WO2011109535A3 - Solar cell process carrier - Google Patents

Solar cell process carrier Download PDF

Info

Publication number
WO2011109535A3
WO2011109535A3 PCT/US2011/026890 US2011026890W WO2011109535A3 WO 2011109535 A3 WO2011109535 A3 WO 2011109535A3 US 2011026890 W US2011026890 W US 2011026890W WO 2011109535 A3 WO2011109535 A3 WO 2011109535A3
Authority
WO
WIPO (PCT)
Prior art keywords
solar cell
carrier
cell process
process carrier
base portion
Prior art date
Application number
PCT/US2011/026890
Other languages
French (fr)
Other versions
WO2011109535A2 (en
Inventor
John Burns
Jeffery J. King
Original Assignee
Entergris, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entergris, Inc. filed Critical Entergris, Inc.
Publication of WO2011109535A2 publication Critical patent/WO2011109535A2/en
Publication of WO2011109535A3 publication Critical patent/WO2011109535A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements

Abstract

A solar cell process carrier for immersion of solar cells into process fluids, the carrier comprising a pair of endwalls with a plurality of rails extending therebetween, the plurality of rails defining a solar cell receiving region, each rail having a base portion and a plurality of teeth arranged sequentially and axially along and extending from said base portion, each tooth having a cell contact area thereon and each rail further having a means for enhancing fluid flow at each of said cell contact areas.
PCT/US2011/026890 2010-03-02 2011-03-02 Solar cell process carrier WO2011109535A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US30973110P 2010-03-02 2010-03-02
US61/309,731 2010-03-02

Publications (2)

Publication Number Publication Date
WO2011109535A2 WO2011109535A2 (en) 2011-09-09
WO2011109535A3 true WO2011109535A3 (en) 2012-01-12

Family

ID=44542825

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2011/026890 WO2011109535A2 (en) 2010-03-02 2011-03-02 Solar cell process carrier

Country Status (2)

Country Link
TW (1) TW201218408A (en)
WO (1) WO2011109535A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015092038A1 (en) * 2013-12-20 2015-06-25 Centrotherm Photovoltaics Ag Wafer boat
US20220102175A1 (en) * 2020-09-30 2022-03-31 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor substrate boat and methods of using the same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4872554A (en) * 1987-07-02 1989-10-10 Fluoroware, Inc. Reinforced carrier with embedded rigid insert
US6099645A (en) * 1999-07-09 2000-08-08 Union Oil Company Of California Vertical semiconductor wafer carrier with slats
US6357604B1 (en) * 1998-10-02 2002-03-19 Larry S. Wingo Long tooth rails for semiconductor wafer carriers
KR100781723B1 (en) * 2006-07-31 2007-12-03 에이펫(주) A wafer carrier
JP2008300796A (en) * 2007-06-04 2008-12-11 Shin Etsu Handotai Co Ltd Wafer carrier, and wafer etching method using same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4872554A (en) * 1987-07-02 1989-10-10 Fluoroware, Inc. Reinforced carrier with embedded rigid insert
US6357604B1 (en) * 1998-10-02 2002-03-19 Larry S. Wingo Long tooth rails for semiconductor wafer carriers
US6099645A (en) * 1999-07-09 2000-08-08 Union Oil Company Of California Vertical semiconductor wafer carrier with slats
KR100781723B1 (en) * 2006-07-31 2007-12-03 에이펫(주) A wafer carrier
JP2008300796A (en) * 2007-06-04 2008-12-11 Shin Etsu Handotai Co Ltd Wafer carrier, and wafer etching method using same

Also Published As

Publication number Publication date
WO2011109535A2 (en) 2011-09-09
TW201218408A (en) 2012-05-01

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