WO2012018247A1 - A vibrating energy harvester device and methods thereof - Google Patents

A vibrating energy harvester device and methods thereof Download PDF

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Publication number
WO2012018247A1
WO2012018247A1 PCT/MY2010/000294 MY2010000294W WO2012018247A1 WO 2012018247 A1 WO2012018247 A1 WO 2012018247A1 MY 2010000294 W MY2010000294 W MY 2010000294W WO 2012018247 A1 WO2012018247 A1 WO 2012018247A1
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WIPO (PCT)
Prior art keywords
collecting element
charge collecting
arrays
springs
conductive elements
Prior art date
Application number
PCT/MY2010/000294
Other languages
French (fr)
Inventor
Aarti Srirangarajan
A. S. M. Mukter-Uz-Zaman
Masuri Othman
Tark Wei David Khor
Original Assignee
Mimos Berhad
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Filing date
Publication date
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Publication of WO2012018247A1 publication Critical patent/WO2012018247A1/en

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/186—Vibration harvesters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa

Definitions

  • the present invention relates to a vibrating energy harvester device, a method of harvesting energy thereof and a method of assembling said device.
  • US 2008067618 (A1) describes a piezoelectric solution for energy harvesting using a substrate, a piezoelectric wire, a structure, a first electrode and a second electrode.
  • the document above describes a solution that utilizes ultrasound source or an actuator to vibrate nanowires which is complex, expensive and difficult to implement.
  • the solution suggested by the document requires energy to operate the ultrasound source which may be an exercise that is again not environmentally friendly. Therefore there is a need for an environmentally friendly solution that can be used as a replacement for batteries to provide an energy source for devices or systems in a self sufficient manner.
  • a vibrating energy harvester device the device includes at least two conductive plates spaced apart, a plurality of projected conductive elements positionable on each of the at least two conductive plates such that the projected conductive elements are vertically aligned and spaced apart from each other, wherein two arrays of projected conductive elements are facing both the at least two conductive plates and at least one charge collecting element positionable between the two arrays of projected conductive elements, wherein the at least one charge collecting element is electrically connectable to the at least two conductive plates which further include two arrays of projected conductive elements.
  • a method of harvesting energy from a vibrating means includes the steps of receiving vibrational energy from environment, translating vibrational energy from the environment by at least one charge collecting element, accumulating electrical charges from the vibrational energy, collecting electrical charges and storing the electrical charges in a storage means.
  • a method of assembling a vibrating energy harvester means includes the steps of fabricating arrays of vertically aligned piezoelectric material on a substrate, assembling a plurality of covers encapsulating the fabricated arrays and assembling at least one charge collecting element inside an encapsulation and a plurality of springs connected to the at least one charge collecting element and a plurality of covers.
  • Figure 1 illustrates a flowchart depicting a method of assembling a vibrating energy harvester means in the preferred embodiment of the invention
  • Figure 2 illustrates a perspective view of the fabrication of nanowires on a metal alloy substrate in the preferred embodiment of the invention
  • Figure 3 illustrates a perspective view of polished nanowires to a predetermined height in the preferred embodiment of the invention
  • Figure 4 illustrates a perspective view of integration of the plurality of metal alloy substrates that include the arrays of nanowires in the preferred embodiment of the invention
  • Figure 5 illustrates a perspective view of the assembled conductive plates in the preferred embodiment of the invention
  • Figure 6 illustrates a perspective view of the assembled conductive plates and plurality of covers in the preferred embodiment of the invention
  • Figure 7 illustrates a perspective view of the assembled electrode, the plurality of springs and mass with the at least two covers together with the at least two conductive plates in the preferred embodiment of the invention
  • Figure 8 illustrates a top, side and bottom view of the vibrating energy harvester device in the preferred embodiment of the invention
  • Figure 9 illustrates a top, side and bottom view of the vibrating energy harvester device in a second embodiment of the invention.
  • the present invention relates to a vibrating energy harvester device, a method of harvesting energy thereof and a method of assembling said device.
  • this specification will describe the present invention according to the preferred embodiments of the present invention. However, it is to be understood that limiting the description to the preferred embodiments of the invention is merely to facilitate discussion of the present invention and it is envisioned that those skilled in the art may devise various modifications and equivalents without departing from the scope of the appended claims.
  • the device (100) includes at least two conductive plates (101 , 105) spaced apart, a plurality of projected conductive elements (104) positionable on each of the at least two conductive plates (101 , 105) such that the projected conductive elements (104) are vertically aligned and spaced apart from each other, wherein two arrays of projected conductive elements (104) are facing both the at least two conductive plates (101 , 105) and at least one charge collecting element (103) positionable between the two arrays of projected conductive elements (104), wherein the at least one charge collecting element (103) is electrically connectable to the at least two conductive plates (101 , 105) which further include two arrays of projected conductive elements (104).
  • the device (100) is further connectable to a charge control circuit and a storage unit.
  • An example of the at least one charge collecting element (103) is a metal electrode with corrugated sides that is used in this embodiment of the invention.
  • the electrode is a microelectromechanical systems (MEMS) based charge collecting electrode.
  • MEMS microelectromechanical systems
  • the plurality of projected conductive elements (104) are nanowires which are used in this embodiment of the invention.
  • the nanowires are constructible of piezoelectric material.
  • a plurality of springs (109, 110) are further attachable to the at least two covers (102, 107) such that the at least one charge collecting element (103) is attachable to the plurality of springs (109,110).
  • the plurality of springs (109, 110) are encapsulated by at least two covers (102, 107) that hold the plurality of springs (109,110), nanowires and the charge collecting element (103) together.
  • the plurality of springs (109, 110) used in this embodiment of the invention are two springs that are of two different stiffness values.
  • a mass (106) is positionable in intermediary between each spring (109, 110) and the charge collecting element (103).
  • An example of the charge collecting means (103) used in this embodiment of the invention is an electrode.
  • a longitudinal connecting means may be used between the mass (106) and the electrode as seen in Figure 8.
  • the longitudinal connecting means is a rod (108).
  • the rod (108) may be exchangeable with other longitudinal connecting means depending on application of the device.
  • a method of harvesting energy from a vibrating means includes the steps of receiving vibrational energy from environment, translating vibrational energy from the environment by at least one charge collecting element (103), accumulating electrical charges from the vibrational energy, collecting electrical charges and storing the electrical charges in a storage means.
  • a source of vibration such as environmental vibrations translates energy by vibrating the electrode by means of the plurality of springs (109, 110). These vibrations cause motion of the charge collecting element (103) such as an electrode to be in a vertical direction. This motion is caused by the plurality of springs (109, 110) and the mass (109) leading the corrugated sides of the charge collecting element (103) to brush against the nanowires.
  • the nanowires that are constructed from piezoelectric material experience a compressive and tensile stress on either side of the nanowires, wherein a stress gradient is introduced.
  • the stress gradient gives rise to accumulation of electrical charges on each side of the nanowires.
  • the charges are then collected by the charge collecting element (103).
  • a charge control circuit which is connected to the charge collecting element (103) stores the collected charges in the storage unit. These stored charges may then be used to power up devices that require electrical energy such as electronic devices and systems.
  • the method is repeated as long as micro vibration continues from the source of vibration. Therefore, the electrical energy may be perpetually produced depending on the source of vibration.
  • a method of assembling a vibrating energy harvester means includes the steps of fabricating arrays of vertically aligned piezoelectric material on a substrate, assembling a plurality of covers (102,107) encapsulating the fabricated arrays and assembling at least one charge collecting element (103) inside an encapsulation and a plurality of springs (109, 110) connected to the at least one charge collecting element (103) and a plurality of covers (102, 107).
  • FIG 1 shows a flowchart that illustrates the steps in the method of assembling the vibrating energy harvester means such as the vibrating energy harvester device (100).
  • Fabrication of the nanowires are performed by growing or depositing vertically aligned piezoelectric material such as zinc oxide on a metal alloy substrate as seen in Figure 2. Edges of the nanowires are polished by mechanical or chemical means such that the arrays of nanowires are at a predetermined uniform height as seen in Figure 3.
  • Figure 4 shows the plurality of metal alloy substrates that include the arrays of nanowires are then integrated.
  • Figure 5 shows assembly of the at least two conductive plates (101 , 105) which include the plurality of metal alloy substrates with the arrays of nanowires. The at least two conductive plates (101 , 105) are attached facing each other in the device (100).
  • Figure 6 shows assembly of the at least two covers (102, 107) together with the at least two conductive plates (101 , 105).
  • Figure 7 illustrates assembly of the charge collecting element (103), the plurality of springs (109, 110) and mass (106) with the at least two covers (102, 107) together with the at least two conductive plates (101 , 105).
  • the charge collecting element (103) is fabricated using microtechnology which is then attached to the at least two covers (102, 107) using the plurality of springs (109, 110) and mass (106).
  • the plurality of springs (109, 110) and mass (106) are positioned between the at least two conductive plates (101 , 105).
  • Figure 8 shows a complete assembled and encapsulated vibrating energy harvester device (100). A combination of MEMS based microtechnology and nanotechnology id used to design a self-sustaining power generating apparatus such as the vibrating energy harvester device (100).
  • the plurality of springs (109, 110) are connectable to opposing sides of the charge collecting element (103).
  • An electrode is an example of the charge collecting element (103) in this embodiment of the invention.
  • the plurality of springs (109, 110) are further connectable to at least two anchoring means (111 , 113).
  • the at least two anchoring means (111 , 113) are then attachable to the at least two covers (102, 107) to encapsulate the device (100).
  • the device uses ambient energy to vibrate a microstructure that eliminates the need for a complex setup. This is an improvement over conventional nanoenergy harvesting techniques that require complex setup of ultrasonic source for vibrating nanowires.

Abstract

A vibrating energy harvester device (100) is provided, the device (100) includes at least two conductive plates (101, 105) spaced apart, a plurality of projected conductive elements (104) positionable on each of the at least two conductive plates (101, 105) such that the projected conductive elements (104) are vertically aligned from each other; wherein two arrays of projected conductive elements (104) are facing both the at least two conductive plates (101, 105), at least one charge collecting element (103) positionable between the two arrays of projected conductive elements (104), wherein the at least one charge collecting element (103) is electrically connectable the at least two conductive plates (101, 105) which further include two arrays of projected conductive elements (104).

Description

A VIBRATING ENERGY HARVESTER DEVICE AND METHODS THEREOF
FIELD OF INVENTION The present invention relates to a vibrating energy harvester device, a method of harvesting energy thereof and a method of assembling said device.
BACKGROUND OF INVENTION Conventional batteries and other power sources are used to solve power or energy issues that are faced in systems today. However, these conventional methods are not environmentally friendly as there are bound to be issues with disposal of batteries that lead to chemical contamination to the environment. Batteries also have limitations in terms of its sizes and battery material availability. Replacement of batteries for millions of sensors, for example, would be a costly exercise as it would be difficult to implement as well as time consuming. Especially since sensors are often deployed in open environment. This may entail risking contamination from batteries into the environment.
US 2008067618 (A1) describes a piezoelectric solution for energy harvesting using a substrate, a piezoelectric wire, a structure, a first electrode and a second electrode. However, the document above describes a solution that utilizes ultrasound source or an actuator to vibrate nanowires which is complex, expensive and difficult to implement. Further, the solution suggested by the document requires energy to operate the ultrasound source which may be an exercise that is again not environmentally friendly. Therefore there is a need for an environmentally friendly solution that can be used as a replacement for batteries to provide an energy source for devices or systems in a self sufficient manner.
SUMMARY OF INVENTION
Accordingly there is provided a vibrating energy harvester device, the device includes at least two conductive plates spaced apart, a plurality of projected conductive elements positionable on each of the at least two conductive plates such that the projected conductive elements are vertically aligned and spaced apart from each other, wherein two arrays of projected conductive elements are facing both the at least two conductive plates and at least one charge collecting element positionable between the two arrays of projected conductive elements, wherein the at least one charge collecting element is electrically connectable to the at least two conductive plates which further include two arrays of projected conductive elements.
There is also provided a method of harvesting energy from a vibrating means, the method includes the steps of receiving vibrational energy from environment, translating vibrational energy from the environment by at least one charge collecting element, accumulating electrical charges from the vibrational energy, collecting electrical charges and storing the electrical charges in a storage means.
There is further provided a method of assembling a vibrating energy harvester means, the method includes the steps of fabricating arrays of vertically aligned piezoelectric material on a substrate, assembling a plurality of covers encapsulating the fabricated arrays and assembling at least one charge collecting element inside an encapsulation and a plurality of springs connected to the at least one charge collecting element and a plurality of covers.
The present invention consists of several novel features and a combination of parts hereinafter fully described and illustrated in the accompanying description and drawings, it being understood that various changes in the details may be made without departing from the scope of the invention or sacrificing any of the advantages of the present invention.
BRIEF DESCRIPTION OF THE DRAWINGS
The present invention will be fully understood from the detailed description given herein below and the accompanying drawings which are given by way of illustration only, and thus are not limitative of the present invention, wherein:
Figure 1 illustrates a flowchart depicting a method of assembling a vibrating energy harvester means in the preferred embodiment of the invention;
Figure 2 illustrates a perspective view of the fabrication of nanowires on a metal alloy substrate in the preferred embodiment of the invention; Figure 3 illustrates a perspective view of polished nanowires to a predetermined height in the preferred embodiment of the invention;
Figure 4 illustrates a perspective view of integration of the plurality of metal alloy substrates that include the arrays of nanowires in the preferred embodiment of the invention; Figure 5 illustrates a perspective view of the assembled conductive plates in the preferred embodiment of the invention;
Figure 6 illustrates a perspective view of the assembled conductive plates and plurality of covers in the preferred embodiment of the invention;
Figure 7 illustrates a perspective view of the assembled electrode, the plurality of springs and mass with the at least two covers together with the at least two conductive plates in the preferred embodiment of the invention; Figure 8 illustrates a top, side and bottom view of the vibrating energy harvester device in the preferred embodiment of the invention;
Figure 9 illustrates a top, side and bottom view of the vibrating energy harvester device in a second embodiment of the invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
The present invention relates to a vibrating energy harvester device, a method of harvesting energy thereof and a method of assembling said device. Hereinafter, this specification will describe the present invention according to the preferred embodiments of the present invention. However, it is to be understood that limiting the description to the preferred embodiments of the invention is merely to facilitate discussion of the present invention and it is envisioned that those skilled in the art may devise various modifications and equivalents without departing from the scope of the appended claims.
The following detailed description of the preferred embodiments will now be described in accordance with the attached drawings, either individually or in combination. An embodiment of the present invention as shown in Figure 8 provides for a vibrating energy harvester device (100). The device (100) includes at least two conductive plates (101 , 105) spaced apart, a plurality of projected conductive elements (104) positionable on each of the at least two conductive plates (101 , 105) such that the projected conductive elements (104) are vertically aligned and spaced apart from each other, wherein two arrays of projected conductive elements (104) are facing both the at least two conductive plates (101 , 105) and at least one charge collecting element (103) positionable between the two arrays of projected conductive elements (104), wherein the at least one charge collecting element (103) is electrically connectable to the at least two conductive plates (101 , 105) which further include two arrays of projected conductive elements (104). The device (100) is further connectable to a charge control circuit and a storage unit. An example of the at least one charge collecting element (103) is a metal electrode with corrugated sides that is used in this embodiment of the invention. The electrode is a microelectromechanical systems (MEMS) based charge collecting electrode.
The plurality of projected conductive elements (104) are nanowires which are used in this embodiment of the invention. The nanowires are constructible of piezoelectric material. A plurality of springs (109, 110) are further attachable to the at least two covers (102, 107) such that the at least one charge collecting element (103) is attachable to the plurality of springs (109,110). The plurality of springs (109, 110) are encapsulated by at least two covers (102, 107) that hold the plurality of springs (109,110), nanowires and the charge collecting element (103) together. The plurality of springs (109, 110) used in this embodiment of the invention are two springs that are of two different stiffness values.
A mass (106) is positionable in intermediary between each spring (109, 110) and the charge collecting element (103). An example of the charge collecting means (103) used in this embodiment of the invention is an electrode. A longitudinal connecting means may be used between the mass (106) and the electrode as seen in Figure 8. In this embodiment of the invention, the longitudinal connecting means is a rod (108). However, it is to be appreciated that the rod (108) may be exchangeable with other longitudinal connecting means depending on application of the device.
A method of harvesting energy from a vibrating means is described herein. The method includes the steps of receiving vibrational energy from environment, translating vibrational energy from the environment by at least one charge collecting element (103), accumulating electrical charges from the vibrational energy, collecting electrical charges and storing the electrical charges in a storage means. A source of vibration such as environmental vibrations translates energy by vibrating the electrode by means of the plurality of springs (109, 110). These vibrations cause motion of the charge collecting element (103) such as an electrode to be in a vertical direction. This motion is caused by the plurality of springs (109, 110) and the mass (109) leading the corrugated sides of the charge collecting element (103) to brush against the nanowires.
The nanowires that are constructed from piezoelectric material experience a compressive and tensile stress on either side of the nanowires, wherein a stress gradient is introduced. The stress gradient gives rise to accumulation of electrical charges on each side of the nanowires. The charges are then collected by the charge collecting element (103). A charge control circuit which is connected to the charge collecting element (103) stores the collected charges in the storage unit. These stored charges may then be used to power up devices that require electrical energy such as electronic devices and systems. The method is repeated as long as micro vibration continues from the source of vibration. Therefore, the electrical energy may be perpetually produced depending on the source of vibration.
A method of assembling a vibrating energy harvester means is described. The method includes the steps of fabricating arrays of vertically aligned piezoelectric material on a substrate, assembling a plurality of covers (102,107) encapsulating the fabricated arrays and assembling at least one charge collecting element (103) inside an encapsulation and a plurality of springs (109, 110) connected to the at least one charge collecting element (103) and a plurality of covers (102, 107).
Figure 1 shows a flowchart that illustrates the steps in the method of assembling the vibrating energy harvester means such as the vibrating energy harvester device (100). Fabrication of the nanowires are performed by growing or depositing vertically aligned piezoelectric material such as zinc oxide on a metal alloy substrate as seen in Figure 2. Edges of the nanowires are polished by mechanical or chemical means such that the arrays of nanowires are at a predetermined uniform height as seen in Figure 3. Figure 4 shows the plurality of metal alloy substrates that include the arrays of nanowires are then integrated. Figure 5 shows assembly of the at least two conductive plates (101 , 105) which include the plurality of metal alloy substrates with the arrays of nanowires. The at least two conductive plates (101 , 105) are attached facing each other in the device (100).
Figure 6 shows assembly of the at least two covers (102, 107) together with the at least two conductive plates (101 , 105). Figure 7 illustrates assembly of the charge collecting element (103), the plurality of springs (109, 110) and mass (106) with the at least two covers (102, 107) together with the at least two conductive plates (101 , 105). The charge collecting element (103) is fabricated using microtechnology which is then attached to the at least two covers (102, 107) using the plurality of springs (109, 110) and mass (106). The plurality of springs (109, 110) and mass (106) are positioned between the at least two conductive plates (101 , 105). Figure 8 shows a complete assembled and encapsulated vibrating energy harvester device (100). A combination of MEMS based microtechnology and nanotechnology id used to design a self-sustaining power generating apparatus such as the vibrating energy harvester device (100).
In a second embodiment of the vibrating energy harvester device (100) as seen in Figure 9, the plurality of springs (109, 110) are connectable to opposing sides of the charge collecting element (103). An electrode is an example of the charge collecting element (103) in this embodiment of the invention. The plurality of springs (109, 110) are further connectable to at least two anchoring means (111 , 113). The at least two anchoring means (111 , 113) are then attachable to the at least two covers (102, 107) to encapsulate the device (100).
Therefore, the use of hazardous batteries may be eliminated or minimized to reduce replacement cost and enable realization of autonomous systems. The device uses ambient energy to vibrate a microstructure that eliminates the need for a complex setup. This is an improvement over conventional nanoenergy harvesting techniques that require complex setup of ultrasonic source for vibrating nanowires.
As most sensors are deployed in open environment, it is practical to source for an energy source from the environment to power up devices.
It is to be understood that the embodiments of the invention described are exchangeable for other variations of the same in order to be used in various applications. The present embodiment of the invention is intended for, but not restricted to, use in the field of harvesting ambient low scale vibrational energy for sensors that are often deployed in open environment.

Claims

1. A vibrating energy harvester device (100), the device (100) includes:
i. at least two conductive plates (101 , 105) spaced apart; ii. a plurality of projected conductive elements (104) positionable on each of the at least two conductive plates (101 , 105) such that the projected conductive elements (104) are vertically aligned and spaced apart from each other; wherein two arrays of projected conductive elements (104) are facing both the at least two conductive plates (101 , 105); and
iii. at least one charge collecting element (103) positionable between the two arrays of projected conductive elements (104), wherein the at least one charge collecting element (103) is electrically connectable to the at least two conductive plates (101 , 105) which further include two arrays of projected conductive elements (104).
2. The device (100) as claimed in claim 1, wherein the device (100) is further connectable to a charge control circuit and a storage unit.
3. The device (100) as claimed in claim 1 , wherein the at least one charge collecting element (103) is a corrugated metal electrode.
4. The device (100) as claimed in claim 1 , wherein the plurality of projected conductive elements (104) are nanowires.
5. The device (100) as claimed in claim 4, wherein the nanowires are constructible of piezoelectric material.
6. The device ( 00) as claimed in claim 1 , wherein a plurality of springs (109, 110) are attachable to the at least two conductive plates (101 , 105) such that the at least one charge collecting element (103) are attachable to the plurality of springs (109,110).
7. The device (100) as claimed in claim 6, wherein the plurality of springs (109,110) are encapsulated by at least two covers (102, 107) that hold the plurality of springs (109,110), nanowires and the charge collecting element (103) together.
8. The device (100) as claimed in claim 6, wherein the plurality of springs (109, 110) are further connectable to at least two anchoring means (111 , 113).
9. The device (100) as claimed in claim 8, wherein at least two anchoring means (111 , 113) are then attachable to the at least two covers (102, 107).
10. A method of harvesting energy from a vibrating means, the method includes the steps of:
i. receiving vibrational energy from environment;
ii. translating vibrational energy from the environment by at least one charge collecting element (103);
iii. accumulating electrical charges from the vibrational energy;
iv. collecting electrical charges; and
v. storing the electrical charges in a storage means.
11. The method as claimed in claim 10, wherein the at least one charge collecting element (103) is an electrode.
12. The method as claimed in claim 10, wherein the storage means is a storage unit.
13. A method of assembling a vibrating energy harvester means, the method includes the steps of:
i. fabricating arrays of vertically aligned piezoelectric material on a substrate;
ii. assembling a plurality of covers (102,107) encapsulating the fabricated arrays; and
iii. assembling at least one charge collecting element (103) inside an encapsulation and a plurality of springs (109, 110) connected to the at least one charge collecting element (103) and a plurality of covers (102, 107).
14. The method as claimed in claim 13, wherein the method further includes the steps of polishing edges of the arrays to a predetermined height.
15. The method as claimed in claim 13, wherein the at least one charge collecting element (103) is an electrode.
PCT/MY2010/000294 2010-08-02 2010-11-25 A vibrating energy harvester device and methods thereof WO2012018247A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5801475A (en) * 1993-09-30 1998-09-01 Mitsuteru Kimura Piezo-electricity generation device
US20020172820A1 (en) * 2001-03-30 2002-11-21 The Regents Of The University Of California Methods of fabricating nanostructures and nanowires and devices fabricated therefrom
US20040182431A1 (en) * 1999-05-04 2004-09-23 Neokismet, L.L.C. Diode energy converter for chemical kinetic electron energy transfer
US20080067618A1 (en) * 2006-06-13 2008-03-20 Georgia Tech Research Corporation Nano-Piezoelectronics

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5801475A (en) * 1993-09-30 1998-09-01 Mitsuteru Kimura Piezo-electricity generation device
US20040182431A1 (en) * 1999-05-04 2004-09-23 Neokismet, L.L.C. Diode energy converter for chemical kinetic electron energy transfer
US20020172820A1 (en) * 2001-03-30 2002-11-21 The Regents Of The University Of California Methods of fabricating nanostructures and nanowires and devices fabricated therefrom
US20080067618A1 (en) * 2006-06-13 2008-03-20 Georgia Tech Research Corporation Nano-Piezoelectronics

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