20. The base 34 can also be a sacrificial member that is removed at some point later in the process to reveal the individual coupons 22.
[0052] In the illustrated embodiment, copper foil circuitry layer 32A is located on reinforcing layer 34. The layer 34 can be a traditional PCB or laminated to a The circuitry layer 32A can be preformed or can be formed using a fine line imaging step is conducted to etch copper foil as done with many PCB processes.
[0053] Liquid dielectric material 36 is applied to surface 38 and flows between the regions of the circuitry 32A. A dry dielectric film, by contrast, does not flow into the recessed regions. The dielectric layer 36 can be tack cured to partially link the polymer and allow for handling, while retaining the ability to image the material in a photolithography process. Alternatively, the dielectric layer 36 can be processed with a laser direct imaging process known as LDI.
[0054] The dielectric material 36 is typically imaged to create recesses 37 that expose the desired locations 40 on circuitry layer 32A with theoretical via locations 37 created as part of the image directly in proximity to the circuitry layer 32A. One benefit of imaging the dielectric layer 36 is that the via structures do not need to be round as with traditional drilled vias. Any shape that can be imaged and will result in a grown full metal via 54 of the desired shape.
[0055] The dielectric surface 46 can be planarized to create a very consistent dielectric thickness and planarity, as well as assist with preparing select surfaces for electro-less copper plating adhesion.
[0056] The dielectric layer 36 is preferably processed to promote electro-less copper plating using one or more of plasma treatment, permanganate, carbon treatment, impregnating copper nano-particles to activate the desired surfaces to promote electroplating. In the illustrated embodiment, the dielectric material 36 is processed to promote plating adhesion to the side walls 44 of the recesses 37. Electro-less copper plating is applied to the side walls 44 of the recesses 37 to create conductive structures 50, resulting in a three-dimensional landscape. Additional discussion of the use of electro-less plating of the dielectric structure is disclosed in PCT/US2012/53848, filed September 6, 2012, entitled DIRECT METALIZATION OF ELECTRICAL CIRCUIT STRUCTURES, the entire of disclosure of which is hereby incorporated by reference.
[0057]A plating resist is applied, imaged and developed to expose the via location 37 and previous circuit layer 32A. In the illustrated embodiment, the conductive structure 50 is an annular-shaped via electrically coupled to the circuitry layer 32A with a center opening or recess 52. Once the surfaces 44 of the dielectric material 36 are plated, a higher deposition rate electroplate copper can be used to fill the resist is stripped and the copper deposition 50, 54 is optionally planarized. The resulting conductive pillars 56 include a shell 50 of electro-less conductive material and a core 54 of electro-plated conductive material.
[0058]A present process creates the ability to stack full metal vias 54 in subsequent deposition steps to create a high aspect ratio via without the need to drill through the entire stack 22 in one operation. Another benefit is the ability to provide a mounting point for a packaged semiconductor device where a copper pillars 54 are created as an alternative to conventional via in pad construction which can be plagued with reliability issues and high costs to manufacture.
[0059] In another embodiment, the present process enhances the electroplating process is to deposit electro-less copper or copper flash to provide a bus structure for bulk copper electro plating. The copper bus structure is subsequently removed with a differential etch process that leaves bulk copper 54 intact. An alternate step can be employed to add multiple layers of resist 36 and continue the copper growth procedure if desired, with the resulting structures encapsulated by the next dielectric application.
[0060] The shape of the conductive structures 50, 54 is dictated by the shape of the recesses 37. A square recess 37 results in a square-shaped conductive structure 54. The plating process can be controlled to a certain degree, but in some cases with fine pitch geometries and high speed circuits, upper surfaces 46 of the dielectric 36 and the conductive structure 54 may vary in topography or height relative to the field, and the dielectric material 36 may vary in thickness slightly especially if liquid material is used. Consequently, it is preferred to planarize to surfaces 46 of the conductive structures 54 and the exposed surface 46 of the dielectric 36 between steps to control thickness and flatness of the electrical circuit 22.
[0061] In the illustrated embodiment, additional foil layer 32B is applied and processed to create a circuit structure using any of the techniques discussed herein. The conductive material 54 electrically couples the circuit layer 32A to the circuit layer 32B.
[0062] The present method permits the material between layers and within each layer to be varied. One aspect of the present process that differs from the traditional dry film build up process is the nature of the dielectric deposition in liquid form. The dielectric layer 36 can be applied by screen printing, stencil printing, jetting, flooding, previous circuit landscape 32A. During the development process, desired regions remain and the regions that are not desired are washed away with fine resolution of the transition regions within the landscape. Multiple depositions steps can be tack cured and imaged such that thicker sections of dielectric 36 can be developed and washed away in one or multiple strip operations. As a result, internal cavities or mass regions can be excavated and subsequently filled at the next dielectric layer with materials that have physical properties differing from the base dielectric 36. In other words, the excavated regions can be filled or treated with materials that have a different dielectric constant, vary in conductive or mechanical or thermal properties to achieve a desired performance function not possible with a contiguous dry film technique. In basic terms, the present process not only provides the ability to alter the material set and associated properties in a given layer, but the material set can be altered at any given point within a given deposition or layer.
[0063] The present process can also be used in combination with existing dry film techniques. For example, one or more of the layers can be a preformed dielectric film to leave air dielectric gaps between traces. Recesses 37 in the dielectric layer 36 that expose circuitry 32A can be formed by printing, embossing, imprinting, laser cutting, chemical etching with a printed mask, or a variety of other techniques.
[0064] Figure 2B illustrates an alternate high density electrical circuit 22 in accordance with an embodiment of the present disclosure. The process is the same as discussed in connection with Figure 2A, except that the sidewalls 44 of the dielectric material 36 are not processed to receive electro-less plating. Rather, a bulk conductive material 42 is applied directly to exposed portions 40 of the circuit layer 32A. The surface 46 is preferably planarized and the circuit layer 32B is applied using any of the techniques disclosed herein.
[0065] Figure 3 illustrates higher aspect ratio conductive pillar 60 formed on the electrical circuit 22 without the foil layer 32B. The process discussed above is repeated by applying another layer 62 of liquid dielectric 36 that is imaged to created recesses 64 that expose the upper surface 66 of the copper pillar 42. The upper surfaces 66 of the copper pillars 42 are then plated as discussed above to create conductive extension 68 of the copper pillar 42.
[0066] In one embodiment, the conductive extensions 68 are planarized to permit die attach point 70 to facilitate flip chip attach of the die 72 to the conductive extensions enlarged to facilitate soldering of the die 72 to the conductive extensions 68.
[0067] Figure 4 illustrates circuitry layer 80 is applied to the top surface 78 of the electrical circuit 22 and coupled to the conductive extensions 68. The circuitry layer 80 creates the base for additional routing layers and to facilitate vertical connection to subsequent layers in the stack in accordance with an alternate embodiment of the present disclosure.
[0068] Figure 5 illustrates liquid dielectric layer 90 added to the subsequent circuitry layer 80 in accordance with an alternate embodiment of the present disclosure. The liquid dielectric layer 90 is imaged to create recesses 92 that expose portions 94 of the circuitry layer 80 that corresponds with the via extensions 68. The dielectric layer 90 protects the portions of the circuitry layers 80 that are not to be etched and provides access to the foil intimate to the conductive structures 42 and 68. In one embodiment, the extension 68 is optionally conductive structure 50 with a core 54 of conductive or non-conductive material.
[0069] Figure 6 illustrates a subsequent etch process that removes the copper foil 94 (see Figure 5) located in the recesses 92 to allow access for the next plating step to join the layers together in accordance with an alternate embodiment of the present disclosure.
[0070] Depending on the dielectric material 90 and desired final construction, the resist layer 90 can be stripped to provide a level to be planarized as the base of further processing or the resist layer 90 can be left in place provided it is of the proper material type. The exposed regions that provided access for etch and plating can be filled with similar material to seal the layer which can be planarized for further processing if desired.
[0071] Figure 7 illustrates one possible variation of the electrical circuit 22. Recesses 92 are filled with a dielectric material 96 and the surface 98 is planarized to receive circuitry plane 100. Liquid dielectric layer 102 is deposited on the circuitry plane 100 and imaged to expose selective regions 104. The selective regions 104 are configured to correspond to solder balls 120 on BGA device 122. In the illustrated embodiment, bottom dielectric layer 106 is optionally deposited on circuitry layer 52 in a manner to expose selective regions 108.
[0072] In one embodiment, the electrical circuit 22 is further processed with conventional circuit fabrication processes to create larger diameter through vias or device termination locations 104, 108, laser direct imaging, legend application etc. In another embodiment, the via 1 10 is formed using electro-less plating of each layer of the stack, as illustrated in Figure 6.
[0073] Figure 8 illustrate an alternate embodiment in which the electrical circuit 22 is used in a flexible circuit applications. The electrical circuit 22 is laminated with ground planes and cover layers 1 12, 1 14. In some applications the insulating layers 112, 1 14 are applied by jet printing of polyimide or liquid crystal polymers (LCP) inks as a final layer or as a combination of laminated film and jetted material.
[0074] Figures 9A-9E illustrate an embodiment in which the electrical circuit 22 is enhanced by selectively plating terminals 130 (see Figure 9E) to traces or target pads 132 in accordance with an embodiment of the present disclosure. The electrical circuit 22 is processed with an imageable or ablateable plating resist 134A in order to keep the target pad 132 of base copper exposed. In the preferred embodiment, the resist 134 is a liquid material that is imaged to expose the target pad 132, as discussed herein.
[0075] Another layer 134B of liquid plating resist is added and exposed. The target pad 132 is plated with copper 136 to build up the terminal 130. Additional liquid resist layers 134C (Figure 9C) and further copper plating form a neck portion 131 of the terminal 130. A final resist layer 134D (Figure 9D) is added and further copper 136 is plated onto the terminal 130. Multiple layers of resist 134 can be built up and a variety of terminal shapes can be created as a function of the resist thickness and the shape of the target opening where plating is deposited to the previous target layer while not depositing onto the resist.
[0076] Upon reaching the desired terminal formation illustrated the resist layers 134 are stripped as a mass or congruous material set as illustrated in Figure 9E. The built-up or free standing integral terminal 130 is left as part of the circuit assembly 22. In the illustrated embodiment, the free standing post or terminal 130 includes a plurality of contact surfaces or facets 138A, 138B, 138C, 138D, 138E ("138") that can potentially electrically couple with the PCB 20 (see Figure 1 A). Neck portion 131 provides an undercut that cannot be formed using dry film technology.
[0077] The terminals 130 can be a variety of shapes to facilitate engagement with the PCB 20, such as for example, cylindrical or non-cylindrical, regular or irregular, symmetrical or asymmetrical, rectangular, curvilinear, and the like. The layers 134 typically not possible to make using conventional molding or machining techniques, referred to herein as a "non-moldable feature."
[0078]While a single terminal is shown in Figure 9E, with fields of terminals in mass quantities can be created simultaneously and mass plated with final finish as desired (see e.g., Figure 12). For some applications such as with a semiconductor package, rigid or flex circuit that may benefit from a solder terminal either for final reflow or temporary connection, the terminal 130 can be constructed of solder.
[0079] The shape of the terminal 130 can form a connection to a mating connector with contact members shaped in such a way that the terminals can be biased or engaged to create a mechanical and electrical connection, in some cases in a self retained fashion and in other cases with the assistance of an external loading or load maintaining mechanism to enable long term connection.
[0080] Figures 10A and 10B illustrate side and top views of a mating connector 140 on PCB 20 configured to engage with the terminal 130 in accordance with an embodiment of the present disclosure. The circuit stack for the PCB 20 is preferably constructed using the techniques discussed herein.
[0081] Contact members 142 are attached to surface 144 of the PCB 20 and electrically coupled to via 146. The contact members 142 cantilever over a portion of recesses 148 that are sized to receive the terminals 130. As best illustrated in Figure 10B, diameters 150 of exposed portions 152 of the recesses 148 are greater than diameters 154 of the terminals 130.
[0082] In operation, the terminals 130 are aligned with the exposed portions 152 and inserted. By shifting the circuit assembly 22 in direction 156, one or more of the surfaces 138A, 138B, or 138C electrically couple with the contact members 142. In the preferred embodiment, multiple surfaces 138 engage with the contact members 142.
[0083] In one embodiment, the contact members 142 are part of a preformed circuit structure that is laminated onto the surface 144. Unwanted portions of the copper circuit structures is then etched away. In another embodiment, the recesses 148 are temporarily filled with a solder mask and the contact members 142 are imaged in the locations shown. The solder mask is then removed to reveal the recesses 148 and the cantilevered contact members 142. accordance with an embodiment of the present disclosure. Contact members 162 are attached to the PCB 20 and electrically coupled to via 164. The contact members 162 cantilever over a portion of elongated recesses 168 that are sized to receive the terminals 130. The circuit member 22 is removed to expose the terminals 130. Diameters 170 of the exposed portions 172 of the recesses 168 are greater than diameters 154 of the terminals 130.
[0085] In operation, the terminals 130 are aligned with the exposed portions 172 and inserted. By shifting the circuit assembly 22 in direction 176, one or more of the surfaces 138A, 138B, or 138C (see Figure 10A) electrically couple with the contact members 162. Arms 178 of the contact members 162 preferably extend around slightly less than 180 degrees of the terminal 130 to maximize contact surface area.
[0086] The arms 178 preferably contact wrap around at least 120 degrees and preferably at least 150 degrees of the terminals 130. In another embodiment, the arms 178 contact the terminals 130 in at least two locations.
[0087]The shapes and patterns of the contact members 142, 162 can be created, with contacts inserted discretely as individual members or blanked or etched from sheet or strip material to enable in-situ creation of the contact field, with shapes complimentary to the terminal shape for reliable low force engagement.
[0088] Figure 12 illustrates an array of contact members 180 with compliant arms 182 on a PCB 20 that provide self-retention or snap-fit engagement with the terminals 130 in accordance with an embodiment of the present disclosure. The contacts can be stamped and formed from a variety of resilient conductive materials.
[0089] In the illustrated embodiment, the electrical circuit 22 is removed to expose the terminals 130. In the illustrated embodiment, the surfaces 138B of the neck portion 131 (see Figure 10A) of the terminals 130 are positioned to engage with the arms 182. The terminals 130 are shifted in direction 184 the arms 182 flex outward. Once the terminal 130 is in region 186 it is trapped by the resilient force of the compliant arms 182.
[0090] Figure 13 illustrates an electrical circuit 22 for semiconductor packaging applications in accordance with an embodiment of the present disclosure. The stack 190 can be final processed with a variety of options to facilitate electrical connections to IC devices 192A, 192B, 192C and to system level attachment to PCB 20. to the structure directly (see e.g. , Figure 2) or to receive BGA device 192A. In other embodiment, plating 194B is extended to facilitate direct soldering of IC device die 192B with paste. In yet another embodiment, plating 194C is wire bonded 196 to the IC device 192C.
[0092] The low density main core 20 can be processed to accept a traditional ball grid array attachment 198 for an area array configuration or plated with solder/tin etc. for a no lead peripheral termination. The low density main core 20 can also be fashioned to have plating or post extensions 194D to facilitate direct solder attach with paste and provide a natural standoff from the PCB 20.
[0093] Figure 14 illustrates an electrical circuit 22 for a semiconductor packages 202 with dielectric materials 204 surrounding the conductive structures 206 in accordance with an embodiment of the present disclosure. Internal circuits and terminations may also be added by imaging or drilling the core material with a larger opening than needed and filling those openings with liquid dielectric and imaging the desired geometry to facilitate conductive structure formation.
[0094] Figure 15 illustrates an alternate electrical circuit 230 with an insulating layer 232 applied to the circuit geometry 234. The nature of the application and imaging of the liquid dielectric layer 232 leaves selected portions 236 of the circuit geometry 234 expose if desired. The resulting high density electrical circuit 230 can potentially be considered entirely "green" with limited or no chemistry used to produce beyond the direct write materials.
[0095] The dielectric layers of the present disclosure may be constructed of any of a number of dielectric materials that are currently used to make sockets, semiconductor packaging, and printed circuit boards. Examples may include UV stabilized tetrafunctional epoxy resin systems referred to as Flame Retardant 4 (FR- 4); bismaleimide-triazine thermoset epoxy resins referred to as BT-Epoxy or BT Resin; and liquid crystal polymers (LCPs), which are polyester polymers that are extremely unreactive, inert and resistant to fire. Other suitable plastics include phenolics, polyesters, and Ryton® available from Phillips Petroleum Company.
[0096] In one embodiment, one or more of the dielectric materials are designed to provide electrostatic dissipation or to reduce cross-talk between the traces of the circuit geometry. An efficient way to prevent electrostatic discharge ("ESD") is to construct one of the layers from materials that are not too conductive but that will values in the range of 10" to 10 " Ohm-meters.
[0097] Figure 16 illustrates an alternate high density electrical circuit 250 in accordance with an embodiment of the present disclosure. Liquid dielectric layer 252 is imaged to include openings 254 into which compliant material 256 is deposited before formation of circuit geometry 258. The compliant material 256 improves reliability during flexure of the electrical circuit 250.
[0098] Figure 17 illustrates an alternate high density electrical circuit 260 in accordance with an embodiment of the present disclosure. Optical fibers 262 are located between layers 264, 266 of dielectric material. In one embodiment, optical fibers 262 are positioned over compliant layer 268, and dielectric layer 270 is deposited over and around the optical fibers 262. A compliant layer 272 is preferably applied above the optical fiber 262 as well. The compliant layers 268, 272 support the optical fibers 262 during flexure. In another embodiment, the dielectric layer 270 is formed or printed with recesses into which the optical fibers 262 are deposited.
[0099] In another embodiment, optical quality materials 274 are deposited during formation of the high density electrical circuit 260. The optical quality material 274 and/or the optical fibers 262 comprise optical circuit geometries. The metalization process allows for deposition of coatings in-situ that enhances the optical transmission or reduces loss. The precision of the metalization process reduces misalignment issues when the optical materials 274 are optically coupled with another optical structure.
[00100] Figure 18 illustrates another embodiment of a present high density electrical circuit 280 in accordance with an embodiment of the present disclosure. Embedded coaxial RF circuits 282 or printed micro strip RF circuits 284 are located with dielectric/metal layers 286. These RF circuits 282, 284 are preferably created by imaged liquid dielectrics and metallization geometry.
[00101] As illustrated in Figure 19, use of deposition processes allows the creation of a high density electrical circuit 290 with inter-circuit, 3D lattice structures 292 having intricate routing schemes. Conductive pillars 294 can be printed with each layer, without drilling.
[00102] The application and imaging of the liquid dielectric layers 296 creates recesses 298 that control the location, cross section, material content, and aspect ratio of the conductive traces 292 and the conductive pillars 294. Maintaining the greater provides greater signal integrity than traditional subtractive trace forming technologies. For example, traditional methods take a sheet of a given thickness and etches the material between the traces away to have a resultant trace that is usually wider than it is thick. The etching process also removes more material at the top surface of the trace than at the bottom, leaving a trace with a trapezoidal cross- sectional shape, degrading signal integrity in some applications. Using the recesses 298 to control the aspect ratio of the conductive traces 292 and the conductive pillars 294 results in a more rectangular or square cross-section, with the corresponding improvement in signal integrity.
[00103] In another embodiment, pre-patterned or pre-etched thin conductive foil circuit traces are transferred to the recesses 298. For example, a pressure sensitive adhesive can be used to retain the copper foil circuit traces in the recesses 298. The trapezoidal cross-sections of the pre-formed conductive foil traces are then post- plated. The plating material fills the open spaces in the recesses 298 not occupied by the foil circuit geometry, resulting in a substantially rectangular or square cross- sectional shape corresponding to the shape of the recesses 298.
[00104] In another embodiment, a thin conductive foil is pressed into the recesses 298, and the edges of the recesses 298 acts to cut or shear the conductive foil. The process locates a portion of the conductive foil in the recesses 298, but leaves the negative pattern of the conductive foil not wanted outside and above the recesses 298 for easy removal. Again, the foil in the recesses 298 is preferably post plated to add material to increase the thickness of the conductive traces 292 in the circuit geometry and to fill any voids left between the conductive foil and the recesses 298.
[00105] Figure 20 illustrates a high density electrical circuit 300 with printed electrical devices 302. The electrical devices 302 can include passive or active functional elements. Passive structure refers to a structure having a desired electrical, magnetic, or other property, including but not limited to a conductor, resistor, capacitor, inductor, insulator, dielectric, suppressor, filter, varistor, ferromagnet, and the like. In the illustrated embodiment, electrical devices 302 include printed LED indicator 304 and display electronics 306. Geometries can also be printed to provide capacitive coupling 308. Compliant material can be added between circuit geometry, such as discussed above, so the present electrical circuit compliance within the connector.
[00106] The electrical devices 302 are preferably printed during construction of the circuit assembly 300. The electrical devices 302 can be ground planes, power planes, electrical connections to other circuit members, dielectric layers, conductive traces, transistors, capacitors, resistors, RF antennae, shielding, filters, signal or power altering and enhancing devices, memory devices, embedded IC, and the like. For example, the electrical devices 302 can be formed using printing technology, adding intelligence to the high density electrical circuit 300. Features that are typically located on other circuit members can be incorporated into the circuit 300 in accordance with an embodiment of the present disclosure.
[00107] The availability of printable silicon inks provides the ability to print electrical devices 302, such as disclosed in U.S. Pat. No. 7,485,345 (Renn et al.); 7,382,363 (Albert et al.); 7,148,128 (Jacobson); 6,967,640 (Albert et al.); 6,825,829 (Albert et al.); 6,750,473 (Amundson et al.); 6,652,075 (Jacobson); 6,639,578 (Comiskey et al.); 6,545,291 (Amundson et al.); 6,521 ,489 (Duthaler et al.); 6,459,418 (Comiskey et al.); 6,422,687 (Jacobson); 6,413,790 (Duthaler et al.); 6,312,971 (Amundson et al.); 6,252,564 (Albert et al.); 6,177,921 (Comiskey et al.); 6, 120,588 (Jacobson); 6, 1 18,426 (Albert et al.); and U .S. Pat. Publication No. 2008/0008822 (Kowalski et al.), which are hereby incorporated by reference. In particular, U .S. Patent Nos. 6,506,438 (Duthaler et al.) and 6,750,473 (Amundson et al.), which are incorporated by reference, teach using ink-jet printing to make various electrical devices, such as, resistors, capacitors, diodes, inductors (or elements which may be used in radio applications or magnetic or electric field transmission of power or data), semiconductor logic elements, electro-optical elements, transistor (including, light emitting, light sensing or solar cell elements, field effect transistor, top gate structures), and the like.
[00108] The electrical devices 302 can also be created by aerosol printing, such as disclosed in U.S. Patent Nos. 7,674,671 (Renn et al.); 7,658,163 (Renn et al.); 7,485,345 (Renn et al.); 7,045,015 (Renn et al.); and 6,823,124 (Renn et al.), which are hereby incorporated by reference.
[00109] Printing processes are preferably used to fabricate various functional structures, such as conductive paths and electrical devices, without the use of masks or resists. Features down to about 10 microns can be directly written in a wide virtually any substrate - silicon, glass, polymers, metals and ceramics. The substrates can be planar and non-planar surfaces. The printing process is typically followed by a thermal treatment, such as in a furnace or with a laser, to achieve dense functionalized structures.
[00110] Ink jet printing of electronically active inks can be done on a large class of substrates, without the requirements of standard vacuum processing or etching. The inks may incorporate mechanical, electrical or other properties, such as, conducting, insulating, resistive, magnetic, semi conductive, light modulating, piezoelectric, spin, optoelectronic, thermoelectric or radio frequency.
[00111] A plurality of ink drops are dispensed from the print head directly to a substrate or on an intermediate transfer member. The transfer member can be a planar or non-planar structure, such as a drum. The surface of the transfer member can be coated with a non-sticking layer, such as silicone, silicone rubber, or Teflon.
[00112] The ink (also referred to as function inks) can include conductive materials, semi-conductive materials (e.g., p-type and n-type semiconducting materials), metallic material, insulating materials, and/or release materials. The ink pattern can be deposited in precise locations on a substrate to create fine lines having a width smaller than 10 microns, with precisely controlled spaces between the lines. For example, the ink drops form an ink pattern corresponding to portions of a transistor, such as a source electrode, a drain electrode, a dielectric layer, a semiconductor layer, or a gate electrode.
[00113] The substrate can be an insulating polymer, such as polyethylene terephthalate (PET), polyester, polyethersulphone (PES), polyimide film (e.g. Kapton, available from DuPont located in Wilmington, DE; Upilex available from Ube Corporation located in Japan), or polycarbonate. Alternatively, the substrate can be made of an insulator such as undoped silicon, glass, or a plastic material. The substrate can also be patterned to serve as an electrode. The substrate can further be a metal foil insulated from the gate electrode by a non-conducting material. The substrate can also be a woven material or paper, planarized or otherwise modified on at least one surface by a polymeric or other coating to accept the other structures.
[00114] Electrodes can be printed with metals, such as aluminum or gold, or conductive polymers, such as polythiophene or polyaniline. The electrodes may also include a printed conductor, such as a polymer film comprising metal particles, such or some other conductive carbon material, or a conductive oxide such as tin oxide or indium tin oxide.
[00115] Dielectric layers can be printed with a silicon dioxide layer, an insulating polymer, such as polyimide and its derivatives, poly-vinyl phenol, polymethylmethacrylate, polyvinyldenedifluoride, an inorganic oxide, such as metal oxide, an inorganic nitride such as silicon nitride, or an inorganic /organic composite material such as an organic-substituted silicon oxide, or a sol-gel organosilicon glass. Dielectric layers can also include a bicylcobutene derivative (BCB) available from Dow Chemical (Midland, Mich.), spin-on glass, or dispersions of dielectric colloid materials in a binder or solvent.
[00116] Semiconductor layers can be printed with polymeric semiconductors, such as, polythiophene, poly(3-alkyl)thiophenes, alkyl-substituted oligothiophene, polythienylenevinylene, poly(para-phenylenevinylene) and doped versions of these polymers. An example of suitable oligomeric semiconductor is alpha- hexathienylene. Horowitz, Organic Field-Effect Transistors, Adv. Mater., 10, No. 5, p. 365 (1998) describes the use of unsubstituted and alkyl-substituted oligothiophenes in transistors. A field effect transistor made with regioregular poly(3- hexylthiophene) as the semiconductor layer is described in Bao et al., Soluble and Processable Regioregular Poly(3-hexylthiophene) for Thin Film Field-Effect Transistor Applications with High Mobility, Appl. Phys. Lett. 69 (26), p. 4108 (December 1996). A field effect transistor made with a-hexathienylene is described in U.S. Pat. No. 5,659,181 , which is incorporated herein by reference.
[00117] A protective layer can optionally be printed onto the electrical devices. The protective layer can be an aluminum film, a metal oxide coating, a polymeric film, or a combination thereof.
[00118] Organic semiconductors can be printed using suitable carbon-based compounds, such as, pentacene, phthalocyanine, benzodithiophene, buckminsterfullerene or other fullerene derivatives, tetracyanonaphthoquinone, and tetrakisimethylanimoethylene. The materials provided above for forming the substrate, the dielectric layer, the electrodes, or the semiconductor layer are exemplary only. Other suitable materials known to those skilled in the art having properties similar to those described above can be used in accordance with the present disclosure. dispensing one or more fluids onto a desired media, such as for example, a conducting fluid solution, a semiconducting fluid solution, an insulating fluid solution, and a precursor material to facilitate subsequent deposition. The precursor material can be surface active agents, such as octadecyltrichlorosilane (OTS).
[00120] Alternatively, a separate print head is used for each fluid solution. The print head nozzles can be held at different potentials to aid in atomization and imparting a charge to the droplets, such as disclosed in U.S. Pat. No. 7,148,128 (Jacobson), which is hereby incorporated by reference. Alternate print heads are disclosed in U.S. Pat. No. 6,626,526 (Ueki et al.), and U.S. Pat. Publication Nos. 2006/0044357 (Andersen et al.) and 2009/0061089 (King et al.), which are hereby incorporated by reference.
[00121] The print head preferably uses a pulse-on-demand method, and can employ one of the following methods to dispense the ink drops: piezoelectric, magnetostrictive, electromechanical, electro pneumatic, electrostatic, rapid ink heating, magneto hydrodynamic, or any other technique well known to those skilled in the art. The deposited ink patterns typically undergo a curing step or another processing step before subsequent layers are applied.
[00122] While ink jet printing is preferred, the term "printing" is intended to include all forms of printing and coating, including: pre-metered coating such as patch die coating, slot or extrusion coating, slide or cascade coating, and curtain coating; roll coating such as knife over roll coating, forward and reverse roll coating; gravure coating; dip coating; spray coating; meniscus coating; spin coating; brush coating; air knife coating; screen printing processes; electrostatic printing processes; thermal printing processes; and other similar techniques.
[00123] Figure 21 illustrates an alternate high density electrical circuit 320 with compliant material 322 added between circuit geometries 324, 326 to facilitate insertion of exposed circuit geometries 328, 330 into a receptacle or socket. The liquid dielectric is typically imaged to create the recesses that receive the compliant material 322. The compliant material 322 can supplement or replace the compliance in the receptacle or socket. In one embodiment, the compliance is provided by a combination of the compliant material 322 and the exposed circuit geometries 328, 330. with integral terminals 350 in accordance with an embodiment of the present disclosure. The integral terminals 350 are grown directly in first circuit member 352 as discussed herein. The first circuit member 352 may be a semiconductor package substrate, printed circuit member, a flexible circuit, a socket housing, or the like.
[00125] In the illustrated embodiment, mating connector 354 is an interconnect to second circuit member 356, such as a PCB. Planar contacts 358 are etched in place within interconnect housing 360 or formed separately and assembled into connector housing 360. The contacts 358 include one or more beams 362 that are permitted to flex within the housing 360.
[00126] In the illustrated embodiment, protrusion 366 at distal ends of the beams 362 are configured to engage with the terminals 350, causing the beams 362 to flex outward in direction 370. Once the first circuit member 452 is fully engaged with the connector 454, the protrusions 366 are biased into engagement with undercuts 368 on the integral terminals 350 by bias force 364. In one embodiment, the bias force 364 retains the circuit member 352 to the connector housing 360. An external fixation mechanism may also be used to secure the first circuit member 352 to the housing 360.
[00127] Figure 23 illustrates an embodiment for forming a snap-fit coupling with the integral terminals 350 in accordance with an embodiment of the present disclosure. Vertical contacts 380 include a pair of opposing beams 382A, 382B that flex outward 384 as integral terminals 350 are brought into engagement in direction 386. Distal portions 388 of the terminals 350 preferably have a circular cross sectional shape that facilitates engagement.
[00128] The circuit member 352 is moved in the direction 386 until it engages with connector housing 390. In one embodiment, space 392 between the connector housing 390 and the integral contact 350 is slightly greater than radius of the distal portion 388 of the contact 350 so the beams 382 are continually biases against the contact 350. In another embodiment, once the terminals 350 are in the space 392, the beams 382 close to form a snap-fit engagement with the terminals 350.
[00129] Figures 24A and 24B illustrate alternate engagement mechanisms between contact members 400A, 400B ("400") and integral terminals 402 on first circuit member 404 in accordance with an embodiment of the present disclosure. Distal portions 406A, 406B ("406") of the contacts members 400 are configured to ("408") have shapes complementary to neck portions 410 of the terminals 402. In one embodiment, distal portion 406B of contact member 400B is formed from two discrete beams 414A, 414B that can flex outward during engagement with the terminals 402.
[00130] Bends 412 near the distal portions 406 permit the terminals 402 to slide into engagement along axis 416 that is generally perpendicular to primary axis 418 of the contact members 400. Lateral or biasing loads can optionally be provided for low insertion force applications. An external mechanism can be used to maintain contact load 416 or engagement between the terminals 402 and the contact members 400 such that the terminals 402 are held by the contacts 400.
[00131] In another embodiment, the terminals 402 are forced into engagement with the contact members 400 with a lateral or biasing load 416 in a zero Insertion force mechanism with an external feature maintaining contact load 416 against the contact members 400 in a normally open environment, or the mechanism releases preloaded contact members 400 such that they engage with the terminals 402 in a normally closed environment. The terminals 402 can be installed and engaged in an environment containing each of the loading mechanisms described (normal force snap retention, LIF, ZIF etc.).
[00132] Figure 25 illustrates an embodiment in which terminals 420 are soldered to PCB 422 in accordance with an embodiment of the present disclosure. Solder 424 wicks around the terminals 420 during reflow and engages with undercuts 426 to create an extremely strong joint. The present integral terminals 420 with undercuts 426 creates a joint much stronger than the conventional BGA solder ball
[00133] BGA solder ball joints often require under fill to survive thermal or mechanical shock, not required in the illustrated embodiment because the integral terminals 420 provide a natural controlled height standoff 428. The neck region 426 of the terminals 420 provides a natural level of compliance as the ductile copper can provide some level of decoupling between the terminal 420, the circuit member 430 (such as an IC package) and the system board 422 to reduce the failure effects of thermal expansion coefficient disparities as well as mechanical stress of shock.
[00134] Figure 26 illustrates a solder deposit 450 on the terminals 452 in accordance with an embodiment of the present disclosure. In the illustrated embodiment, the terminals 452 are tin plated and are capped with solder 450 in a popular for high pin count area array devices as an alternative to flip chip or C4 attachment. The advantage of the present approach is that flip chip and C4 attachments are limited in pitch due to the potential for solder bridging of conventional solder balls as the spacing between them during reflow is reduced.
[00135] The terminal deposition technique can also be enhanced to create the center conductor for a RF or SMA style coaxial connector, with the dielectric spacer and grounded shroud components added as a discrete component or assembly. The terminal deposition technique can also be enhanced to create the center conductor for a RF or SMA style coaxial connector, with the dielectric spacer and grounded shroud components constructed with an in-situ molded process, with the grounding shield features selectively metalized to the desired portions of the molded polymer. Embodiments of this method are disclosed in commonly assigned PCT application entitled SEMICONDUCTOR SOCKET WITH DIRECT SELECTIVE METALIZATION (Attorney Docket No. 49956-3701 ), filed on the same date herewith, which is hereby incorporated by reference.
[00136] Where a range of values is provided, it is understood that each intervening value, to the tenth of the unit of the lower limit unless the context clearly dictates otherwise, between the upper and lower limit of that range and any other stated or intervening value in that stated range is encompassed within the embodiments of the disclosure. The upper and lower limits of these smaller ranges which may independently be included in the smaller ranges is also encompassed within the embodiments of the disclosure, subject to any specifically excluded limit in the stated range. Where the stated range includes one or both of the limits, ranges excluding either both of those included limits are also included in the embodiments of the present disclosure.
[00137] Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the embodiments of the present disclosure belong. Although any methods and materials similar or equivalent to those described herein can also be used in the practice or testing of the embodiments of the present disclosure, the preferred methods and materials are now described. All patents and publications mentioned herein, including those cited in the Background of the application, are hereby connection with which the publications are cited.
[00138] The publications discussed herein are provided solely for their disclosure prior to the filing date of the present application. Nothing herein is to be construed as an admission that the present disclosure is not entitled to antedate such publication by virtue of prior invention. Further, the dates of publication provided may be different from the actual publication dates which may need to be independently confirmed.
[00139] Other embodiments of the disclosure are possible. Although the description above contains much specificity, these should not be construed as limiting the scope of the disclosure, but as merely providing illustrations of some of the presently preferred embodiments of this disclosure. It is also contemplated that various combinations or sub-combinations of the specific features and aspects of the embodiments may be made and still fall within the scope of the present disclosure. It should be understood that various features and aspects of the disclosed embodiments can be combined with or substituted for one another in order to form varying modes of the disclosed embodiments of the disclosure. Thus, it is intended that the scope of the present disclosure herein disclosed should not be limited by the particular disclosed embodiments described above.
[00140] Thus the scope of this disclosure should be determined by the appended claims and their legal equivalents. Therefore, it will be appreciated that the scope of the present disclosure fully encompasses other embodiments which may become obvious to those skilled in the art, and that the scope of the present disclosure is accordingly to be limited by nothing other than the appended claims, in which reference to an element in the singular is not intended to mean "one and only one" unless explicitly so stated, but rather "one or more." All structural, chemical, and functional equivalents to the elements of the above-described preferred embodiment(s) that are known to those of ordinary skill in the art are expressly incorporated herein by reference and are intended to be encompassed by the present claims. Moreover, it is not necessary for a device or method to address each and every problem sought to be solved by the present disclosure, for it to be encompassed by the present claims. Furthermore, no element, component, or method step in the present disclosure is intended to be dedicated to the public the claims.

Claims

1. A circuit assembly comprising:
an array of integral terminals plated on a first circuit member comprising an electro-lessly plated shell with an electro-plated core;
a printed circuit board with a plurality of recesses configured to receive the integral terminals; and
a plurality of contact members electrically coupled with circuitry on the printed circuit board and extending into a recesses;
wherein insertion of the integral terminals on the first circuit member into the recesses on the PCB is a zero or low insertion force process, such that shifting the printed circuit board relative to the first circuit member electrically couples the integral terminals with the contact members.
2. The circuit assembly of claim 1 wherein the integral terminal comprise a non-cylindrical shape.
3. The circuit assembly of claim 1 wherein the integral terminals comprise a plurality of discrete contact surfaces configured to electrically couple with the contact members on the PCB.
4. The circuit assembly of claim 1 wherein the integral terminal comprise at least one undercut.
5. The circuit assembly of claim 1 wherein the integral terminals comprise a narrow portions and the contact members comprise arms that mechanically couple with the narrow portions on the integral terminals.
6. The circuit assembly of claim 1 wherein the integral terminals comprise a narrow portions and the contact members comprise curvilinear arms that flex to receive the narrow portions on the integral terminals.
7. The circuit assembly of claim 1 wherein the contact members comprise arms that extend around at least 150 degrees of the integral terminals.
8. The circuit assembly of claim 1 wherein the contact members comprise arms that contact at least two sides of the integral terminals.
9. The circuit assembly of claim 1 wherein the first circuit member comprises a package for an IC device or a socket for an IC device.
10. A method of making an array of integral terminals on a circuit assembly comprising the steps of: circuit member, imaged to include a plurality of first recesses corresponding to the array of integral terminals;
processing selected surfaces of the first recesses to accept electro-less conductive plating deposition;
electro-lessly plating the selected surfaces of the first recesses to create a plurality of first conductive structures electrically coupled to, and extending generally perpendicular to, the first circuitry layer;
electro-plating the electro-less plating to substantially first recesses with a conductive material;
repeating the depositing, processing, electro-less plating, and electro-plating steps to form the integral terminals of a desired shape; and
removing the dielectric layers to expose the terminals.
11 . The method of claim 10 wherein the exposed terminal comprise a non- cylindrical shape.
12. The method of claim 10 wherein the integral terminals comprise a plurality of discrete contact surfaces.
13. The method of claim 10 comprising the steps of:
preparing a printed circuit board with a plurality of recesses configured to receive the integral terminals;
positioning a plurality of contact members that are electrically coupled with circuitry on the printed circuit board and extend into the recesses;
inserting the integral terminals on the first circuit member into the recesses of the printed circuit board; and
shifting the printed circuit board relative to the first circuit member to electrically couple the integral terminals with the contact members.
14. The method of claim 13 comprising electrically coupling multiple surfaces on the exposed terminal with the contact members on the PCB.
15. The method of claim 13 wherein the integral terminals comprise a narrow portions, the method comprising mechanically coupling arms on the contact members with the narrow portions on the integral terminals.
narrow portions, the method comprising flexing curvilinear arms on the contact members to receive the narrow portions on the integral terminals.
17. The method of claim 13 wherein the contact members comprise arms and the method comprises extending the arms around at least 150 degrees of the integral terminals.
18. The method of claim 13 wherein the contact members comprise arms and the method comprises electrically coupling the arms with at least two locations on the integral terminals.
19. The method of claim 13 comprising the steps of:
filling the recesses in the printed circuit board with a solder mask;
processing a circuitry layer on the printed circuit board including the contact members; and
removing the solder mask from the recesses to leave the contact members in a cantilevered configuration with respect to the recesses.
PCT/US2013/030981 2010-06-03 2013-03-13 High speed circuit assembly with integral terminal and mating bias loading electrical connector assembly WO2014011228A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US14/408,039 US9350124B2 (en) 2010-12-01 2013-03-13 High speed circuit assembly with integral terminal and mating bias loading electrical connector assembly
US14/864,215 US10159154B2 (en) 2010-06-03 2015-09-24 Fusion bonded liquid crystal polymer circuit structure
US15/062,137 US9761520B2 (en) 2012-07-10 2016-03-06 Method of making an electrical connector having electrodeposited terminals
US15/698,271 US10453789B2 (en) 2012-07-10 2017-09-07 Electrodeposited contact terminal for use as an electrical connector or semiconductor packaging substrate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261669893P 2012-07-10 2012-07-10
US61/669,893 2012-07-10

Related Child Applications (4)

Application Number Title Priority Date Filing Date
PCT/US2013/030856 Continuation-In-Part WO2014011226A1 (en) 2009-06-02 2013-03-13 Hybrid printed circuit assembly with low density main core and embedded high density circuit regions
US14/408,205 Continuation-In-Part US9699906B2 (en) 2009-06-02 2013-03-13 Hybrid printed circuit assembly with low density main core and embedded high density circuit regions
US14/408,039 A-371-Of-International US9350124B2 (en) 2010-12-01 2013-03-13 High speed circuit assembly with integral terminal and mating bias loading electrical connector assembly
US15/062,137 Continuation-In-Part US9761520B2 (en) 2012-07-10 2016-03-06 Method of making an electrical connector having electrodeposited terminals

Publications (1)

Publication Number Publication Date
WO2014011228A1 true WO2014011228A1 (en) 2014-01-16

Family

ID=49916460

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2013/030981 WO2014011228A1 (en) 2010-06-03 2013-03-13 High speed circuit assembly with integral terminal and mating bias loading electrical connector assembly

Country Status (1)

Country Link
WO (1) WO2014011228A1 (en)

Cited By (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8789272B2 (en) 2009-06-02 2014-07-29 Hsio Technologies, Llc Method of making a compliant printed circuit peripheral lead semiconductor test socket
US8803539B2 (en) 2009-06-03 2014-08-12 Hsio Technologies, Llc Compliant wafer level probe assembly
US8912812B2 (en) 2009-06-02 2014-12-16 Hsio Technologies, Llc Compliant printed circuit wafer probe diagnostic tool
US8928344B2 (en) 2009-06-02 2015-01-06 Hsio Technologies, Llc Compliant printed circuit socket diagnostic tool
US8955216B2 (en) 2009-06-02 2015-02-17 Hsio Technologies, Llc Method of making a compliant printed circuit peripheral lead semiconductor package
US8955215B2 (en) 2009-05-28 2015-02-17 Hsio Technologies, Llc High performance surface mount electrical interconnect
US8970031B2 (en) 2009-06-16 2015-03-03 Hsio Technologies, Llc Semiconductor die terminal
US8981809B2 (en) 2009-06-29 2015-03-17 Hsio Technologies, Llc Compliant printed circuit semiconductor tester interface
US8981568B2 (en) 2009-06-16 2015-03-17 Hsio Technologies, Llc Simulated wirebond semiconductor package
US8988093B2 (en) 2009-06-02 2015-03-24 Hsio Technologies, Llc Bumped semiconductor wafer or die level electrical interconnect
US8987886B2 (en) 2009-06-02 2015-03-24 Hsio Technologies, Llc Copper pillar full metal via electrical circuit structure
US8984748B2 (en) 2009-06-29 2015-03-24 Hsio Technologies, Llc Singulated semiconductor device separable electrical interconnect
US9054097B2 (en) 2009-06-02 2015-06-09 Hsio Technologies, Llc Compliant printed circuit area array semiconductor device package
US9076884B2 (en) 2009-06-02 2015-07-07 Hsio Technologies, Llc Compliant printed circuit semiconductor package
US9093767B2 (en) 2009-06-02 2015-07-28 Hsio Technologies, Llc High performance surface mount electrical interconnect
US9136196B2 (en) 2009-06-02 2015-09-15 Hsio Technologies, Llc Compliant printed circuit wafer level semiconductor package
US9184145B2 (en) 2009-06-02 2015-11-10 Hsio Technologies, Llc Semiconductor device package adapter
US9184527B2 (en) 2009-06-02 2015-11-10 Hsio Technologies, Llc Electrical connector insulator housing
US9231328B2 (en) 2009-06-02 2016-01-05 Hsio Technologies, Llc Resilient conductive electrical interconnect
US9232654B2 (en) 2009-06-02 2016-01-05 Hsio Technologies, Llc High performance electrical circuit structure
US9276336B2 (en) 2009-05-28 2016-03-01 Hsio Technologies, Llc Metalized pad to electrical contact interface
US9277654B2 (en) 2009-06-02 2016-03-01 Hsio Technologies, Llc Composite polymer-metal electrical contacts
US9276339B2 (en) 2009-06-02 2016-03-01 Hsio Technologies, Llc Electrical interconnect IC device socket
US9320144B2 (en) 2009-06-17 2016-04-19 Hsio Technologies, Llc Method of forming a semiconductor socket
US9318862B2 (en) 2009-06-02 2016-04-19 Hsio Technologies, Llc Method of making an electronic interconnect
US9320133B2 (en) 2009-06-02 2016-04-19 Hsio Technologies, Llc Electrical interconnect IC device socket
US9350093B2 (en) 2010-06-03 2016-05-24 Hsio Technologies, Llc Selective metalization of electrical connector or socket housing
US9414500B2 (en) 2009-06-02 2016-08-09 Hsio Technologies, Llc Compliant printed flexible circuit
US9536815B2 (en) 2009-05-28 2017-01-03 Hsio Technologies, Llc Semiconductor socket with direct selective metalization
US9559447B2 (en) 2015-03-18 2017-01-31 Hsio Technologies, Llc Mechanical contact retention within an electrical connector
US9613841B2 (en) 2009-06-02 2017-04-04 Hsio Technologies, Llc Area array semiconductor device package interconnect structure with optional package-to-package or flexible circuit to package connection
US9689897B2 (en) 2010-06-03 2017-06-27 Hsio Technologies, Llc Performance enhanced semiconductor socket
US9699906B2 (en) 2009-06-02 2017-07-04 Hsio Technologies, Llc Hybrid printed circuit assembly with low density main core and embedded high density circuit regions
US9761520B2 (en) 2012-07-10 2017-09-12 Hsio Technologies, Llc Method of making an electrical connector having electrodeposited terminals
US9930775B2 (en) 2009-06-02 2018-03-27 Hsio Technologies, Llc Copper pillar full metal via electrical circuit structure
US10159154B2 (en) 2010-06-03 2018-12-18 Hsio Technologies, Llc Fusion bonded liquid crystal polymer circuit structure
US10340393B2 (en) 2013-01-07 2019-07-02 Micron Technology, Inc. Semiconductor constructions, methods of forming vertical memory strings, and methods of forming vertically-stacked structures
US10506722B2 (en) 2013-07-11 2019-12-10 Hsio Technologies, Llc Fusion bonded liquid crystal polymer electrical circuit structure
US10667410B2 (en) 2013-07-11 2020-05-26 Hsio Technologies, Llc Method of making a fusion bonded circuit structure

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5454161A (en) * 1993-04-29 1995-10-03 Fujitsu Limited Through hole interconnect substrate fabrication process
US6350386B1 (en) * 2000-09-20 2002-02-26 Charles W. C. Lin Method of making a support circuit with a tapered through-hole for a semiconductor chip assembly
US20080020566A1 (en) * 2005-04-21 2008-01-24 Endicott Interconnect Technologies, Inc. Method of making an interposer
US20080057753A1 (en) * 2003-07-16 2008-03-06 Gryphics, Inc Fine pitch electrical interconnect assembly
US20080248596A1 (en) * 2007-04-04 2008-10-09 Endicott Interconnect Technologies, Inc. Method of making a circuitized substrate having at least one capacitor therein

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5454161A (en) * 1993-04-29 1995-10-03 Fujitsu Limited Through hole interconnect substrate fabrication process
US6350386B1 (en) * 2000-09-20 2002-02-26 Charles W. C. Lin Method of making a support circuit with a tapered through-hole for a semiconductor chip assembly
US20080057753A1 (en) * 2003-07-16 2008-03-06 Gryphics, Inc Fine pitch electrical interconnect assembly
US20080020566A1 (en) * 2005-04-21 2008-01-24 Endicott Interconnect Technologies, Inc. Method of making an interposer
US20080248596A1 (en) * 2007-04-04 2008-10-09 Endicott Interconnect Technologies, Inc. Method of making a circuitized substrate having at least one capacitor therein

Cited By (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8955215B2 (en) 2009-05-28 2015-02-17 Hsio Technologies, Llc High performance surface mount electrical interconnect
US9660368B2 (en) 2009-05-28 2017-05-23 Hsio Technologies, Llc High performance surface mount electrical interconnect
US9536815B2 (en) 2009-05-28 2017-01-03 Hsio Technologies, Llc Semiconductor socket with direct selective metalization
US9276336B2 (en) 2009-05-28 2016-03-01 Hsio Technologies, Llc Metalized pad to electrical contact interface
US9093767B2 (en) 2009-06-02 2015-07-28 Hsio Technologies, Llc High performance surface mount electrical interconnect
US9184527B2 (en) 2009-06-02 2015-11-10 Hsio Technologies, Llc Electrical connector insulator housing
US8912812B2 (en) 2009-06-02 2014-12-16 Hsio Technologies, Llc Compliant printed circuit wafer probe diagnostic tool
US10609819B2 (en) 2009-06-02 2020-03-31 Hsio Technologies, Llc Hybrid printed circuit assembly with low density main core and embedded high density circuit regions
US9414500B2 (en) 2009-06-02 2016-08-09 Hsio Technologies, Llc Compliant printed flexible circuit
US8988093B2 (en) 2009-06-02 2015-03-24 Hsio Technologies, Llc Bumped semiconductor wafer or die level electrical interconnect
US8987886B2 (en) 2009-06-02 2015-03-24 Hsio Technologies, Llc Copper pillar full metal via electrical circuit structure
US8789272B2 (en) 2009-06-02 2014-07-29 Hsio Technologies, Llc Method of making a compliant printed circuit peripheral lead semiconductor test socket
US9054097B2 (en) 2009-06-02 2015-06-09 Hsio Technologies, Llc Compliant printed circuit area array semiconductor device package
US9076884B2 (en) 2009-06-02 2015-07-07 Hsio Technologies, Llc Compliant printed circuit semiconductor package
US9613841B2 (en) 2009-06-02 2017-04-04 Hsio Technologies, Llc Area array semiconductor device package interconnect structure with optional package-to-package or flexible circuit to package connection
US9136196B2 (en) 2009-06-02 2015-09-15 Hsio Technologies, Llc Compliant printed circuit wafer level semiconductor package
US9184145B2 (en) 2009-06-02 2015-11-10 Hsio Technologies, Llc Semiconductor device package adapter
US8955216B2 (en) 2009-06-02 2015-02-17 Hsio Technologies, Llc Method of making a compliant printed circuit peripheral lead semiconductor package
US9231328B2 (en) 2009-06-02 2016-01-05 Hsio Technologies, Llc Resilient conductive electrical interconnect
US9232654B2 (en) 2009-06-02 2016-01-05 Hsio Technologies, Llc High performance electrical circuit structure
US8928344B2 (en) 2009-06-02 2015-01-06 Hsio Technologies, Llc Compliant printed circuit socket diagnostic tool
US9277654B2 (en) 2009-06-02 2016-03-01 Hsio Technologies, Llc Composite polymer-metal electrical contacts
US9276339B2 (en) 2009-06-02 2016-03-01 Hsio Technologies, Llc Electrical interconnect IC device socket
US9699906B2 (en) 2009-06-02 2017-07-04 Hsio Technologies, Llc Hybrid printed circuit assembly with low density main core and embedded high density circuit regions
US9318862B2 (en) 2009-06-02 2016-04-19 Hsio Technologies, Llc Method of making an electronic interconnect
US9320133B2 (en) 2009-06-02 2016-04-19 Hsio Technologies, Llc Electrical interconnect IC device socket
US9930775B2 (en) 2009-06-02 2018-03-27 Hsio Technologies, Llc Copper pillar full metal via electrical circuit structure
US8803539B2 (en) 2009-06-03 2014-08-12 Hsio Technologies, Llc Compliant wafer level probe assembly
US8981568B2 (en) 2009-06-16 2015-03-17 Hsio Technologies, Llc Simulated wirebond semiconductor package
US8970031B2 (en) 2009-06-16 2015-03-03 Hsio Technologies, Llc Semiconductor die terminal
US9320144B2 (en) 2009-06-17 2016-04-19 Hsio Technologies, Llc Method of forming a semiconductor socket
US8984748B2 (en) 2009-06-29 2015-03-24 Hsio Technologies, Llc Singulated semiconductor device separable electrical interconnect
US8981809B2 (en) 2009-06-29 2015-03-17 Hsio Technologies, Llc Compliant printed circuit semiconductor tester interface
US9689897B2 (en) 2010-06-03 2017-06-27 Hsio Technologies, Llc Performance enhanced semiconductor socket
US9350093B2 (en) 2010-06-03 2016-05-24 Hsio Technologies, Llc Selective metalization of electrical connector or socket housing
US10159154B2 (en) 2010-06-03 2018-12-18 Hsio Technologies, Llc Fusion bonded liquid crystal polymer circuit structure
US9350124B2 (en) 2010-12-01 2016-05-24 Hsio Technologies, Llc High speed circuit assembly with integral terminal and mating bias loading electrical connector assembly
US9761520B2 (en) 2012-07-10 2017-09-12 Hsio Technologies, Llc Method of making an electrical connector having electrodeposited terminals
US10453789B2 (en) 2012-07-10 2019-10-22 Hsio Technologies, Llc Electrodeposited contact terminal for use as an electrical connector or semiconductor packaging substrate
US10340393B2 (en) 2013-01-07 2019-07-02 Micron Technology, Inc. Semiconductor constructions, methods of forming vertical memory strings, and methods of forming vertically-stacked structures
US10506722B2 (en) 2013-07-11 2019-12-10 Hsio Technologies, Llc Fusion bonded liquid crystal polymer electrical circuit structure
US10667410B2 (en) 2013-07-11 2020-05-26 Hsio Technologies, Llc Method of making a fusion bonded circuit structure
US9559447B2 (en) 2015-03-18 2017-01-31 Hsio Technologies, Llc Mechanical contact retention within an electrical connector
US9755335B2 (en) 2015-03-18 2017-09-05 Hsio Technologies, Llc Low profile electrical interconnect with fusion bonded contact retention and solder wick reduction

Similar Documents

Publication Publication Date Title
US9350124B2 (en) High speed circuit assembly with integral terminal and mating bias loading electrical connector assembly
US10609819B2 (en) Hybrid printed circuit assembly with low density main core and embedded high density circuit regions
US9699906B2 (en) Hybrid printed circuit assembly with low density main core and embedded high density circuit regions
WO2014011228A1 (en) High speed circuit assembly with integral terminal and mating bias loading electrical connector assembly
US9603249B2 (en) Direct metalization of electrical circuit structures
US9930775B2 (en) Copper pillar full metal via electrical circuit structure
US8987886B2 (en) Copper pillar full metal via electrical circuit structure
US9320133B2 (en) Electrical interconnect IC device socket
US9232654B2 (en) High performance electrical circuit structure
US9276339B2 (en) Electrical interconnect IC device socket
US9196980B2 (en) High performance surface mount electrical interconnect with external biased normal force loading
US9184527B2 (en) Electrical connector insulator housing
US9536815B2 (en) Semiconductor socket with direct selective metalization
US9613841B2 (en) Area array semiconductor device package interconnect structure with optional package-to-package or flexible circuit to package connection
US9350093B2 (en) Selective metalization of electrical connector or socket housing
US9276336B2 (en) Metalized pad to electrical contact interface
US8981809B2 (en) Compliant printed circuit semiconductor tester interface
US8955215B2 (en) High performance surface mount electrical interconnect
US20150013901A1 (en) Matrix defined electrical circuit structure
WO2012125331A1 (en) Copper pillar full metal via electrical circuit structure
WO2012074969A2 (en) Electrical interconnect ic device socket
WO2012122142A2 (en) Selective metalization of electrical connector or socket housing

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 13816975

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 14408039

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 13816975

Country of ref document: EP

Kind code of ref document: A1